.): ø5/32" / ø1/4", Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 100 / 200, Flow Rate (Vacuum Pressure) [L/min]: 10 / 20, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 750, Weight [g]: 10.5, Internal Capacity

.): ø5/32" / ø1/4", Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 100 / 200, Flow Rate (Vacuum Pressure) [L/min]: 10 / 20, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 750, Weight [g]: 10.5, Internal Capacity

Air Tank Series AT 1

750 750 850 850 6 9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2

5 Port Solenoid Valve Series SQ1000/2000

150 300 SQ2000 0.82 0.65 450 600 750 Cylinder speeds marked with a are controlled by a fixed orifice.

FHG

T dimension) None Differential pressure indicator Differential pressure indication switch Note) 0 1 5 1 2 3 4 5 1 2 3 4 1 2 3 4 340 410 480 550 620 430 530 630 730 560 650 750 850 04 (1/2B) 06 (3/4B) 08 (1B) 30 FH FH Note) N.C. and N.O. common Note) When the differential pressure indication 1 or 5 is selected, the connection method is 2 to 5. (0 and 1 cannot be selected.)

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8

A_HEC-OM-K001

Host SOH UT ENQ 32H Check sum CR (H) (L) Chemical Thermo-con SOH UT STX 32H Internal sensor temp.

CA2

20 to 750 40 37 102 32 78 25 52 18 76 160 21 13 M12 x 1.75 10 119 13.5 130 102 MB1 up to 750 20 to 750 40 37 116 41 92 30 52 18 92 180 21 16 M12 x 1.75 10 133 13.5 150 116 CA2 If a hole is provided to accommodate the boot when the air cylinder is mounted, make the hole diameter larger than the outside diameter of the boot d.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12 14 60 50 40 30 20 10 0 0 2 4 6 8 10 12 14 750 kPa 350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min]

CNA

Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size (mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81

CNA

to 750 9 11.5 M10 X 1.25 13.5 M12 X 1.75 13.5 M12 X 1.75 With rod boot (mm) (mm) ZZ ZZ Bore (mm) 40 50 63 80 100 Stroke range (mm) e Bore (mm) 40 50 63 80 100 f h LX LY MM N P Q H S T V W X Y ZZ l (One) (Both) 271 300 314 378 408 263 292 306 369 399 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4

Actuator Position Sensor D-MP Series

protection) Current consumption 48 mA or less (when no load is applied) Repeatability 1, 2 0.1 mm (Ambient temperature: 25C) Resolution 0.05 mm Linearity 2 0.3 mm (Ambient temperature: 25C) Switch output NPN or PNP 1 output (push-pull) Maximum load current 40 mA Internal voltage drop 2 V or less Leakage current NPN: 0.5 mA or less at load resistance 3 k, 1.5 mA or less at load resistance 750

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting type T NM1 Mounting type M1 NM2 Mounting type M2 * Refer to the applicable stroke table. w Size 25 32 40 Applicable Stroke Table : Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 V V V V V V V V V V V V V V V V LEFS32 V V V V V V V V V V V V V V V V V V V V LEFS40 V V V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders.

Profi-E

Com m uni cat i on dat a al l ocat i on Set t arget val ue Resol ut i on : 12bi t ( 100% F. S. ) , O ccupi ed byt e : 2 Byt e Target val ue ( 0 area) 12bi t 0 0 0 0 Target value(Lower 12 bits) * b0 b15 b11 Put 0 i n upper 4 bi t s ( N ot e) M oni t or t he out put pressure. Resol ut i on : 12bi t ( 100% F.

CNA

Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size (mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81

Air Cylinder Series CA2

20 to 750 40 37 119 102 32 78 25 52 13.5 18 130 76 160 102 21 13 M12 x 1.75 10 Up to 750 20 to 750 40 37 133 116 41 92 30 52 13.5 18 150 92 180 116 21 16 M12 x 1.75 10 If a hole is provided to accommodate the boot when the air cylinder is mounted, make the hole diameter larger than the outside diameter of the boot d.

Combination Cylinder

(mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL B B1 BX BY BP C D EA EB F GA GB GC H1 J K KA LH FA LD With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to1400 30 to 1400 30 to 1400 Without rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 1 4 1 4 1 4 1 4 1 4 1 2 1 2 3 4 / / / / / / / / 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20

CL

(mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL LH KA BX K B1 EA B BY BP C D GB GC H1 J LD FA F EB GA With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to1400 30 to 1400 30 to 1400 Without rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 1 4 1 4 1 4 1 4 1 4 1 2 1 2 3 4 / / / / / / / / 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 M10

Cylinder with Lock

1.5 30 3/8 168 44 11 237 20 to 600 52 11.2 66 1/4 stroke 245 18 14 M18 x 1.5 31 3/8 182 52.5 12 254 20 to 600 52 11.2 66 1/4 stroke 262 18 17 M22 x 1.5 37 1/2 218 59.5 15 306 20 to 750 65 12.5 80 315 1/4 stroke 22 17 M26 x 1.5 40 1/2 246 69.5 15 335 20 to 750 65 14 81 1/4 stroke 344 26 8 Series CNA2 Dimensions Axial foot (L): CNA2L BP (Rc, NPT, G) unlocking port Unlocked when pressurized