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07 S Option (2) Applicable option Symbol Note 8 v v v 9 v v v 7 v v v 1 v v v v 24 v v v 2 v v v 6 v v v v 3 v v v 4 v v v 5 v v v v Body class Nil J K N Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Orifice dia. 4 8 10 16 22 For high temperature Pilot port thread type Buffer material FFKM Nil M R N LQ1 integral fitting Connection tubing O.D. 1/8" (3) Connection tubing O.D. 4 Rc 1/8 NP T1

Conversely, due to the operation of the switching valve that occurs after a certain length of time, T1 becomes reactivated and T2 assumes the adsorption state. This process is repeated to continuously provide dry air. ID-200Z ID-300Z ID-400Z ID-600Z 15.4 18.7 40.8 55.1 A B C inch mm inch mm inch mm 120 120 170 170 Operation Principles Provides dry air at dew point as low as 58F (50C).

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Measuring conditions 10-CQSXB20-50D Chamber volume Purity of air supplied to chamber 15l Same quality as supply air Evaluation of air purity inside chamber 100 Particle concentration (particles/cf) Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia.: 0.1m Intake rate: 28.3l/min 10 Laser dust monitor 1 Sampling time: 5min Interval time: 55min Operation frequency

T1 Approx. Max. T1 Approx. Max. T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

Conversely, due to the operation of the switching valve that occurs after a certain length of time, T1 becomes reactivated and T2 assumes the adsorption state. This process is repeated to continuously provide dry air.

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

The special cable is packed with the teaching box. (2 to 5m) 61 Series LC1 How to Order Performance/Specifications LC1 1 T1 0 General Specifications LC1-1-T1-0 Power supply Supplied from LC1 Dimensions (mm) 169 x 76 x 20 Weight ( g ) 158 Case type Resin case Display unit 46 x 55 liquid crystal screen Cable length Operating unit Keyswitches, LED indicators 2 3 4 5 2m 3m 4m 5m Cable length

Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1

OUT2 OUT1 CH.B CH.A OUT2 OUT1 CH.B CH.A OUT2 OUT1 CH.B CH.A ZSE2 ISE2 Select "LED2 display mode" by pressing the G button. LED2 display Select "OUT2 output mode" by pressing the G button. LED2 display : Normal mode : Reversed output mode Select "OUT1 output mode" by pressing the G button.

Conversely, due to the operation of the switching valve that occurs after a certain length of time, T1 becomes reactivated and T2 assumes the adsorption state. This process is repeated to continuously provide dry air.

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

Speed:V [mm/s] a1 a2 Reaches the target position T = T1 + T2 + T3 + T4 [s] P T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Options Description Model Material Bracket B21-1-T1 Rolled steel plate (electroless nickel plated) Specifications M5, Rc 1/8 Connection port size Air, N2, CO2, Ar Fluid Proof pressure MPa 1.5 Maximum operating pressure MPa 1.0 0.005 to 0.2 Low pressure type Regulating pressure range MPa 0.01 to 0.4 High pressure type Ambient and fluid temperature (C) 0 to 60 Fluid consumption l/min (ANR)

Change circulating fluid setting temperature.Set the pump output (option T1 only).

ZSE2 ISE2 ZSP Environment Installation ISl Caution Caution qIf the Air Catch Sensor is mounted in an enclosure, make sure that the exhaust port is open to atmospheric pressure to avoid malfunction due to possible pressure build-up inside the enclosure. wConnect the tubing via the M5 fittings to the Air Catch Sensor.

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.