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The following instructions must be followed during maintenance: Turn off the power supply Ensure the flow is shut off before performing maintenance Otherwise an injury can result. 3/8 20.9 mm 1 41 mm Maintenance 1/2 23.9 mm 3/4 29.9 mm How to reset the product after a power cut or forcible de-energizing When the flow switch is the integrated display type, the condition before the power cut

. * In this configuration, the stroke end (LSP, LSN), forced stop (EM1) and servo-on (SON) signals will be ON automatically when the power is turned ON. 41 - 5.5.2 Initial I/O Signal Allocation (1) Position control mode (pulse input): The initial (Default) allocation of I/O signals is shown below.

Air Supply Piping Precaution Warning (1)Type of fluids (1) For the handling of one-touch fittings, refer to the Precautions for fittings and tubing (P38 to 41). Please contact SMC when using the product in applications other than (2) Preparation before piping with compressed air.

. -1516 D-M9/D-A9 D-M9 D-M9W D-M9AVL D-M9V D-M9WV D-M9AL D-A9 D-A9V A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) ( )D-A96 -15 D-P3DW D-P3DW A B Hs Ht 50 14.5 6.5 41 35 63 16.5 10 47 44 80 30.5 17 55 54 D-P3DW BQ6-032S -16 18 - 7-3. 7-3-1.D-M9D-A9 (-) -17 5~6mm

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

DOWN 1 WRITE " STEP0 " " PRG 1 STEP 0 " End 1 WRITE READ End0.0STEP1 PRG 1 STEP 1 " " No.1 " 1 WRITE STEP2 PRG 1 STEP 2 " " WRITE " WRITE End 1 40 EndErr7 <> P1 P8 S1 50.0 68.0 S2 300.0 30.5 S3 30.0 S0 END END PROGRAM " " PRG 1 STEP 0 2 WRITE " End End0.0 2 LEFT PRG 1 STEP 1 " " UP 5 " " 5 UP PRG 1 STEP 1 " " 5 " " 1 WRITE 2 PRG 1 STEP 2 " " 3 LEFT " " UP 3 3 ) 41

Reset MIN50msec Homing SetHome Man'l / Auto Start Man'l(+) Man'l(-) Pause (Output) Driving(+) Driving(-) Brake Origin Determined (1) Position Determined (1) Program END Error Cylinder Movement I N I T I A L I Origin Z E D POWER ON Note: Homing will be executed, only on RUN mode and during automatic executing. (1) Timing between stopping till output is a preseted timing, t1(preset data P7). 41

Series 10 12 16 20 25 32 40 50 63 80 100 MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 MHZL2 6.0 7.0 10.0 11.0 MHL2 7.0 8.0 8.5 10.5 11.0 12.5 MHS2 6.5 7.0 7.5 8.5 MHS3, MHS(L)3 6.5 7.0 7.5 8.0 MHS4 6.5 7.0 7.5 8.5 MHC2 30 to -10 30 to 30 to 22.5 to -10 -10 -10 MHW2 88 to 54 to 58 to 41 to 30 to -4 -5 -6 -5 -5 Air cylinder Unit: mm Tube I.D.

A80H IC 2 24V 12V A80C IC PLC A73C (2 ) A79W 0.5m () A73C 3m L () A73CL 5m Z () A73CZ N () A73CN 6-2. ,56mm ,0.5[Nm] BQ-2 1 6.1 24 6-3. 6.2 6.3 D-A7A8 D-F779 D-F779W 32 12 8 [mm] 40 11 6 7 32 [mm] 40 2 1 1 32 8.5(9) 9 9 A [mm] 40 11(11.5) 11.5 11.5 D-A7A8 D-F77979W 32 55 28 [deg] 40 46 27 32 10 4 [deg] 40 7 3 80100 24.5(25) 25 32 170190 32(32.5) 32.5 B [mm] 40 170190 41

Settings and Data Entry 38 10.1 Step Data 38 10.2 Basic parameters 41 10.3 Return to origin parameter 43 11.

Memory map 31 9.1 Memory allocation 31 (1) Input Area Mapping 31 (2) Input area details 32 (3) Output area mapping 36 (4) Output area details 37 (5) Record data (request sent from PROFINET master to JXCPH controller) 41 10. Settings and Data Entry 42 10.1 Step Data 42 10.2 Basic parameters 45 10.3 Return to origin parameter 47 11.

