VER2000/4000

Refer to front matters 42 and 43 for Safety Precautions and pages 287 to 291 for Precautions on every series. How to Use DIN Terminal Caution 1. Air supply Poor quality air could increase the spools sliding resistance, while preventing it from attaining its specified characteristics. Use compressor oil with a minimal generation of oxidants and install a mist separator (SMCs AM series).

Power Valve Precision Regulator

Mounting hole) IR-A IR Pressure gauge (Option) IRV VEX VEX SRH SRP SRF ITV VEX123 -01, 02 0 3 IC ITVH ITVX Air operated type PVQ VY1 (Mounting hole) VBA VBAT AP100 Pressure gauge (Option) 851 VEX13 Series 0 3 Manifold: VVEXB---01 Valve mounting side Applicable valve: VEX1B33 Pilot port Blanking plate VEXB-5 Port 2(A) 10.5 30 30 M5 2 x 5.5 Mounting hole 79.5 PE PE PE PE PE P1 P1 P1 P1 P1 37 43

VQ20/30

L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

PC Wiring System

Dimensions 2 x 5 machined for bar ring Mounting hole 4 x M3 x 0.5 5 1010 55 55 1.2 Alphabetical Index Length Measuring/ Counter 6 (3.7) 67.4 59 55 65 CH IN OUT (3) 33.5 139 8 40 158 41.2 (2) 55 55 2 x 8 6 x 4 16 14 16 16 14 16 14 10 25 25 597 Series PCW 16 Point Output Reduced Common Unit Specifications Model Output PCW-993195 Weight 80 g Refer to page 43 in CAT.E02-20 about the circuit

1.1

C D E Quantity per set Female side B Male side A HRG001HRG002HRG005HRG010HRG015IDF-AP601 R 1/2 38 23 26 2 NPT 1/2 HRG010HRG015IDF-AP603 R 3/4 43 23 32 2 NPT 3/4 33 Series HRG Mounting Example Note) Please order separately. Necessary to be fitted by customer. [Dustproof filter set] q This dustproof filter is secured with hook-and-loop tape.

Pressure Gauge Guide

0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 1.5 8 1 R Back side thread Cover ring assembly G46 4 1 R Page 14-11-6 Polycarbonate MPa 42.5 3 Rolled steel Black melamine painted Brass Vertical side thread 8 1 R GA46 4 1 R 0 to 0.2 0 to 0.3 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 Back side thread G33 30 8 1 R Page 14-11-8 Vertical side thread 3 GA33 Stainless steel Glass Brass MPa Back side thread 8 1 R 43

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

2 25.2 49.5 58.8 64.8 Piping port Rc1/8 Piping port URJ1/4 Piping port TSJ1/4 -A2L: URJ1/4 -B2L: TSJ1/4 -C01L: Rc1/8 737 Series ZSE80/ISE80 Dimensions With bracket (Rear ported) ZS-24-A A 30 20 1.6 20 43.2 11.5 55 4.5 40 15 4.5 6.5 20 39.7 View A With bracket (Rear ported) ZS-24-D 30 20 1.6 20 43.2 55 4.5 40 11.5 15 4.2 7.2 7.5 22 39.7 With bracket (Bottom ported) 50 40 30 4 x 4.5 49 43

NCQ8

(22) DC () Blue 0.13 (3.2) D-M9P, M9PV 0.24(6) Most sensitive position DC (+) Brown 0.87(22) D-M9V Switch main circuit Indicator light OUT Black Mounting screw M2.5 x 4l 0.18(4.6) 0.31(8) Slotted set screw DC () Blue 0.08(2) 0.13(3.2) D-M9B, M9BV Most sensitive position 0.24(6) 0.16(4) 0.11(2.8) 0.11(2.7) 0.79(20) OUT (+) Brown Switch main circuit 0.10(2.6) 0.37(9.5) 0.16(4) OUT () Blue 43

2-Color Display

Specifications Model 01 N01 C4H C6H N7H C4L C6L N7L R1/8 M5 x 0.8 NPT1/8 M5 x 0.8 Port size 4 mm 5/32 inch One-touch fitting, Straight type 6 mm 1/4 inch 4 mm 5/32 inch One-touch fitting, Elbow type 6 mm 1/4 inch Sensor pressure receiving area: Silicon Sensor pressure receiving area Wetted parts material PBT, POM, Stainless steel 304, C3604 (electroless nickel plated) O-ring: NBR 81 g 85 g 43

