Rotary Table/Vane Style Series MSU Refer to pages 796 and 797 for detailed solid state auto switches with pre-wired connectors. 150 Series MSUA Rotary Table: High Precision Type Vane Style Specifications MSUA1 MSUA3 MSUA7 MSUA20 Model 2 Single vane Vane type Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Fluid Air (Non-lube) Proof pressure (MPa) 1.05 1.5 5 to 60C Ambient and fluid temperature
(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.
(11) PE port R 3 1 P (24) 9 2-Rc 1/4 1(P) port 2-Rc 1/4 2(R) port 21 10 41 L plug connector (L) DIN terminal (Y) 300 89 (Lead wire length) Indicator light Pg.7 92.5 Max. 10 54.5 <59.5> Indicator light 1 P 3 R Cover diameter 1.5 Cross section 0.23 mm2 Applicable cable O.D. < >: AC 3.5 to 7 85.5 78 60 M plug connector (M) R 3 1 P (Lead wire length) 94.5 83 Cover diameter 1.5 Cross section 0.23
100 100 LEH LEY -X5 10 10 11LEFS 11LEFS Suction flow rate: 30 L/min Suction flow rate: 30 L/min 11LEJS 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5
MHC2, MHCA2, MHCM2 F L F MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S Pressure 0.6MPa 4 4 2 Pressure 0.6MPa 0.5 Pressure 0.6MPa Gripping force N Gripping force N Gripping force N 3 3 0.4 0.5 0.5 1 2 2 0.3 0.4 0.4 0.2 1 1 0.3 0 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 2 Series MHC2/MHCA2/MHCM2 Confirmation of inertial moment of attachment Step
Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-1A Type 21 How to Order VF VV5Z5 05 21 1 4(A), 2(B) port VFR Stations P, R port thread type VP4 02 2 stations 1(P) port NPT G Nil Rc Rc 1/4 20 VZS 20 stations 00F 00N 3/5(R) port NPTF 00T VFS Rc 1/4 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both
-04 FH540-06 FH540-08 FH540-10 FH540-12 10 3/8 3/8 10 FH541-04 FH541-06 FH541-08 FH541-10 FH541-12 FH541-16 15 (1/2B) 20 1/2 1/2 20 20 (3/4B) 20 (3/4B) 50 3/4 3/4 50 Max. 14 MPa Max. 3.5 MPa 25 (1B) 25 (1B) 80 1 1 80 FH341-10 FH341-12 FH341-16 32 (1 1/4B) 32 (1 1/4B) 120 1 1/4 1 1/4 120 40 (1 1/2B) 40 (1 1/2B) 160 1 1/2 1 1/2 160 50 (2B) 50 (2B) 260 260 FH440-03 FH440-04 FH440-
4 2 / Valves 6.3 32 Valves shared 4 2 / Valves 6.3 . 4-3 EX245-DX1 2 3..10 / module 1..8 7.4 EX245-DX1 shared 2 3..10 / module 1..8 7.4 . 4-3 EX245-DY1 1 3..10 / module 1..8 8.4 EX245-DY1 shared 1 3..10 / module 1..8 8.4 . 4-3 EX245-LA1 6134 6130 3..10 / module 1..8 9.4 EX245-LB1 6134 6130 3..10 / module 1..8 9.4 23 No.EX-OMW0014CN-A 4.1.4.
(Non-locking) Manual override 69.4 (30.5) 24 13.5 2-6.5 (For mounting) (X port) (M5 x 0.8) (R port) Rc 1/4 101.6 26.7 (17.5) 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) 3(R) 27 50 V100 1(P) MAX.10 D: 112.8 26.7 Y: 112.3 101.6 102.4 MAX.10 112.8 (P port) Rc 1/4 SY SYJ 300 (Pitch) Pg9 Pg9 85.6 95.6 27.5 28 (Lead wire length) 95.1 105.1 Y: 97.6 114.6 L1 L2 7.5 90.1 100.1 D: 95.6 112.6 Applicable lead wire
Regenerative error (Note 1) (Note 1) (Note 1) Alarms AL.31 1 0 1 Overspeed AL.32 1 0 0 Overcurrent AL.33 0 0 1 Overvoltage AL.35 1 0 1 Command pulse frequency alarm AL.37 0 0 0 Parameter error AL.45 0 1 1 Main circuit device overheat (Note 1) (Note 1) (Note 1) AL.46 0 1 1 Servo motor overheat (Note 1) (Note 1) (Note 1) AL.47 0 1 1 Cooling fan alarm AL.50 0 1 1 Overload 1 (Note 1) (Note 1)
2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting
to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not
AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84
9 Seal kit NBR MHK12-PS MHK16-PS MHK20-PS MHK25-PS CR(2) P3318113 P3318113-1 P3318113-2 P3318205 P3318205-1 P3318205-2 P3318213 P3318213-1 P3318213-2 P3318305 P3318305-1 P3318305-2 P3318313 P3318313-1 P3318313-2 P3318405 P3318405-1 P3318405-2 P3318413 P3318413-1 P3318413-2 P3318105 P3318105-1 P3318105-2 FKM(2) @0 Dust cover Si(2) Note 1) No. !6 to !
