Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

PF2x7.eng

L/min, L CFM x 10-2, CFM x 10-1, ft3 x 10-1, gal(US)/min, gal(US) SET SET Reverse output SET Non-Reverse output Reverse output ( ) ON 90 Colour Pin number Content 50 ms OFF No Set value input Set value ( ) Input of the Set value for the upper 3 digits (OUT1) 4 Input of the Set point 2 (OUT1) 1 DC(+) Brown SET Time SET Do not operate in an atmosphere containing flammable, explosive or corrosive

IZ-OMU0031-CN

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

FGX-OM-N027

(Fig D) Hole Contact closely Tightening bolt Tightening bolt Fig. C Position for V band bolt for tightening Fig. D Final condition of the tightening of V Warning Mount V band securely in the correct position.

VF1000/3000/5000 Series (PILOT VALVE : V200)

When locking the manual override with the push-turn locking type (D or E type), be sure to push it down before turning. Turning without first pushing it down can cause damage to the manual override and other trouble such as air leakage, etc.

Series: 5 (JSY5000), Type: 10 (Side-Ported), Connector Type: FW (D-sub Connector, IP67, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C10 (ø10 One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 0 (DIN Rail Mounting, w/o DIN Rail)

Series: 1 (JSY1000), Type: 10 (Side-Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 11

10%201/4Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)145UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%(A)(A)Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)(kg)UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3020Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)175UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%201/4Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)145UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%201/4Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)145UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3020Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)