Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

IZ-OMU0031-CN

] -24No.IZ*-OMU0031 [F 6] <> [F 6] [F 6] 000 30 -25No.IZ*-OMU0031 [F98] (F) OUT1 OUT2 OUT2 <> [F98] [on] [oFF] [oFF]() 2 [F90] -26No.IZ*-OMU0031 [F99] <> [F99] ON 5 [F99] -27No.IZ*-OMU0031 / () () 1"Hi" 1 1"Hi" 1 / 1() 10F.S. () 1 LoC1 < -> 5 LoCUnL () / -28No.IZ*-OMU0031 5 [UnL] [LoC] 5 [LoC] [UnL] 30/ [UnL] [FAL]3[LoC] -29No.IZ*-OMU0031 [000] <> (29

Power Valve Precision Regulator

Warning Warning Recommended Tightening Torpue Unit: Nm Connection thread M5 1/8 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Torpue 1to1.5*1 3 to 5 8to12 15to20 20to25 28to30 36to38 40to42 48to50 48to50 *1 After tightening by hand, use a tightening tool to tighten an additional 1/6 to 1/4 turn as a guideline. Caution Caution Mounting 1.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

8 1 4 3 8 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AM250 AMl 1 2 3 8 1 2 , AM350 3 4 Related poroducts 1 2 3 4 , AM450 1 2 , 1 1 1, 1 AM550 AM650 3 4 AM450SAM, #4 AM550SAM, #5 AM650SAM, #6 AM150SAM, #1 AM250SAM, #2 AM350SAM, #3 4.6-4 Series AM Dimensions: AM850 Accessory D: With auto drain (N.O.) for AMD850 Options T: With element service indicator Dimensions with mounting bracket Mdel Port

ITVH

Self-diagnosis: 5% F.S. or less Linearity 1% F.S. or less Hysteresis 1% F.S. or less Repeatability 1% F.S. or less Sensitivity 1% F.S. or less Temperature characteristics 0.12% F.S. or less/C Output pressure display Accuracy 2% F.S. or less 1 digit 2 Output pressure [MPa] This range is outside of the control (output). 0.2 MPa Minimum unit Note 4) MPa: 0.01, kgf/cm2: 0.1, bar: 0.1, psi: 1

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

SI unit (CC-Link compatible)

Cable with power supply connector Part number: EX9-AC0 1 0-1 Cable length (L) 1 1000 [mm] 3 3000 [mm] 5 5000 [mm] Item Specifications Pin No.

3 Port Air Operated Valve Series SYJA300 1

Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

Low torque Metal seal type Rotary joint

or less 0.05 Nm or less 0.10 Nm or less 0.20 Nm or less Allowable rotation speed 3000 min-1 (r.p.m.)Note 3) 2000 min-1 (r.p.m.) 1500 min-1 (r.p.m.) 900 min-1 (r.p.m.) 600 min-1 (r.p.m.)

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

Directional Control Driver for Electric Cylinder

Back page 6 Directional Control Driver Precautions 4 Be sure to read this before handling. Caution on Design and Operation 1.

Lubricator Series AL10 to 60

AL Standard Specifications AL30 AL40 AL60 AL10 AL20 AL40-06 AL50 Model 1/4, 3/8 Port size 1/4, 3/8, 1/2 1 M5 x 0.8 1/8, 1/4 3/4 3/4, 1 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa 1/4: 30 3/8: 40 1/2: 50 Note) 1/4: 30 3/8: 40 220 Minimum dripping flow rate (/min (ANR)) 4 15 50 190 Oil capacity (cm3) 55 135 7 25 135 135 135 Recommended lubricant Class 1 turbine oil (

AMP

7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

VP3145-OMH0005

(Refer to page 8.) 1) If a lubricant is used in the system, use class 1 turbine oil (no additive), ISO VG32. Warning 1/8 35 3/8 1520 1/2 2025 3/4 2830 1 3638 1 1/4 4042 1 1/2 4850 2 4850 Follow the procedure of the manufacturer when fittings other than SMC is used. 1) If the fitting is tightened with excessive torque, a large amount of sealant will seep out.

AMPSeries

7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Pressure Gauge Guide

molybdenum coated Aluminum die-casted Black disulfide molybdenum coated 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 1.5 8 1 R Back side thread Cover ring assembly G46 4 1 R Page 14-11-6 Polycarbonate MPa 42.5 3 Rolled steel Black melamine painted Brass Vertical side thread 8 1 R GA46 4 1 R 0 to 0.2 0 to 0.3 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 Back side thread G33 30 8 1 R Page 14-11-8 Vertical

Exhaust Cleaner for Clean Rooms AMP Series

7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AMD

160 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMD250 1 2 3 8 1 2 , AMD350 3 4 1 2 3 4 , AMD450 1 1 1 1 AMD550 AMD650 3 4 1 2 , , 14-20-26 6 Micro Mist Separator Series AMD AMD850 Dimensions Accessory D: With auto-drain (N.O.) for AMD850 female thread Option T: With element service indicator Courtesy of Steven Engineering, Inc.-230