Single acting 1060 (3.44) 90 MRHQ20S MRHQ20C 10 20 1057 (2.33) 180 1566 (3.45) 90 MRHQ25S MRHQ25C 14 25 1560 (3.44) 180 Note 1) Values without auto switch weight.
No.1 (2)(5)(10)(13) DRIVE No.
M5 x 0.8 MXW12 4.4 10 0 0 6H9 + 0.030 depth 5.5 M6 x 1 6.
Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors. 11-5-5 5 Series MSUA Specifications Model 2 MSUA3 MSUA7 MSUA20 MSUA1 Single vane Vane type Single vane Single vane Single vane Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) Ambient and fluid temperature 5 to 60C 0.15 to 1.0 Operating
Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.
2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5 x 0.8 (Pilot EXH) 4-15-14 15 Series VZ400 Manifold Specifications
(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.
(11) PE port R 3 1 P (24) 9 2-Rc 1/4 1(P) port 2-Rc 1/4 2(R) port 21 10 41 L plug connector (L) DIN terminal (Y) 300 89 (Lead wire length) Indicator light Pg.7 92.5 Max. 10 54.5 <59.5> Indicator light 1 P 3 R Cover diameter 1.5 Cross section 0.23 mm2 Applicable cable O.D. < >: AC 3.5 to 7 85.5 78 60 M plug connector (M) R 3 1 P (Lead wire length) 94.5 83 Cover diameter 1.5 Cross section 0.23
100 100 LEH LEY -X5 10 10 11LEFS 11LEFS Suction flow rate: 30 L/min Suction flow rate: 30 L/min 11LEJS 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5
MHC2, MHCA2, MHCM2 F L F MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S Pressure 0.6MPa 4 4 2 Pressure 0.6MPa 0.5 Pressure 0.6MPa Gripping force N Gripping force N Gripping force N 3 3 0.4 0.5 0.5 1 2 2 0.3 0.4 0.4 0.2 1 1 0.3 0 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 2 Series MHC2/MHCA2/MHCM2 Confirmation of inertial moment of attachment Step
-04 FH540-06 FH540-08 FH540-10 FH540-12 10 3/8 3/8 10 FH541-04 FH541-06 FH541-08 FH541-10 FH541-12 FH541-16 15 (1/2B) 20 1/2 1/2 20 20 (3/4B) 20 (3/4B) 50 3/4 3/4 50 Max. 14 MPa Max. 3.5 MPa 25 (1B) 25 (1B) 80 1 1 80 FH341-10 FH341-12 FH341-16 32 (1 1/4B) 32 (1 1/4B) 120 1 1/4 1 1/4 120 40 (1 1/2B) 40 (1 1/2B) 160 1 1/2 1 1/2 160 50 (2B) 50 (2B) 260 260 FH440-03 FH440-04 FH440-
4 2 / Valves 6.3 32 Valves shared 4 2 / Valves 6.3 . 4-3 EX245-DX1 2 3..10 / module 1..8 7.4 EX245-DX1 shared 2 3..10 / module 1..8 7.4 . 4-3 EX245-DY1 1 3..10 / module 1..8 8.4 EX245-DY1 shared 1 3..10 / module 1..8 8.4 . 4-3 EX245-LA1 6134 6130 3..10 / module 1..8 9.4 EX245-LB1 6134 6130 3..10 / module 1..8 9.4 23 No.EX-OMW0014CN-A 4.1.4.
(Non-locking) Manual override 69.4 (30.5) 24 13.5 2-6.5 (For mounting) (X port) (M5 x 0.8) (R port) Rc 1/4 101.6 26.7 (17.5) 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) 3(R) 27 50 V100 1(P) MAX.10 D: 112.8 26.7 Y: 112.3 101.6 102.4 MAX.10 112.8 (P port) Rc 1/4 SY SYJ 300 (Pitch) Pg9 Pg9 85.6 95.6 27.5 28 (Lead wire length) 95.1 105.1 Y: 97.6 114.6 L1 L2 7.5 90.1 100.1 D: 95.6 112.6 Applicable lead wire
Regenerative error (Note 1) (Note 1) (Note 1) Alarms AL.31 1 0 1 Overspeed AL.32 1 0 0 Overcurrent AL.33 0 0 1 Overvoltage AL.35 1 0 1 Command pulse frequency alarm AL.37 0 0 0 Parameter error AL.45 0 1 1 Main circuit device overheat (Note 1) (Note 1) (Note 1) AL.46 0 1 1 Servo motor overheat (Note 1) (Note 1) (Note 1) AL.47 0 1 1 Cooling fan alarm AL.50 0 1 1 Overload 1 (Note 1) (Note 1)
9 Seal kit NBR MHK12-PS MHK16-PS MHK20-PS MHK25-PS CR(2) P3318113 P3318113-1 P3318113-2 P3318205 P3318205-1 P3318205-2 P3318213 P3318213-1 P3318213-2 P3318305 P3318305-1 P3318305-2 P3318313 P3318313-1 P3318313-2 P3318405 P3318405-1 P3318405-2 P3318413 P3318413-1 P3318413-2 P3318105 P3318105-1 P3318105-2 FKM(2) @0 Dust cover Si(2) Note 1) No. !6 to !
to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not
AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84
wire) Equivalent to IP65 2.0kg (without lead wire) 1.1kg (without lead wire) 1 1/2 2 1 Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10).]
4 20 Round head no.0 Philips screw 1 19 Bearing 1 High precision type:2 (angular duplex bearing) 18 Bearing 1 17 Piston seal 4 16 Wear ring 4 15 Magnet 2 14 Bearing retainer 1 13 Table 1 12 GasketEnd cover 1 11 GasketCover 1 10 Push nut 2 9 Shock absorber holder 1 8 Arm 902 pcs. 1801 piece 7 Pinion 1 6 Piston 2 5 End cover 1 4 Seal 1 3 Plate 1 2 Cover 1 1 Body 1 No Description Qty Note 21
4-4.5 (For mounting) 9 + 45.6 13.4 + + 2.5 2.5 12.5 15.2 2 123 [127.4] 107 [111.4] 10 18.5 23.5 One-touch fitting 6, 1/4" (A, B port) R P R R P R 16.5 16.5 A B A B A B A B A B 77.6 [79.8] 45 49 77 [79.2] 65 Applicable tubing O.D.: 4, 5/32", 6, 1/4" 82.8 16.5 + + + + + (3.2) Triangle mark 52.8 1/8 (P, R port) (Pitch) P = 17.5 21 (Station 1) (Station n) (Light/surge voltage suppressor) 48.6