wire) Equivalent to IP65 2.0kg (without lead wire) 1.1kg (without lead wire) 1 1/2 2 1 Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10).]
1.1.1 SAFETY TRAINING -1-1 1.1.2 IDENTIFICATION OF DANGER, WARNING, CAUTION AND NOTE -1-1 1.2 WARNING LABEL AND CAUTION LABEL -1-3 1.2.1 THE POSITION OF ATTACHED WARNING LABEL AND CAUTION LABEL -1-3 1.3 PRECAUTIONS FOR RUNNING -1-4 1.3.1 FOR SAFETY -1-4 1.3.2 SAFETY INTERLOCK -1-5 2 CAUTION ON INSTALLATION -2-1 2.1 ENVIRONMENT -2-1 2.2 INSTALLATION -2-2 2.3 MOUNTING -2-3 2.4 PIPING -2-4 2.5
4 20 Round head no.0 Philips screw 1 19 Bearing 1 High precision type:2 (angular duplex bearing) 18 Bearing 1 17 Piston seal 4 16 Wear ring 4 15 Magnet 2 14 Bearing retainer 1 13 Table 1 12 GasketEnd cover 1 11 GasketCover 1 10 Push nut 2 9 Shock absorber holder 1 8 Arm 902 pcs. 1801 piece 7 Pinion 1 6 Piston 2 5 End cover 1 4 Seal 1 3 Plate 1 2 Cover 1 1 Body 1 No Description Qty Note 21
(mm) Connection thread R 10 D1 Note) D2 Model L1 L2 FR soft nylon FR double layer KRK06-02S KRK06-01S 1 8 12 10 33 13 21 35 25 26 36 33 MS 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 10 18 36.5 35 1 4 19 3.4 14 17 12 14 17 6 12.8 6.9 KRK06-03S 37 19.7 3 8 1 8 Applicable tubing T KRK08-01S KRK08-02S KRK08-03S KRK10-01S KRK10-02S KRK10-03S 1 4 3 8 1 8 1 4 3 8 39 41 42 43.5 45 15.2 12
4-4.5 (For mounting) 9 + 45.6 13.4 + + 2.5 2.5 12.5 15.2 2 123 [127.4] 107 [111.4] 10 18.5 23.5 One-touch fitting 6, 1/4" (A, B port) R P R R P R 16.5 16.5 A B A B A B A B A B 77.6 [79.8] 45 49 77 [79.2] 65 Applicable tubing O.D.: 4, 5/32", 6, 1/4" 82.8 16.5 + + + + + (3.2) Triangle mark 52.8 1/8 (P, R port) (Pitch) P = 17.5 21 (Station 1) (Station n) (Light/surge voltage suppressor) 48.6
0 () 1 2 () 3 () 4 5 6 1 7 8 9 ON 10 11 12 13 1 14 2 15 Word2/ Word Bit 0 OFF ON*1 1-7 () 2 8-9 1:ABS() 2:INC() *2 10-15 () Word3 Word Bit 3 0-15 1 1 mm/s Word4,5 Word Bit 4 0-15 () (-)(+)*3 0.01 mm 5 0-15 () Word6 Word Bit 6 0-15 1 *1 1 mm/s 2 *1 ON ONOFF PLC *2 1(ABS)2(INC) *3 20(P.83) -39- Word7 Word Bit 7 0-15 1 *1 1 mm/s 2 Word8 Word Bit 8 0-15 *1 1% Word9