High Vacuum L Type Valve

Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41

High Vacuum L Type Valve

part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0007 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41

High Vacuum L Type Valve

Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41

XLA Series

material: SUS304) Heater (option) 7 External seal (maintenance part) 3 Bellows (material: SUS316L) 6 Valve (material: SUS304) 5 Valve seal (maintenance part) 2 Body (material: A6063) 4 C D C E E (K flange ) (KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41

XLA- ∗ -F7NJ ∗ - ∗ Series

Heater (Option) Bellows holder (Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41

XL-OMV0002

3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

maintenance part) 6 (SUS304) Bellows (material: SUS316L) 5 Valve (material: SUS304) () 2 Valve seal (maintenance part) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41

XLDV Series

are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66 53.5 15.0 55 41

MWP_E

Air Supply Piping Precaution Warning (1)Type of fluids (1) For the handling of one-touch fittings, refer to the Precautions for fittings and tubing (P38 to 41). Please contact SMC when using the product in applications other than (2) Preparation before piping with compressed air.

CEx-OMQ0013

DOWN 1 WRITE " STEP0 " " PRG 1 STEP 0 " End 1 WRITE READ End0.0STEP1 PRG 1 STEP 1 " " No.1 " 1 WRITE STEP2 PRG 1 STEP 2 " " WRITE " WRITE End 1 40 EndErr7 <> P1 P8 S1 50.0 68.0 S2 300.0 30.5 S3 30.0 S0 END END PROGRAM " " PRG 1 STEP 0 2 WRITE " End End0.0 2 LEFT PRG 1 STEP 1 " " UP 5 " " 5 UP PRG 1 STEP 1 " " 5 " " 1 WRITE 2 PRG 1 STEP 2 " " 3 LEFT " " UP 3 3 ) 41

CEx-OMG0106

Reset MIN50msec Homing SetHome Man'l / Auto Start Man'l(+) Man'l(-) Pause (Output) Driving(+) Driving(-) Brake Origin Determined (1) Position Determined (1) Program END Error Cylinder Movement I N I T I A L I Origin Z E D POWER ON Note: Homing will be executed, only on RUN mode and during automatic executing. (1) Timing between stopping till output is a preseted timing, t1(preset data P7). 41

Trimmer Auto Switch

Series 10 12 16 20 25 32 40 50 63 80 100 MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 MHZL2 6.0 7.0 10.0 11.0 MHL2 7.0 8.0 8.5 10.5 11.0 12.5 MHS2 6.5 7.0 7.5 8.5 MHS3, MHS(L)3 6.5 7.0 7.5 8.0 MHS4 6.5 7.0 7.5 8.5 MHC2 30 to -10 30 to 30 to 22.5 to -10 -10 -10 MHW2 88 to 54 to 58 to 41 to 30 to -4 -5 -6 -5 -5 Air cylinder Unit: mm Tube I.D.

Compact Rotary Actuator

sensitive position Auto switch operating range Lm Fig.13 Table 10 Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75 3 180 18 31 22 35 63 12 360 25 52.5 29 56.5 90 18.5 27 22.5 31 15 69 3 180 22.5 39.5 26.5 43.5 52 9 360 30.5 64.5 34.5 68.5 90 36 48.5 40 52.5 20 56 4 180 42 67.5 46 71.5 41

Rotary Table

Push nut side (Piston) End cover assembly Hexagon socket head cap screw Hexagon socket head cap screw Cover assembly Fig. 24 Fig. 25 41 - Troubleshooting Problem Possible cause Solution Supply pressure is not applied correctly. Correctly set the regulator at the supply pressure side.

Low-Speed Rotary Actuator

Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.11 Table 9 Reed auto switch Solid state auto switch Size Rotation A B Operation angle A B Operation Hysteresis Hysteresis angle m angle m angle 10 90 15 21.5 63 12 19 25.5 75 3 180 18 31 22 35 15 90 18.5 27 52 9 22.5 31 69 3 180 22.5 39.5 26.5 43.5 20 90 36 48.5 41 9 40 52.5 56 4 180

MRQB-OM0002

A80H IC 2 24V 12V A80C IC PLC A73C (2 ) A79W 0.5m () A73C 3m L () A73CL 5m Z () A73CZ N () A73CN 6-2. ,56mm ,0.5[Nm] BQ-2 1 6.1 24 6-3. 6.2 6.3 D-A7A8 D-F779 D-F779W 32 12 8 [mm] 40 11 6 7 32 [mm] 40 2 1 1 32 8.5(9) 9 9 A [mm] 40 11(11.5) 11.5 11.5 D-A7A8 D-F77979W 32 55 28 [deg] 40 46 27 32 10 4 [deg] 40 7 3 80100 24.5(25) 25 32 170190 32(32.5) 32.5 B [mm] 40 170190 41

Step Motor Driver （ Pulse input type ）

Therefore, + / of input terminal is not indicated in the table above 41 - Differential input connection Command pulse input configuration Pulse Input termi LECPA and Option set Forward rotation (CW) Reverse rotation (CCW) Direction nal 1 High High PP+ Low High PPLow Low 0 High High NP+ Low High NPLow Low High PP+ Low Low High High PPLow 1 High NP+ Low Low High High NPLow CW and CCW High High

LEC-OM034xx

Gateway unit status flag All modes 2 3 4 5 Unused (Do not use it.) 13 Q_ Bit/Byte CorrespondModel/ Corresponding Data name Value range Unit Size mode ing ID Address No. 0 IN0 bit 0,1 1 IN1 bit 0,1 2 IN2 bit 0,1 3 IN3 bit 0,1 14 4 IN4 bit 0,1 5 IN5 bit 0,1 6 bit 0 7 bit 0 ID1 All mode 0 HOLD bit 0,1 1 SVON bit 0,1 2 DRIVE bit 0,1 3 RESET bit 0,1 15 4 SETUP bit 0,1 5 bit 0 6 bit 0 7 bit 0 41

LEC-OM032xx

ID bit 3 2 1 0 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 11 1 0 1 1 12 1 1 0 0 41 - 11.4 Gateway unit control flagOUT Data The flag to control the gateway communication status. Address bit 7 6 5 4 3 2 1 0 250 Stop Restart Reset Mode command 251 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 252 ID12 ID11 ID10 ID9 253 Setting the final station number (1) Mode command Command the mode.

IDX-OM-W016

Measuremm Model Thread Size A B C D E F G H J K L M N P Q IDFA4E Rc1/2 453 13 498 283 275 IDFA6E 455 Rc3/4 270 80 230 32 15 31 42 275 15 240 80 IDFA8E 485 568 355 300 IDFA11E IDFA Series 6-3 Dimension 6 2 IDX-OM-W016 Air dryer6 References IDFA15E1 600mm or more Measuremm 600mm or more 600mm or more 600mm or more MAINTENANCE SPACE THE VENTILATION AND 603 300 (494) 16 600mm WITH LAMP SWITCH 542 41