11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: M-5P) 2-M5 x 0.8 Piping port Width across flats 5.5 4-M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4-M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA

Check Valve Series AK 1

Model AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3 40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 Applicable tubing 5/32 2.8 12.7 2.8 6.5 6.5

PROFIBUS DP Compatible Fieldbus System

EX9-PE1 Item Specification Rated voltage 24 VDC+10%/-5% Supply current 3 A Max. -49No.EX##-OMO0019 Dimensions 1. EX9-OET1/EX9-OET2/EX9-OEP1/EX9-OEP2 2.

Air Filter

Application 8 3. Standard Specifications 8 4. How to Order 9 5. Structural Drawing, Option and Replacement Parts 10 6. Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-28 10-1. Bowl Assembly Replacement 23-25 10-2. Element Replacement 26-28 11. Disassembly Drawing 29 12.

Guide Table Series MGF ø40, ø63, ø100 1

10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

In-line Air Filter

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

Digital Flow Switch

Pressure Characteristics 3 5%F.S. (0 to 0.75 MPa, 0.35 MPa standard) Power supply voltage 12 to 24VDC 10% Ripple (p-p) 10% or less Electrical Current consumption 55 mA or less Protection Polarity protection Display accuracy 3%F.S. Analogue output accuracy 3%F.S.

HRX-OM-W069

7 3.8 Message configuration . 3-7 3.8.1 Message frame . 3-7 3.9 Function codes . 3-9 3.10 Checksum calculation method . 3-9 3.10.1 LRC(ASCII) . 3-9 3.10.2 CRC(RTU) .3-10 3.11 Explanation of function codes . 3-12 3.11.1 Function code04 Reading multiple registers .3-12 3.11.2 Function code06 Writing registers .3-14 3.11.3 Function code16 Writing multiple registers .3-15 3.12 Negative response

DOC1003626

Message frame . 3-7 3.9 Function code . 3-9 3.10 Checksum calculation method . 3-9 3.10.1 LRC(ASCII) . 3-9 3.10.2 CRC(RTU) .3-10 3.11 Explanation of function codes . 3-12 3.11.1 Function code: 04 Reading multiple registers .3-12 3.11.2 Function code: 06 Writing registers.3-13 3.11.3 Function code: 16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18

IDX-OM-W093

. 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R .11-1

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

EtherNet/IP TM Compatible Fieldbus System

No.EX-OMS0014-A PRODUCT NAME EtherNet/IPTM Compatible Fieldbus System MODEL / Series / Product Number EX500-GEN2 EX500-S103 EX500-DXP# Table of Contents Safety Instructions 3 Product Overview 9 System construction 9 EX500 GW unit Model Indication and How to Order 10 Summary of Product parts 10 Mounting and Installation 11 Installation 11 Wiring 12 LED Display 17 Setting of EtherNet/IPTM using

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

CV/MVGQ

Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions on the products mentioned in this catalog, and refer to main text for more detailed precautions on every series. Applicable Series: CVJ5, CVJ3 3.

58

4 28 to 30 160 3.

IDX-OM-W053

. 6-1 6-2 . 6-2 6-3 . 6-3 6-4 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 G 7-1 . 9-1 10 H 10-1 . 10-1 10-2 . 10-1 11 K 11-1 . 11-1 11-2 . 11-1 12 L 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 R 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 . 14-3 15 V 15-1 .

Ejector Valve Unit Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Number of ejectors 1 to 10 Enter the following together with the manifold number: 1. Part no. of solenoid for SY3000/SX3000 2. Part no. of ejector valve for ZYY3000/ZYX3000.

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

Platform Cylinder Series CXT

15 20 5 CXT 32 40 1 10 10 5 10 15 5 2 10 15 10 10 15 5 (mm) D-F7W D-J79W D-F7BAL D-F7NTL D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted CXT 32 40 1 5 5 10 15 15 20 2 5 10 15 15 20 20 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-M9W D-M9AL

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Solid state auto switch Rotating angle DM9 Hysteresis angle DF8 B 16.9 18.8 20.4 24.7 Size Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 A 20.9 22.8 24.4 28.7 Hysteresis angle 49 50 47 31 20 20 15 15 190 190 190 190 1 2 3 7 Operating angle m: Converts the operating range (Lm) of the auto switch into the rotation angle Angle of hysteresis: The hysteresis of the auto switch