PF3A8xxH.eng

Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. SET button Press this button to change the mode and to set a value.

Flame Resistant

Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 2) Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

PFMV3.eng

A Pin no. Wire colour [oU2] Output mode (OUT2) [HYS] Hysteresis mode 1 Brown (DC+) After maintenance is complete, perform appropriate functional inspections and leak tests. Stop operation if the equipment does not function properly or there is a leakage of fluid. [2ot ] Reversed output (OUT2) [2_n] Normal output [F 2] System error 2 NC System error.

PFxx-OMP0001CN

L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

(A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ Note 2) 8 2 1 (P) 3 (R2) 1 (P) 3 (R2) 5 (R1) 5 (R1) 5 (R1) 1 (P) 3 (R2) VQ4 Metal seal Rubber seal 3 position closed center 3 port for mixture mounting (N.O.) (A) 4 (B) 2 (A) 4 (B) 2 Note) For inch size one-touch fittings and optional thread type, refer to page 933.

Pressure Sensor

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

Pressure Sensor

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

CG1-SMV13_en

Poloneza 89 Page 2 of 2

High Purity Fluoropolymer Needle Valve Series LVN 1

2 1 P0.01MPa P0.01MPa P0.01MPa 2 1 0.5 0 2 4 6 8 10 0 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part

VPA4

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Miniature Guide Rod Cylinder Series MGJ

3 y u r !1 q t !2 !5 e !1 No.

HAA

x Port size SFD LLB AD GD Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 13

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

PAB-OM-B006-B

Pilot air supply port (A I R S UP) S upplying pressure set by regulator. Use clean air. Pilot air exhaust port (A IR E X H) E xhausting pilot air. Reset F or resuming of normal operation after momentary stoppage.

PAB-OM-B007-B

Pilot air supply port (A I R S UP) S upplying pressure set by regulator. Use clean air. Pilot air exhaust port (A IR E X H) E xhausting pilot air. Reset F or resuming of normal operation after momentary stoppage. of 0 .2 mm at least on IN port. Diaphragm should be changed before the life frequency.

Air Suction Filter With One-touch Fittings Series ZFB 1

Replace the filter element when the pressure drops approximately 0.02 MPa. 2. During disassembly or reassembly, make sure that the O-ring is not cut or damaged. Replacement Parts Part no. No. Description ZFB100/101 ZFB200/201 ZFB300/301 ZFB401 q O-ring for clear cover S11.2 S12.5 S16 S18 Selection O-ring is a set with spare element (I-S-A). Warning 1.

PVC Quick Drain Valve

Liquid seals When circulating fluid Provide a relief valve in the system so that fluid does not get into the liquid seal circuit. 32 (11/4) 40 (11/2) 25 (1) 50 (2) Nominal dia. mm (inch) 4.0 6.0 8.0 12.0 Tightening torque Nm TLM TILM For fittings of 65A or larger, tighten the fittings by a further 1/8 rotation (45) with a belt wrench after tightening by hand.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can