IDX-OM-W025

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

CEx-OMQ0011

No.CE*-OMQ0011-A : : ML2B CEU2 SMC 1 4 2 2-1. 10 2-2. 11 2-3. 11 2-4. 11 3 3-1. 1213 3-2. 14 3-3. 1516 4 4-1. 17 4-2. 1819 4-3. 2021 5 5-1. () 22 5-2. 22 5-3. 23 6 6-1. () 24 6-2 24 6-3 25 7 7-1 26 7-2 27 7-3 28 8 8-1 29 8-2 29 - 9 9-1 9-1-1. 3031 9-1-2. 32 9-2. 9-2-1. 32 9-2-2. 32 9-3. 9-3-1. 33 9-3-2. 34 9-3-3.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

Multi-channel Digital Sensor Monitor ( compatible)

Panel mount adapter ZS-26-B With set screw M3 x 8L (2 pcs.) and waterproof seal Panel mount adapter + Front protective cover ZS-26-C With set screw M3 x 8L (2 pcs.) and waterproof seal Front protective cover ZS-26-01 48 conversion adapter ZS-26-D It is an adapter for attaching PSE200A series in the panel cut size of PSE100 series. -8No.PS-OMW0012-C Summary of Product parts Names of individual

E-P HYREG ® Series VY1

01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

ISA2

With regulator + 2 port solenoid valve With 2 port solenoid valve 16-8-2 3 Air catch sensor Series ISA2 Optimum position is known at a glance.

Digital Flow Switch ( compatible)

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -94No.PF-OMY0002 Dimensions PFMC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions

ITV

side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

High Vacuum L Type Valve

D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39

Thermo-chiller

water inlet (Water-cooled refrigeration) 8 1 Fluid supply Automatic fluid fill port 2 2 6 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 Ensure that the overow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller.

HRS100/150

equipment 7 1 2 Facility water inlet (Water-cooled refrigeration) 8 1 Fluid supply Automatic fluid fill port 2 2 6 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 * Ensure that the overflow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

How To Order: Valve Port size : Without sub-plate Body ported SYJ3 2 5 LZ 1 M3 3 Base mounted (4 Port) SYJ3 3 5 LZ 3 2 Base mounted (5 Port) (With gasket and screws) 2 SYJ3 4 LZ 3 5 M5 : With sub-plate Manual override Type of actuation : Non-locking push type 1 2 3 4 5 2 Position single solenoid 2 Position double solenoid 3 Position closed center 3 Position exhaust center 3 Position pressure

PSE530/200

Use a new sensor connector in case wiring or the snapping of A into B are done incorrectly. 2-M3 x 8L Tighten screws 1/4 to 1/2 turn after the heads are flush with the panel. When using 48 conversion adapter 48 conversion adapter (ZS-26-D) B A 4 3 2 1 4 3 2 1 4 3 2 1 Verify from the top side of A that the lead wires are inserted completely.

High Vacuum L Type Valve

A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83

53

2 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 8 Automatic fluid fill port (Option J) Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

HEC-OM-S008

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

0.01

Left Right 1 2 1 2 1 2 Left Right 1 2 1 2 1 2 ZSE30 ISE30 ZSE40 ISE40 MPa MPa MPa MPa MPa MPa ZSE10 ISE10 ISE70 With n stations, the bracket is mounted on the first and n th sensor from the left. ZSE80 ISE80 1 2 n 1 2 n ZSE ISE ZSP PS MPa MPa MPa ISA2 ISA2 PSE Addition of Manifold Stations IS 1. Loosen the screws and remove the 2 mounting brackets on the front and back side. 2.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

2) Isopropyl alcohol Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration 5% or less, 50C or less Note 1, 2) Ethyl acetate Note 1, 2) Butyl acetate Note 2) Nitric acid (except fuming nitric acid) Concentration 10% or less DI water Sodium hydroxide Concentration 50% or less Nitrogen gas Super pure water Note 1, 2) Toluene Hydrofluoric acid Note 2) Sulfuric acid (except fuming sulfuric

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

1 2 3 4 5 Nil 1 2 3 Orifice dia. 2 4 8 10 16 Body class 1 2 3 4 5 None With flow rate adjustment With bypass With flow rate adjustment & bypass Valve type LVQ 0 1 2 N.C.