SMC Corporation of America
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PWR(V) PWR L ERR L RUN 1 2 If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation. Otherwise malfunction can result, causing an accident.

12 V 12 V Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) A96V A96 5 V IC circuit Grommet Relay, PLC A93V A90V A93 A90 IC circuit 100 V 24 V 12 V 2-wire 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches

V Yes Grommet 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color display) 3-wire (PNP) 2-wire 12 V 3-wire (NPN) IC circuit 5 V, 12 V Water resistant (2-color indication) M9PA M9PAV 3-wire (PNP) M9BA M9BAV 2-wire 12 V Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction.

-wire(NPN) IC circuit Diagnosis (2-color indicator) 5 V, 12 V Relay, PLC Grommet Yes 24 V 3-wire(PNP) 12 V 2-wire M9NAV 3-wire(NPN) Water resistant (2-color indicator) IC circuit 5 V, 12 V M9PAV M9PA 3-wire(PNP) M9BAV M9BA 12 V 2-wire Auto switches marked with a symbol are produced upon receipt of order.

(DC-) (DC-) 4 (IN15 V) (IN420 mA) A A PSE200/PSE300 (ZS-28-CA-4) 3M 37104-3122-000FL 2-1473562-4 XN2A-1430 PSE200 PSE300 -12No.PS-OMS0004CN-D DC(+) PSE5715V 1 k N.C.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type (400 V type only) (Option S only) (UL Standards) (Option S only) RoHS HRSH090 Series How to Order A HRSH090 20 Cooling capacity 090 9.5 kW Option Nil None B Note 1) With earth leakage breaker J With automatic uid ll function M Applicable to deionized water piping S Note 2) Conforming to CE/UL standards Cooling method A Air-cooled refrigeration

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

SPR3: Max. 1.0 A SPR2: Max. 2.0 A SPR4: Max. 1.0 A SPR5: Max. 2.0 A SPR7: Max. 1.0 A SPR6: Max. 2.0 A SPR8: Max. 1.0 A SDN1: Max. 2.0 A SDN3: Max. 1.0 A SDN2: Max. 2.0 A SDN4: Max. 1.0 A SMJ1: Max. 2.0 A SMJ3: Max. 1.0 A SMJ2: Max. 2.0 A SMJ4: Max. 1.0 A Supplied current IP67 IP40 IP67 14 to 122F (10 to 50C) 35 to 85%RH (No condensation) 500 VAC for 1 minute between terminals and housing

Be sure to adopt a reliable connecting method if the rotary table is used very frequently or if it is used in a location that is exposed to a large amount of vibrations. There may be cases in which a speed reduction circuit or a shock absorber is required.

, are Nil, A, B, D, E, Z. 3 Available for air and water. 270 IN OUT C 3 A 3 A 6 D 1 Available for the VXZ A to 2 .

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Common supply bushing 136144-S Individual supply bushing 136144-K Single unit regulator / Port plug for regulator block 136144-S 136144-K Option A-A A Nil X17 None A-A A Oil-free 12 12 10 A A 8 8 15 15 10 14-4-38 21 Regulator Single Unit Type Series ARM10 How to Order F.R.L. ARM10 06 B Z 1 AV AU 1 2 3 4 1.

Common supply bushing 136144-S Individual supply bushing 136144-K Single unit regulator / Port plug for regulator block 136144-S 136144-K Option A-A A Nil X17 None A-A A Oil-free 12 12 10 A A 8 8 15 15 10 14-4-38 21 Regulator Single Unit Type Series ARM10 How to Order F.R.L. ARM10 06 B Z 1 AV AU 1 2 3 4 1.

Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure If setting is not necessary press the and buttons simultaneously for 1 second or longer. -34No.PS-OMS0007-H [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

12 V IC circuit Solid state auto switch Reed auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V,12 V Relay, PLC 24 V Grommet Yes 12 V 5 V,12 V Water-resistant (2-color indicator) IC circuit 12 V 2-wire (Non-polar) Magnetic field resistant (2-color indicator) 3-wire (NPN equivalent) A96V A96 5 V IC circuit Yes Grommet A93V2 A90V A93 A90 100 V Relay, PLC 2-wire

12 V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PA M9PAV M9BA M9BAV 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96 5 V 12 V IC circuit Yes Relay, PLC 24 V Grommet

12 V 5V, 12 V 12 V 5 V, 12 V 12 V IC circuit Solid state switch Reed switch IC circuit Relay, PLC Diagnosis (2-color indication) 24 V Grommet Yes IC circuit Water resistant (2-color indication) M9PAV M9BAV A96 A93 A90 A96V A93V A90V IC circuit IC circuit 5 V 12 V Yes Grommet 100 V 3-wire (NPN equivalent) Relay, PLC 2-wire 24 V No 5 V,12 V 100 V or less Water resistant type auto switches

2-wire Diagnostic indication (2-color indication) Grommet B59W G59 G5P K59 G59W G5PW K59W G5BA G59F M9N M9P M9B M9NW M9PW M9BW M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 12 V Grommet 24 V Relay, PLC IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire Water resistant (2-color indication) Diagnostic output (2-color indication