Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Number of Ports: 3 Port, Piping Direct., Plunger Length: 1 (Side Ported, Short), Body Option: Side Mounting, Port Size: N01 (NPT 1/8, Side Ported Only), Actuator Type: 02 (One Way Roller Lever), Suffix: S (Hard Steel Roller), Indicator: None, Bracket: B (w/Bracket)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6H (One-touch Fitting ø6mm, Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (One-touch Fitting ø6mm, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C4H (One-touch Fitting ø4mm, Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C4H (One-touch Fitting ø4mm, Straight Type), Option 1: w/o Lead Wire, Option 2: D (Panel Mount Adapter + Front Protection Cover), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: None, Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: 01 (R 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: None, Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Accuracy: Basic Type, Size: 63, Motor Mounting Position: R (Right Side Parallel), Motor Type: NY (Mounting Type Y), Lead Screw: L (LEY63, 2.86], Stroke: 100mm, Dust/Drip Proof: P (IP65, Dust/Drip Proof Specification w/Vent Hole Tap), Rod End Thread: Rod End Female Thread, Mounting: L (Foot)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R4 (N.O., Port 3 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R4 (N.O., Port 3 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R4 (N.O., Port 3 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R4 (N.O., Port 3 IN, Port 2 OUT), Function: Y (Plug Connector), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 09R6 (2 Port, N.C., Port 1 In, Port 3 Out), Function: Y (Plug Connector), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)