Vacuum Pad

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

Vacuum Pad

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

Vacuum Pad

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

KJ

(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5

HRX-OM-X084

Piping thread type : When N is selected, NPT thread adapter set will be added. 19: Not included for options Z is selected. 20Not included for options Z,Z1 is selected. 9.1 Specifications HRR Series 9-2 HRX-OM-X084 Chapter 9 Documents 9.1.2 HRR010-W-10/20Table 9-2 Specifications [HRR010-W-10/20-(DMT1)U(YZ)] Model HRR010-W-10-(DMT1)U(YZ) HRR010-W-20-(DMT1)U(YZ) Cooling method Water-Cooled refrigerated

Hydraulic

H N GA F Rc P Rc P 2-NN Width across flats B1 H1 D I 4-LD LH MM A K NC Width across flats NA Y X NB LT Y X S + Stroke LS + Stroke ZZ + Stroke LX LZ (mm) Effective thread length (mm) Stroke r-ange (mm) Bore size (mm) A B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 to 800 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16

58

Y-14A Y-16A H2 H1 L1 A H I type single knuckle I-12A I-14A I-16A Bore size (mm) 125 140 160 NT-12 NT-12 NT-16 18 18 21 181 186 198 100 105 110 65 65 76 125 125 140 29 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Electrostatic Sensor Monitor

The descriptions for OUT2 are the same as those for OUT1, under the conditions that [P_1] should be replaced by [P_2], [P1H] should be replaced by [P2H], [n_1] should be replaced by [n_2], [n1H] should be replaced by [n2H], [H_1] should be replaced by [H_2] and [H1] should be replaced by [H2]. Absolute setting is assigned when window comparator is set.

F

Applicable Connection Model T H1 H2 L1 L2 Mounting M Minimum Tube OD Thread UNF (Width (Width Hole Hole Applicable Connection Model T (M) H1 H2 L1 L2 Mounting M Effective Tube OD mm Thread (Width (Width Hole Orifice (mm 2) Inch Rc(PT) Across Flats) Across Flats) Diameter Rc(PT) Across Flats)Across Flats) Nylon/Ureth 1/8 1/4 KQE01-35 1/2-20 17.46 17.46 31.5 15 14 15.5 2.5 3.2 14 KQE23-02 M12x1

Electric Actuator Triple Axis P&P Unit

Unit Configuration Examples XYZ axes YZ axes Xaxis Yaxis Zaxis 1 Triple Axis P&P Unit How to Order Combination LG 240Z A0 50 20 X L E G J ZB D C Y Axis type X X axis Stroke(mm) 100 10 Ball screw specifications Axis type Z axis Rolled ball screw(mm) 15, lead 20 900 1000 1100 1200 1300 1400 1500 Symbol C 90 A0 B0 C0 D0 E0 F0 Motor specifications Motor specifications Mitsubisi Electric Corporation

Table of Contents

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

C95Series

oO OUT 12,17 304 609 913 1217 1522 1765 30 IN 11 .08 277 554 831 1108 1385 1606 Note) Theoretical outpul(lbl) :: Pressure (pSI) X Piston area (IrI(:h2) Bore SlZ9 .

Soft Start-up Valve

Grommet Locked position With light (GZ) () Varistor Coil () DIN Terminal Caution With light (DZ) (YZ) When locking the manual override on the push-turn locking types (B, C), be sure to push it down before turning.

Soft Start-up Valve

Grommet Locked position With light (GZ) () Varistor Coil () DIN Terminal Caution With light (DZ) (YZ) When locking the manual override on the push-turn locking types (B, C), be sure to push it down before turning.

Combination Cylinder

Single Rod Series CLM2 Axial Foot (L) CLM2L Bore size Stroke CL MLG CNA CNG MNB CNS (mm) CLS Bore Stroke range A 18 22 22 24 AL 15.5 19.5 19.5 21 B 40 47 47 54 B1 13 17 17 22 B2 26 32 32 41 BC 38 45 45 52 BN 80 90 90 BP 1/8 1/8 1/8 1/8 BQ 1/8 1/8 1/8 1/8 BZ D 8 10 12 14 F 13 13 13 16 GA GB 8 8 8 11 GC 8 9 9 8 GD 55 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 GR 4 7 7 7 H 41 45 45 50 H1 5 6 6 8 H2

One-touch Fittings

.: 4, 6 Bulkhead Connector: KQ2E-G Applicable tubing H2 (Width across flats) L1 L2 H1 (Width across flats) Effective area [mm2] Min. port size Mounting plate thickness Release button dimensions Mounting Applicable tubing O.D.

KG

Bulkhead Connector: KGE Effective area (1) (mm 2) H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

17

Spacer length Symbol Mounting position Left Right Left Right Left Right Stroke adjustment unit Spacer delivery type A1 A2 L1 L2 H1 H2 A unit Unit installed Spacer only Nil N L unit Spacers are used to fix the stroke adjustment unit at an intermediate stroke position. Spacers are shipped for a set of two. H unit Note) For details about adjustment range, refer to page 1189.

Flow Control Equipment

Tube size AQ 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-01J TMH-03J AK TMH-05 TMH-07 TMH-09 ASS TMH-11 TMH-13 Dimensions Model D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric Inch TMH-23J TMH-04J 1/8J 1/32J 3/16 6 1/4 8 5/16 10 3/8 12 1/2 8.4 9.3 11.7 11.6 13.1 13.5 15.5 18.5 18.8 21.2 22 TMH-01J TMH-03J TMH-05 3.3 4.5

ZP

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place