Table of Contents

1-2-7 Precautions 1 Be sure to read before handling.

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

Title not found

Parls No. ol auto switch allof D-C7, C8, @swrc I SEBIES NCJ2 Standard Type: Double Acting/Single Bod +1.0 mm o + .04 in 0 Auto switch specification Symbol Double aqting/Single rod Relay Sequence controller lC Circuit \ : In-line Ansle 90' Weioht Table and ACCeSSOfies/prse rcre,10 p14 ro, drairs. caldllalion (Erampre) NcJ2L10-050 6ic weighl -.4402 (o 10) .Addilional weiShl --.1 1 oz '(Cylind6f

Rodless Cylinder for Vacuum Series CYV ø15, ø32

(n) does not exceed "1". n = 1 + 2 + 3 1 Load factor n 1 = m/m max Note Item Review m. m max is the maximum load mass. 1.

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

Micro Mist Separator

Note 1) The number in the table and structural drawing is consistent with the number in the sections [10. How to Replace the Components] (P23-26) and [11. Disassembly Drawing] (P27). -10- 6 Bowl Assembly Specifications 6-1.

Mist Separator

Note 1) The number in the table and structural drawing is consistent with the number in the sections [10. How to Replace the Components] (P23-26) and [11. Disassembly Drawing] (P27). -10- 6 Bowl Assembly Specifications 6-1.

Low Differential Pressure Sensor

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

Low Profile

Universal 0.8 4.9 10 2 (OUT) 1.5 2.3 1 (SUP) 3 (EXH) 3 3 1.7 3 (EXH) port 1 (SUP) port 2 (OUT) port Specific Product Precautions Be sure to read this before handling the products.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

10 1.

PSxx-OMU0005CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 8 DC12~24V10% DC12~24V10% DC(+) DC(-) 9 ( ) 10 11 -72No.PS-OMU0005CN-C No. / / 5m 12 1015 10 SI (kPaMPa) ( ) SI kPa,MPa 13 14 15 16 FUNC 17 -73No.PS-OMU0005CN-C No. 4m 4m FUNC 18 (Er13) 10 10 () 19 ( ) / () -74No.PS-OMU0005CN-C 80mA 7F.S.(3.5F.S.) 1 1 F.S. 1 -75No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 0.0-101.0 kPa -100.0100.0

MX-OMP0051

/ / 1 1. 1-1 2. 2-1 2-2 2-3 2-4 2-5 2-6 2-7 2-8 2-9 2-10 3. 3-1 3-2 3-3 2 *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines.

Speed Controller with One-touch Fittings Series AS In-line Type 1

Flow Rate and Effective Area AS3001F AS2051F AS4001F AS2001F AS1001F Model Metric size 4 6 6 8 3.2, 4, 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 5/32" 3/16", 1/4" 3/16" 1/4", 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Inch size Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Air flow /min (ANR) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area (mm 2) Note) Flow rate values

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

PFxx-OMS0001CN

DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1 (IN) M8 M8 IN OUT (UP) (SET) (DOWN) () OUT1OUT2 ON (1 ) (UP) ON/OFF (SET) (DOWN) ON/OFF -11No.PF-OMS0001CN-A F.S. ( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

Parls No. ol auto switch allof D-C7, C8, @swrc I SEBIES NCJ2 Standard Type: Double Acting/Single Bod +1.0 mm o + .04 in 0 Auto switch specification Symbol Double aqting/Single rod Relay Sequence controller lC Circuit \ : In-line Ansle 90' Weioht Table and ACCeSSOfies/prse rcre,10 p14 ro, drairs. caldllalion (Erampre) NcJ2L10-050 6ic weighl -.4402 (o 10) .Addilional weiShl --.1 1 oz '(Cylind6f

VHK

(mm) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

Steam Valve

1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F

Serial Network

Assumptions 1. Allen-Bradley PLC 1747-L524, list price: $770 as of 10/01 2. Allen-Bradley I/O card 1740OB, list prices: $280 as of 10/01 3. Allen-Bradley Scanner module 1747 SN, list price: $995 as of 10/01 4. Wiring costs are estimated at $10/point and $100/node for SI system. Your costs may vary. 5.

9.8

1 2 1 2 103.5 mm 53.4 mm PReduced in depth! 26.1 mm Can Can copy copy to up to to up to 10 10 switches simultaneously. switches simultaneously. Can copy to up to 10 switches simultaneously. The settings of the master pressure switch (source of copy) can be copied to the slave pressure switches.