Fieldbus System

6 485.5 498 510.5 535.5 548 560.5 585.5 598 610.5 623 648 660.5 673 698 710.5 723 735.5 760.5 773 7 535.5 548 560.5 585.5 598 610.5 623 648 660.5 673 685.5 710.5 723 735.5 760.5 773 785.5 798 823 8 573 598 610.5 623 648 660.5 673 685.5 710.5 723 735.5 760.5 773 785.5 798 823 835.5 848 860.5 9 623 635.5 660.5 673 685.5 710.5 723 735.5 748 773 785.5 798 823 835.5 848 860.5 885.5 898 910.5 43

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 113 102 90 79 68 57 45 0UT 34 23 113 12 6 85 77 68 60 51 43

Series

(Type 20 manifold) 10 23 5 M 1 M3 SYJ3 Body ported Base mounted (4 port) 2 10 SYJ3 33 5 M (Manifold use only) Base mounted (5 port) SYJ3 43 M 2 5 10 Clean series 4 port Port size Coil specifications Manual override Nil Standard With power saving circuit <24, 12 VDC only> Nil: Non-locking push type Nil: Without sub-plate T Power saving circuit is not available in the case of "W" type.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

CEcompliant DC AC 43

Exhaust Cleaner for Vacuum Pump AMV Series

min) 3 6 15 37 75 160 360 650 1,500 3,700 7,500 16,000 Specifications Oil mist removal Filtration Maximum operating temperature 99.5% or more 0.3 m (Trapping efficiency: 95%) 80C Model Model Connection R Max. air flow (L/min [ANR]) Applicable vacuum pump Max. exhaust speed (L/min) Weight (kg) Oil accumulation amount (L) AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 1.6 3.0 5.9 10 43

Manifold Regulator ARM1000/2000 Series

methods ARX Regulating pressure range AMR Ambient and fluid temperature Fluid Cracking pressure (Valve) Construction ARM ARM ARP Port Size/Weight IR-A Model Piping Port size Weight (g) IN side OUT side Total weight (n: stations) Regulator (Except manifold) IR Small size pressure gauge 15 Backflow function available on the standard model Space-saving (80 x n) + 23 (79 x n) + 25 (188 x n) + 43

Soft start up valve with lock out

Manual lockout Nil B A 3(R) DZ 1/2 (AVL4000) 04 G 100VAC (50/60Hz) 1 3/4 (AVL5000) 06 D type DIN connector with M12 connector, indicator light & surge voltage suppressor AVL2000 push button protrudes by 1mm over the body. 200VAC (50/60Hz) 2 DZM 1 (AVL5000) 10 110 to 120VAC (50/60Hz) 3 Dimension AC20* to AC60* (mm) 220VAC (50/60Hz) 4 Option Model A1 A2 A3 No gauge Nil 24VDC 5 AC20* 41.5 43

NARM Ser ies

Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief style Port size/Weight Model Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) 1 8 1 8 (80 X n) + 23 Common IN .13 (57) NARM1000 1 8 1 8 (79 X n) + 25 Individual IN Common IN 1 4 1 8 (188 X n) + 43

MIW/MIS

Tapped on all faces (5 surfaces including end surface) RSQ Stroke adjuster (Rear end stroke only) RSG RS Scraper Can be mounted on standard products MI Theoretical Output Unit: N Operating pressure MPa Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 26 17 IN 60 51 43

VK300

Note Bracket VK300-43-2A With screw Body ported VK332 1 G M5 1 G 01 VK334 Base mounted CE-compliant Q CE-compliant Nil Port size Note) Applicable only for DIN terminal type 01 (With sub-plate) Nil Without sub-plate 1 8 Valve option Light/Surge voltage suppressor CE-compliant Nil V Y W E Standard type For vacuum Nil None S With surge voltage suppressor For low wattage For vacuum/low wattage

VK3000

Note Bracket VK300-43-2A With screw Body ported VK3120 1 G M5 VK3140 1 G 01 Base mounted CE-compliant Valve option CE-compliant Nil Nil Standard For low wattage (2 W DC) Q Y Note) Applicable only for DIN terminal type Applicable voltage: 12 and 24 VDC Thread type Nil F N T Rc Light/Surge voltage suppressor Nil None With surge voltage suppressor With light/surge voltage suppressor (Type