PFxx-OMP0001CN

L/mim 0999,999,990 L 1 L/min 10 L (50 msec.) 1 L/pulse 10 L/pulse 2 2 5 00.8MPa 1.2MPa 3 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -62No.PF-OMP0001CN-F PFMB7501 PFMB7102 PFMB7202 15 V420 mA () 1 k 6 24 V 600 12 V 300 7

25

Relationship between the kinematic viscosity Ratio of amount of discharge against clear water (%) 100 50 0 1 2 3 4 5 10 20 30 40 50 100 Viscosity (mPas) Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] Transfer is possible up to about 100 mPas. 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 585 PB1000A Series Working Principle: Built-in Solenoid Valve/Air Operated Discharge

PSxx-OMM0002CN

OUT1 5 OUT1 6 7 OUT2 8 OUT2 -N-P 9 OUT2 10 OUT2 11 12 -R-S-T-V 13 14 15 16 17 18 19 20 2 -37No.PS-OMM0002CN-F [F99] <> [F99] [ON] 5 [oFF] [F99] -38No.PS-OMM0002CN-F / ()() 1 "Hi" 1 1 "Lo" 1 1 () 10%0 (1dight ) 1 LoC1 () < -> 5 LoCUnL () / -39No.PS-OMM0002CN-F < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 41/ [UnL] [FAL] 3[LoC] -40No.PS-OMM0002CN-F

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (17) Parts where grease is to be applied Application of grease Grease 1 Body (inner sliding surface) Piston(Seal groove) 4 Slider(Sliding surface) 7 GR-S-010 9 Tube gasket Piston seal 10 Cushion sealFor with air cushion 36 O-ring 25 26 33 36 9 10 10 1 9 36 4 4 26 33 25 33 26 25 37 - 2. Mount the tube gasket 9 to the left cover 3 to mount to the body 1 .

LECA6_C

D (1-148) RESETS VON (1) D 51 - 1-149 RESETS VON (1) D 1-150 D RESETS VON (1) 1-192 E ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A () (50mm ) () () 5m 5m 10% 15m 20% 53 - 14 / 141.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

LEF-OM007xx

LEFS40 Speed 1000mm/sec 0 [/min] 50 [/min] 10,000,000 80 [/min] 100 [/min] ISO CLASS4 ISO CLASS5 ISO CLASS6 1,000,000 Particle concentration [particles/m3] 100,000 10,000 1,000 100 10 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Clean class Amount of recommended vacuum aspiration (/min(ANR)) Type Speed mm/s) ISO 14644-1 Fed.Std.209E 6 1000 5 5 100 10 4 10 30 6 1000 5 5 100 10 4 10 30

VCL

19 0.5 2.0 7 1.4 33 0.2 10 2.1 50 0.1 3 0.35 8.4 2.0 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 4 0.60 14 1.1 5 0.85 20 0.7 VCL4 2.0 4 7 1.4 33 0.3 10 2.1 50 0.12 Note 1) Refer to page 17-2-32 in model selection regarding port size and orifice size combinations.

Compact Cylinder with Air Cushion and Lock Series RLQ

auto switch: 10 to 70C (with no freezing) With auto switch: 10 to 60C (with no freezing) Non-lube JIS class 2 +1.0 0 mm 50 to 500 mm/s 1/8 1/4 Note) The minimum operating pressure of the cylinder is 0.1 MPa when the cylinder and lock are connected to separate ports.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.

Shock Absorbers and Rate Controls

. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

Precision Regulator Series IR1000/2000/3000

NBR 1 1 P36203010#1 AP100 P36203010#1 Damper 7 NBR, other P36201021 1 1 P36202026 1 P36202026 O-ring 8 H-NBR 2.5 x 1.05 2 2 1.42 x 1.52 3 1.42 x 1.52 O-ring 9 NBR 1 1 4.5 x 1 3 3 4.5 x 1 4.5 x 1 4.5 x 1 O-ring 10 NBR 10 x 1.3 1 1 27.8 x 1.5 1 1 JISB2401P11 1 27.8 x 1.5 JISB2401P11 O-ring 11 NBR JISB2401P5 Note) 1 1 JISB2401P5 Note) O-ring 12 NBR JISB2401P16 Note) 2 2 JISB2401P16

Precision Cylinder Series MTS

steel 12 to 40: Quenched/Hard chrome plated Nickel plated Alloyed steel Hexagon socket head set screw Piston seal Spline seal Collar gasket 1 1 Stainless steel 8 to 16 Black zinc chromated Alloyed steel 7 Cushion bolt 1 1 Carbon steel 20 to 40: Zinc chromated NBR 8 9 10 11 12 13 14 End lock bolt Collar Spline nut Cushion needle Cap Lock piston Lock spring 1 1 Carbon steel Quenched/Zinc chromated

Digital Gap Checker

unit: kPa 6: Cannot be selected for 1 station. 7: At the factory, the options are not attached to the product, but packed together with it for shipment. 8: Refer to 8 (page 10). 9: DIN rail must be ordered separately. 10: About the number of brackets. 1 station: 1 piece is packed More than 2 stations: 2 pieces is packed -8No.PS-OMT0002-E 2 About this product With control unit -9No.PS-OMT0002

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

COQ2BP

Nominal diameter: 3mrn : ~1,,;; Thread tolerance J!S cass 2 Slroke length tolerance (mm) .. 1.0 0 High Magnetic Field Resistance Series CD02BP Distance From Auto Switch Side Face .. > 'y " 50 / Saf. Zone 40 :/ 1 30 " /' i 20 ;/ Danger Zone 10 SOOO 1 Safe ~~n~ .-. 40 . .. lao :!20 g . .. .

IDX-OM-M051

1 2 1 Anti-corrosive treated copper tube (option C) . 1 2 1 2 2 With Chinese labels and a Chinese operation manual (option G) . 1 2 1 2 3 Medium pressure type (option K) . 1 2 1 2 4 Metal name plate (option P) . 1 2 1 2 5 Ground fault circuit interrupter (option R) . 1 2 1 2 6 Timer type solenoid valve with auto drain (option V) . 1 2 1 2 7 Facility water piping direction . 1 3 1 3 Name

VP4

Effective area (mm2) Port size Weight (kg) Model Type of actuation 3.3 1 1 1 1 1 1 1 120 280 300 120 280 300 110 VP4150 1 4 1 2 Single 9.5 2 position 3 position VP4170 3.8 VP4250 1 4 1 2 Double 10 VP4270 4.4 VP4350 Closed center 4.4 Exhaust center 1 110 VP4450 3-6-2 3 Large Size 5 Port Solenoid Valve Rubber Seal Series VP450/470 How to Use DIN Terminal Precautions 1.

Series SY100 3 Port Solenoid Valve Rubber Seal

SY SY100-77-1A 10 stations 10 P R P port SYJ M5 X 0.8 Note 1) Piping to exhaust port not possible. VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ...