Electric Actuator

Time [s] Method 2: Calculation T1 T2 T3 T4 T5 Cycle time T can be found from the following equation. T6 T = T1 + T2 + T3 + T4 [s] Calculation example) T1 to T4 can be calculated as follows. L : Stroke [mm] V : Speed [mm/s] a1: Acceleration [mm/s2] a2: Deceleration [mm/s2] T1 and T3 can be obtained by the following equation.

ZP

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1

JXCx-OMT0061CN

(P.79) USB LAN 8 - 2.4 () 1 (LECPMJ-) 1 1 *1 1 *1 (LE-CP---) 1 *2 (LEC-CMJ-) 1 *1 *2 [] (: LEC-T1-3G) (LEC-W2) (USB ) 2 3.4 (P.15) 3 4.1 (STAION NO.B RATE)(P.17) 4PLC PLC 4.3 PLC (P.18) 5 (CN1CN5) 5. (P.19) 9 - 6 DC24V LED LED PWR ALM LED 8. LED (P.28) LECLEDALM CC-Link CN4 I/O 16.

ZSE30/ISE30

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/low pressure Option 2 Piping specifications Nil None Bracket R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch fitting 5/32" One-touch fiting

42

(For F, L, S, T & T1 kits) D-Side End Plate Assembly 2. U-side end plate assembly part no.

Precision Clean Regulator

ITV 2 1 Options IC Bracket ITVH Model B21-1-T1 Rolled steel plate (electroless nickel plated) Material ITVX Pressure gauge Product part no. SRP1-M5 SRP1-01 Pressure gauge part no.

Vacuum

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnica System Specif ication (continued) 2.

Vacuum

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnic System Specif ication (continued) 2.

CEx-OMG0106

If sensor does not receive any signal within t1 (situation whereby the cylinder stops), this reflects homing is not achieved. Setting of response time should take into consideration of load, mounting condition, tubing length, etc. The response time should be re-calibrated, if the operating conditions change.

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

53

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment 7325 [W] = 7.3 [kW] T = T2 T1 Cooling

Electric Actuator

L Speed: V [mm/s] a1 a2 T = T1 + T2 + T3 + T4 [s] P T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] P T2: Constant speed time can be found from the following equation.

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1

Speed Controller with

Series Proper tightening torque (Nm) AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F 0.07 0.2 0.3 1 2 4 3 Series AS Speed Controller with One-touch Fittings In-line Type L-bracket DIN rail mounting bracket Bracket on a single side Bracket on a single side AS1002F AS2002F L22 L24 L23 L11 t1 t2 2 x D6 2 x D5 L19 L20 L10 L21 L9 L18 L25 L16 L17 L14 L15 L12 L13 AS2052F AS3002F AS4002F L24 L22

Air Cylinder NCQ7 Series Compact Cylinder

^ 9troh6 056 ('g/s') 5 t b 3.5 lb/in 1.75 lblin 075 \%') 6.5 tb 4 lb/in 2 lb/in 106 (1%;) 7.75 tb 4 lblin 2 lblin 150 t1%') 8 r b 3.4 lb/in 1.7 lblin 2OO 12\ 1 2 t b 8 lb/in 3 lblin 250 (2%') 18.75 tb 8.25lblin 3.5 lb/in 300 (3) 23 rb 10.5 lb/in 3.75 lb/in 400 (4') 26.5 tb 8.5 lblin 3.5 lb/in Series NCQT Constru.ction Spring Retum Rubber Bumper Double Ac'ting Sgring Extend 1 4 Bumper B Urethane

Clean Regulator

If the wrench is applied on any other part, air leakage or other damage may occur. 862 Clean Regulator SRH Series Brackets For SRH3000 For SRH4000 Model B21-1-T1 1350112-T1 ARJ Material Rolled sheet steel (Electroless nickel plated) AR425 to 935 30 ARX 36 61 51 AMR 31 37 8.5 ARM Dimensions 10 ARP 21 20 28 6.5 8 IR-A 13.5 30 50 28 41 2.3 1.6 IR IRV VEX SRH SRH SRP SRF ITV IC ITVH ITVX PVQ

•

T1 NPTF Ya PipIng port / I M5XO 8 "eplh 5/ I 8 ~~ With Bracket A I 30 ~ o ~ I I ::1 ';!1 rl .J '1'1.. I ~J' 20 24.5 zs -~ -eli Bracket View A Panel Mount Type Side dimensions for 418 panel mount type 0 40 21.2 , 6 8.5 36.0-5 >, D 0 . 1,16o;~1 ~ \ z 5-22-0 1 ZS-22-02 Thickness of the panel is 1 to 3.2mm. Panel mount adaptor A Panel mount adaptor B SMC CORPORATION 1-16-4 Shrmbashi.

JXCx-OMT0005CN

/P.70 USB LAN 8 - 2.4 () 1 JXC-CPW JXCD1 1 JXC-CPW 1 DeviceNet JXC-CD-S T JXC-CD-T *1 1 DeviceNet *2 JXC-CD-S JXC-CD-T 1 *1 *2 [] (LEC-T1-3G) (LEC-W2) (USB ) P5062-5 2 3.4 (P.16) 3 4.1 Node Address/ Data Rate (P.18) 4PLC PLC 5 5.(P. 23) 9 - 6 DC24V LED LED PWR ALM LED 8.LED (P.31) JXCLEDALM DeviceNet SI I/O 16.

Table of Contents

-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12 7 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Grommet type: ISE2-15 01 T1 01 T1 Connector type: ISE2-15C Pressure setting trimmer Pressure setting trimmer L H SET