Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: P (Manifold Common Release Pressure Supply Spec.), Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)

Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)

: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)

Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)

Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8), Accessories: N (w/o Bracket, w/o Silencer)

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Modular F.R.L. Unit

) 03 Y510-(02) 03 Y61003 (04) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS201 02 02 03 02 03 VHS3000VHS3000VHS402 03 04 E600Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) E60006 10 E60006 10 06 10 E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02

Series: 5 (VFA5000), Stations: 06, Thread: F (G)

Series: 5 (VFA5000), Stations: 06, Thread: N (NPT)

Series: 3 (VFA3000), Stations: 06, Thread: N (NPT)

Stations: 06, A,B Port: 02 (1/4)

Type: 21 (Common SUP/Individual EXH), Stations: 06

Fitting: 06 (IN: Straight Ø4, OUT: Straight Ø4)

Thread: N (NPT), Actuator Type: 06 (Roller Plunger)

Thread: Rc(PT), Actuator Type: 06 (Roller Plunger)

Applicable Bore Size: 06 (for 63 & 80 Bore)

Body Size: AC40-06, Bracket: Spacer with Bracket

Stations: 06, A,B Port: 1/4, Thread: -

AS

AS Series How to Order 2 2 0 01 06 W2 AS 1F Body size 2 1 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 3 4 Metric size Applicable tubing O.D. Note) Elbow 06 08 10 12 6 8 10 12 Control type Meter-out Meter-in 0 1 Note) For applicable tubing O.D. selection, refer to the Model on page 603.