Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

(mm) 4 6 7.5 9 H Outer layer thickness (mm) 1 1 1 1 Note) Black (B) D External layer color White (W) Red (R) MS Blue (BU) T Yellow (Y) Green (G) VMG 45 35 28 15 Min. bending radius (mm) Specifications Fluid Air/Water Max. operating pressure (at 20C) Burst pressure Inner tubing 1.0 MPa Refer to the burst pressure characteristics curve. 20 to +60C (Water: 0 to 60C) (No freezing) Nylon 11 PVC

SI unit for CC-Link

They are all important notes for safety and must be followed in addition to International standards (ISO/IEC) 1) and other safety regulations. 1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines.

Process Pump <Fluororesin Type> Series PA3000

1/8) FLUID OUT 3/8", 1/2" 8 190 30 14 110 AIR SUP. 84 81 AIR E x H. 67 13 30 26 10 FLUID IN 3/8", 1/2" EXH (P2) Rc, G, NPT, NPTF 1/4

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

High Speed 2 Port Valve

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1), and other safety regulations. *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines .

VEX-OMO0001

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 -2VEX-OMO0001 1 1 1 1 1 1 1 1 3 3 3 3) ) ) ) *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () -3VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / Nm , 1.5~2 1/6~1/4 2 (P.2.3) , (P.2.3) 1 1 1 1 P P P P 2 2 2 2 A A A A . . . . -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001

PIROT OPERATED 2 PORT SOLENOID VALVE

Warning Warning 1. The compatibility of the 1. The compatibility of the 1.

3 Port Air Operated Valve VPA3145/3165/3185 Series

VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

Quick Exhaust Valve Series AQ 1

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

Note 2) 9 VQ5 3 1 (P) 3 (R2) 5 (R1) Manual override Option 1 (P) 3 (R2) 5 (R1) VQC B: Locking type (Tool required) Nil: None F: With bracket 2 position single type only Nil: Non-locking push type (Tool required) 3 position exhaust center (A) 4 (B) 2 VQZ 4 1 (P) 3 (R2) 5 (R1) SQ Note 1) There is no 3 position pressure center for the metal seal type of the VQZ1000 series.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Safety Speed Control Valve (SSC Valve) Series ASS 1

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

E-P HYREG ® VY1 Series

Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 (3) (3) A M5 3(R) 1 8 2(A) 1(P) (3) (3) 1 1 4 1 4 3 8 3 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 4 1 1 2 1 3(R) 2(A) 1(P) 9 2 2 Note 3) Only bracket or foot may be mounted.

SY3000V-OMY0001

(N.O.)3 3 8 No.SY3000V-OMY0001 SY series 1/3 DC24V67ms ) 40ms SY ,[SY(3,5,7)0] [SY(3,5,7)3] (50 10 )(51 11 ) (52 12 ) A,B A,B <> 9 No.SY3000V-OMY0001 SY series ()DC12V 0.5V () () (1) () COM.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

PF3A7xxH-L.eng

_1 Window comparator mode 1 1/2 60 mm Hysteresis H_1 Hysteresis WH1, WH2 x 2 70 mm Element Description Flow [L/min] Display See below.

•

Pressure set1ing range -1 OOkPa . l DOkPa {1.D2kgf/cm2 } 0. 1 MPa1MPa {1 O.2kgf/cm2} (MPa. kPa, kgf/cm2, mmHg. bar, PSI) mmHg, kPa, PSI MPa, PSI Unit indicalions kgf/cm:i, bar kgf/cm2, bar -Variety of switch output modes MPa:O.01. PSI:1 Min. dISplay dilferenllal kgf/cm2 :O.02. bar:O.D2 kgf/cm2:O. 1, bar:O.1 mmHg:l 0. kPa:2.

PF2x7.eng

Hysteresis 1 Hysteresis 1 Set point 1 Set point 2 This function is used to prevent errors occurring due to unintentional changes of the Set values.