IR1000/2000/3000

Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 14-5-8 8 Precision Regulator Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (Option) 30 2 25 Bracket (Option) F.R.L.

MB

44 36 36 C76 80 46.5 46.5 55 52.5 47.5 103 58 52 92.5 48.5 45 51.5 45 45 100 55 55 62 59.5 55.5 113.5 65.5 60 103 56.5 53.5 60.5 53.5 53.5 C85 125 66.5 66.5 71.5 70.5 67.5 125 76.5 72 115 68.5 65 72 65 65 C95 Operating Range CP95 (mm) Auto switch type Bore size 32 40 50 63 80 100 125 NCM D-Z7/Z80 13 10 17 7.5 8.5 7.5 9.5 9.5 10.5 9 9 10 11 11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. Precautions Operation of Manual Override Warning Plug position Configuration B port N.C. A port N.O. (A) 4 (B) 2 (A) 4 (B) 2 Plug Plug Single Double Use caution since manual override operation will operate any connected actuators.

0.55

33 15 53 36 18 56 45 12 48 15 45 12 55 48 15 58 55 15 75 58 18 78 Standard VF1000 2-position High-pressure type 2-position Standard 3-position VF3000 Single Double 2-position High-pressure type 3-position Single Double 2-position Standard 3-position VF5000 Single Double 2-position High-pressure type 3-position Note) Based on dynamic performance test, JIS B 8375-1981.

MXS Series Air Slide Table

36 38 NN 2 2 2 3 3 4 5 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 HA 40 40 40 25 36 72 76 MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-100 125.5 179.5 58 Air Slide Table MXS Series Dimensions MXS 12 With shock absorber(12) MXS12BS, BT, B 17 A 8 31.5 31.5 15 15 45 Shock absorber at retraction end Shock absorber at extension end (mm

CE

23 SR6 40 18 3 23 M8 x 1.25 70 36 18 7 2-M5 x 0.8 (Port size) 4-M5 x 0.8 Thread depth 10 74 20 114 + Stroke 31 145 + Stroke 2 10-12-14 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: 4-5.5 CEP1L20 Stroke (Positioning pin hole) 40 6 13.5 25 6 +0.05 +0.02 4 RE A B REC 68 85 CX CY MQQ M RHC MK(2) 22.5 RS Q G 4.5 57.5 RS H A 40 36 RZQ 52 MI W S CEP1 CE1

Plug-in/Plug Lead: Single Unit

Type SU 2-6-36 Base Mounted Series VQ5000 Manifold mounted exhaust cleaner Applicable exhaust cleaners AMC610-10 (Port size Rc 1), AMC810-14 (Port size Rc 11/2) VV5Q5 --CD (D side mounting) VV5Q5 --CU (U side mounting) 1 5 1 5 Note 1) Exhaust cleaner: AMC610-10 and MC810-14 are not included. (Order separately) Note 2) Mount so that the exhaust cleaner is at the lower side.

Digital Flow Switch (Integrated display type) ( compatible)

Device state parameters (index 36) Readable device states are as follows.

Cylinder with Lock

31 38.5 31 41 34 43.5 34.5 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 40.5 36 43 36 46 39 48.5 39.5 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 49 45 52 45 52.5 46.5 55 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55 103 113.5 55.5 53.5 56.5 53.5 64.5 53.5 65.5 60.5 25 Auto Switch Mounting MWB Series Minimum Stroke for Auto Switch

VQZ1000/2000/3000

Rc 1/8 1(P) port 3 4 5 3 4 5 L plug connector (L): VQZ2 20 1(R)-L-C4/C6/M5 DIN terminal(Y): VQZ2 20 1(R)-Y-C4/C6/M5 Indicator light 300 149.5 (Lead wire length) 68 Pg.7 31 <36> 155.5 MAX. 10 71.5 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61.5 54 0 1 3 4 5 36 M plug connector (M): VQZ2 2 (R)-M-C4/C6/M5 300 (Lead wire length) Cover diameter

Series CQ2

size) 30 30 2 x 4-31.5 depth of counter bore 26 Width across flats 36 40 40 62 62 4-19 through 182 226 3 5.5 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 36 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less. 109 + Stroke 17 + Stroke 17 182 226 2-M24 x 3 effective thread depth 33 143 + 2 (strokes) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5

MHF2

36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x 0.8 thread depth 5.5

Air Catch Sensor Series ISA

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 Terminal block box LED level meter EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 SUP port L3 6.5 Rc, NPT, G 1/8 36 24 ZSE ISE OUT 3 36 OUT 2 OUT 4 Left

Compact Cylinder

40 45 52 2% 9% 7% 15% 10% 12% 29% 28% 36% Compared with 30 stroke.

E-MY2B_E_A

(See page 36, 37 and after for ALM display in case of alarm.) General 3 positions 5 positions General Manual alarm reset When alarm occur, press for recovery from alarm condition. External alarm reset Even if alarm occurs, it recovers from alarm condition by inputting emergency stop command externally for 50ms or more. Then operation is available.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

PFA/PFW

DC (+) 1 OUT 2 2 DC () 3 OUT 1 4 Flow direction 14 Digital Flow Switch for Water Series PFW Dimensions (mm)/ Separate Type For water 1in = 25.4mm Scale:70% PFW3mm mm-A Display unit Panel mount 3 x 7.2 (= 21.6) 41.8 8-M3 40.3 40 6.4 4.3 1 2 3 4 SMC FLOW SWITCH 35.8 19.4 40 UNIT RESET SET 5 6 7 8 Panel cutout dimensions 36 + 0.5 0 + 0.5 0 36 PFW3mm mm-B Display unit DIN rail The applicable

VEX1

Refer to p.5.3-1 for details. 5.1-36

E-MY2_E_D

(See page 36, 37 and after for ALM display in case of alarm.) General 3 positions 5 positions General Manual alarm reset When alarm occur, press for recovery from alarm condition. External alarm reset Even if alarm occurs, it recovers from alarm condition by inputting emergency stop command externally for 50ms or more. Then operation is available.

3

C 1 B A Basic (mm) (mm) T 9 10.5 MKB20-Z MKB25-Z Model Yh9 18 23 A B C E F G 36 40 47 52 36 40 35.5 40.5 18 21 17.9 22.5 S 28 27.5 Clamp stroke Model Rod state 0 0.043 0 0.052 20 mm Q R 112.5 142 113.5 143 30 mm Q R 132.5 172 133.5 173 10 mm Q R 92.5 112 93.5 113 Retracted Extended Retracted Extended MKB20-Z 72 82 92 MKB25-Z 73 83 93 Note) The above figure is with the auto switch (D-M9) mounted