Series VS

2,4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS SIDE U SIDE D n 3 STATION 2 1 SMC SMC BB 2 2 2 2 2 2 AA S R Q 4 4 4 4 4 4 U T X Y Z V W PITCH NOTE #2 177.5 A 119 B 9 C 50.5 D 48.5 E 58.5 F 87 G 105 H 20.5 I 26.5 J 20.5 K 30.5 L 58.5 M 22 N 45.5 O 52 P 81 Q 49 R 18 S 5.5 T SIZE 1 SIZE 2 SIZE 3 189.5 125 9 52 52.5 64.5 96.5 112 26 34 26 37 64.5 31.5 58.5 67.5 97.5 58.5 20.5 3 41 52 41 52 92 36

Coolant Valve

Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 292.5 (294.5) 308 (310) 332 (334) 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36

Manifold Specifications

4 101 5 121 6 141 7 161 8 181 9 201 10 221 11 241 12 261 13 281 14 301 15 321 16 341 17 361 18 381 19 401 20 421 21 441 22 461 23 481 24 501 3 81 236 256 276 296 316 336 356 376 396 416 436 456 476 496 516 536 556 576 596 616 636 656 292.5 L1 L2 (MP) L2 (AP) 312.5 332.5 352.5 372.5 392.5 412.5 432.5 452.5 472.5 492.5 512.5 532.5 552.5 572.5 592.5 612.5 632.5 652.5 672.5 692.5 712.5 3-7-36

MXH Series Compact Slide

Q Q Q MXH Series Q Q Q Product Features .pages 24-25 Q Q MXH Series Q How to Order .page 26 Q Specifications .page 27 Q How to Select .pages 28-29 Q Table Deflection .pages 30-31 Q Construction/ Parts List, Seal Kits .page 32 Q Dimensional Drawings.pages 33-36 Q Auto Switch Specifications and Mounting .pages 37-38 Q Please see safety instructions on pages 9

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

56 3.6 160 45 12 14 27 Y X Y X CJ1 up to 1000 266 210 248 100 102.5 72 4.5 192 55 12 14 30 LS + Stroke LX up to 1000 270 214 252 120 122 89 4.5 196 65 14 16 32 ZZ + Stroke LZ CJP Front flange(F)/Locking at head end (Hl) CJ2 Hl/ Rl/ Wl (mm) Cushion valve Stroke range Bore size (mm) CM2 Fd FZ FY FX FT FE FD B 4-FD Port 32 40 50 63 80 100 up to 700 25 79 32 64 10 3 7 50 C85 up to 800 31 90 36

PA300/500/700

Torque for Mounting Screw VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm 5-5-14 3 3 Port Air Operated Valve Series VPA300/500/700 Dimensions A B Body ported: VPA34258.6 20.4 16.5 NO NC 2(A) 26.5 21.5 2.25 PA Switch mark (PA port) Rc 1/8 SA 23.2 26.7 VA (PA port) (Rc 1/8) Bracket (Mounting hole) 23.2 (Mounting groove for M5 thread) 2-R2.7 SA PA VA 5 36

Modular F.R.L. Unit

36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20C only, the position of the pressure gauge is above the piping center.

Modular F.R.L. Unit

36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

NCG/CG1

46 28 28 28 30 36 46 Consists of pin, flat washer and hexagon socket head cap bolt.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29 11.4 5.2 16.4 27 10 23 16 37.8 23 6 18 12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13 30.6 24 42.5 24.5 7.5 22 15 0.02 0.02 0.05 MHZ2-20D 8 18 84.8 10 16.8 50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36

Hand Valve Series VH

Refer to p. 0-33 to 0-36 for Safety Instructions and common precautions Design Piping SlA Caution Warning VlA q Not suitable for use as a selector valve or a divider valve. The valve can malfunction due to air leakage w Not suitable for vaccum applications.

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

MX-OMP0051

,,, 3-2 18 3-3 1 2 3 4 5 6 7 8 MXQ6(B),8(B,C),12(B,C) 9 Assy MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A) 10 (MXQ6(B)) (MXQ8(A,B,C),12(A,B,C)) (MXQ8(A,B,C),12(A,B,C)) 11 (MXQ16(A,B),20(A,B),25(A)) (MXQ16(A,B),20(A,B),25(A)) 12 13 A 14 15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

guide + Slide screw LJ1S Slider guide + Slide screw IX IY High rigidity IX H Low High rigidity achieved by the use of a hollow box type aluminum construction Low High Work load/Allowable moment IY W Model IX IY W H Sectional secondary moment Low noise (slide screw type) Slide screw + Slider guide: 47dB (LJ1S) Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36

SYJA300

SYJA7401 02 Body ported: SYJA72-01(-F) 1/8,1/4 (A port) 2 x 3.2 (For manifold mounting) 25 25.5 SYA 12 SYJA 13 1.5 A 1 M5 x 0.8 (Pilot port) 23.5 11 VZA (Bracket) 48.7 VFA Manual override M5 x 0.8 (Pilot port) 2 x 4.5 (For mounting) 2 x 4.3 (For mounting) (External pilot port) (For solenoid valve) VFRA Manual override 2 x M4 x 0.7 (Mounting screw) 23.5 2 x 3.2 (For mounting) 11 VA A 1 (44) (36

•

2 , ~Y40 36 34 36 33 37 35 , 36 34 I ',ills (fIyjon tuIMIIl!>Z4;) , 16,5 t ,2.5 U4 (Soft tube 1>4/2.5) 14.5 5 1.8 , 38 1 37 38 35 ' tiS ('Soft tuIMI 1>6/4) 16.5 7 ,2,5 Z~YQ 38 35 33 Series ZPY/With Buffer Connection Connection Port: Barb Fittin Pad Type Flat, Flat with rib, Deep Vaccum Entry Horizontal Type Mounting ale Thread Flat type Flat type '"s~ M6 XO 75 . !

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 28.5 32 Z ZZ G (NN 1) x H 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) HA 40 40 40 25 36 72 76 Model F 35 35 35 50 35 55 65 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 GA 15 15 15 42 51 61 111 I 10 10

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G H K L M N P Q R T U X Y1 Y2 Z Q2 Q3 Q4 10 29 22 19.5 14 4 0.004 0.016 9 0 0.036 1 7 9 0.5 16.5 9.5 3 M3 x 0.5 3.5 3.5 M3 x 0.5 10.6 3 31 25 17 41 15 34 25 21.2 18 5 0.004 0.016 12 0 0.043 1.5 6 10 0.5 19 10 3.2 M3 x 0.5 3.5 3.5 M3 x 0.5 12.6 3 36 29 21 48 20 42 34.5 25 20 6 0.004 0.016 14 0 0.043 1.5 8 10 0.5 25.5 13 4 M4 x 0.7 4.5 4.5 M5 x 0.8 16 4 44 36

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Dimensions/LTF8PH (2 x n1) x 6.6, Drill through 13, counter bore depth 6 thread depth 9 80 4 x M6 x 1 46 Sensor cable Sensor cable fixing clip Stroke + 96 (Table movement range) (25.5) 60 106.5 56 21.5 A 61.5 45 A 21.5 31.5 76.6 88.2 81 Stroke + 135 Stroke + 228 Upper: Incremental encoder Lower: Absolute encoder 50 12 40 5 Dog fitting for switch Work piece mounting reference plane 19 36