.85 Output 36Byte Byte12,13 Byte 12 1 *1 *2 1mm/s 2 13 Byte14,15 Byte 14 1 *1 *2 1mm/s 2 15 Byte16,17 Byte 16 *1 *2 1% 17 *1 *2 21(P.85 40 - Byte18,19 Byte 18 *1 *2 1% 19 Byte20,21 Byte 20 *1 *2 1mm/s 21 Byte22,23 Byte 22 *1 *2 1% 23 Byte24-271 Byte 24 1 -+ *2 0.01mm 25 26 27 Byte28-312 Byte 28 2 -+ *2 0.01mm 29 30 31 Byte32-35 Byte 32 *1 *2 0.01mm 33 34 36 *1 *2 21(P.85 41

Therefore, + / of input terminal is not indicated in the table above 41 - Differential input connection Command pulse input configuration Pulse Input termi LECPA and Option set Forward rotation (CW) Reverse rotation (CCW) Direction nal 1 High High PP+ Low High PPLow Low 0 High High NP+ Low High NPLow Low High PP+ Low Low High High PPLow 1 High NP+ Low Low High High NPLow CW and CCW High High

RY372 RY373 Nouse RY374 RY375 RY376 RY377 RY378 Initial data setting complete flag RY379 Nouse RY37A Nouse RY37B RY37C Nouse RY37D RY37E RY37F Initial data setting complete flag The initial data setting complete flag is turned on when the initial data process which is requested after the power supply is turned on or after hardware is reset or after the test mode is operated is completed. 41

10% 16 Pushing speed 1 0 to 255 mm/s 17 Positioning thrust 1 0 to 30 10% 18 H 19 L In pos 2 0 to 65500 0.01mm ID2 20 to 39 Same as ID1 ID3 40 to 59 Same as ID1 ID4 60 to 79 Same as ID1 ID5 80 to 99 Same as ID1 ID6 100 to 119 Same as ID1 ID7 120 to 139 Same as ID1 ID8 140 to 159 Same as ID1 Note) "0" is "no send" at mode of data writing. "1" and "2" contain "send" at mode of data writing. 41

Gateway unit status flag All modes 2 3 4 5 Unused (Do not use it.) 13 Q_ Bit/Byte CorrespondModel/ Corresponding Data name Value range Unit Size mode ing ID Address No. 0 IN0 bit 0,1 1 IN1 bit 0,1 2 IN2 bit 0,1 3 IN3 bit 0,1 14 4 IN4 bit 0,1 5 IN5 bit 0,1 6 bit 0 7 bit 0 ID1 All mode 0 HOLD bit 0,1 1 SVON bit 0,1 2 DRIVE bit 0,1 3 RESET bit 0,1 15 4 SETUP bit 0,1 5 bit 0 6 bit 0 7 bit 0 41

ID bit 3 2 1 0 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 11 1 0 1 1 12 1 1 0 0 41 - 11.4 Gateway unit control flagOUT Data The flag to control the gateway communication status. Address bit 7 6 5 4 3 2 1 0 250 Stop Restart Reset Mode command 251 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 252 ID12 ID11 ID10 ID9 253 Setting the final station number (1) Mode command Command the mode.

8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219 ID1 ID12 220239 ID1 240249 250253 254,255 (GW [IN Data] Address.14 Address.17) 4 codeAddress.14 Address.14 Address.17 ) Address.15 Address.14 (code:1-148) 00h 94h 15bit 8bit 7bit 0bit code 3 (1-***) () Address.17 Address.16 code: 1148 00h 00h 15bit 8bit 7bit 0bit 16 =94h () 41

Measuremm Model Thread Size A B C D E F G H J K L M N P Q IDFA4E Rc1/2 453 13 498 283 275 IDFA6E 455 Rc3/4 270 80 230 32 15 31 42 275 15 240 80 IDFA8E 485 568 355 300 IDFA11E IDFA Series 6-3 Dimension 6 2 IDX-OM-W016 Air dryer6 References IDFA15E1 600mm or more Measuremm 600mm or more 600mm or more 600mm or more MAINTENANCE SPACE THE VENTILATION AND 603 300 (494) 16 600mm WITH LAMP SWITCH 542 41

Required Gap (mm) Model L1 L2 L3 L4 L5 L6 MHM-16D 16 5 MHM-25D 36 34 1 1 1 1 MHM-32D 50 24 MHM-50D 23 25 80 41 Auto Switch Connections and Examples Sink Input Specifications Source Input Specifications Connect according to the applicable PLC input specifications, as the connection method will vary depending on the PLC input specifications. 13 - Examples of AND (Series) and OR (Parallel) Connections