CV/MVGQ

Stroke range (mm) Bore size (mm) 50 63 80 100 B1 J H1 F E D CZ I CD C B AL A L K CX 18 + 0.3 + 0.1 25 + 0.3 + 0.1 31.5 + 0.3 + 0.1 35.5 + 0.3 + 0.1 27 27 32 41 Up to 600 Up to 600 Up to 750 Up to 750 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 10 10 14 14 40 40 52 52 20 20 25 30 35.5 50 63 71 18 18 20 20 12 16 20 25 11 11 13 16 52 64 78 92 70 85 102 116 32 32 37 37 35 35 40 40 98 100 105

AIR CYLINDER

Usable stroke by buckling strength Usablestroke by Mounting style buckling strength (cm) Pressure Symbol and sketch (MPa) Symbol of bracket Rod side Frang e F Head side flange 103 92 113 Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301

Air cylinder

buckling strength (cm) e Symbol and sketch Symbol 125 140 160 180 200 250 320 (MPa) of bracket Rod side 0.3 103 92 113 108 124 155 162 Head L Foot: side Frang flange e F 0.5 79 70 86 81 94 118 122 L G F 0.7 66 58 72 67 78 98 101 0.3 45 38 47 46 54 67 69 0.5 33 27 34 33 39 49 49 G 0.7 26 22 27 26 31 39 39 0.3 96 83 106 102 118 147 152 Center C Clevis trunnion 0.5 71 61 76 75 88 109 113 CD

ZP

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

V

Silencer Box; D Side Exhaust SU Direct Jet Silencer Box; U Side Exhaust (N OTE 4) W Enclosure IP65 (Except F Kit) NOTE 1) WHEN SPECIFYING MORE THAN ONE OPTION, COMBINE N O O F S TAT I O N S 02 2 Stations n n Stations Max & Min depends on Kit Refer to Section P O R T S I Z E SYMBOLS IN APLHABETICAL ORDER NOTE 2) COMBINATION OF CU/CD AND SU/SD IS NOT POSSIBLE NOTE 3) COMBINATION OF T AND S

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m x (a2 + b2) / 12 + m x H2 = 0.4 x (0.102 + 0.062) / 12 + 0.4 x 0.042 = 0.00109 kgm2 Inertial moment Kinetic energy 6 Confirm that the load's kinetic energy is within the allowable value. 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) 1/ 2 x 0.00109 x (2 x ( / 2) / 0.3)2 = 60 mJ Allowable energy OK t : Rotation time (s) Allowable kinetic

Title not found

*i:l Frcl*r'] re{i ti:r*ads Roll.d fis(lr rod dncds lbr incrc$cd tcnsilc strcnlth. Sllep,ac,:a!

Air Cylinder Series CS1

Shaft d9 4 x J CJ1 C B CJP d CJ2 S + Stroke Z + Stroke ZZ + Stroke CM2 ZZ1 + l + Stroke Z1 + l + Stroke CG1 With auto switch: CDS1D MB With rod boot MB1 ~ = 2 x P 4 x J Width across flats KA CD hole H10 Shaft d9 CA2 CS1 ~ = ~ = C B d CS2 S + Stroke Z + Stroke ZZ + Stroke ZZ1 + l + Stroke Z1 + l + Stroke Note) Clevis pin and cotter pin are shipped together.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Refer to Minimum Stroke for Auto Switch Mounting on page 6-9-8. 160 411 466 55 176 0.17 stroke 427 482 105 141 65 175 451 519 115 55 190 0.17 stroke 466 534 146 80 The minimum stroke with rod boot is 30 mm or more. 6-9-16 17 Series CS1 Air Cylinder Double Clevis Style: CS1D Lube (CS1D), Non-lube (CS1DN), Air-hydro (CS1DH) Width across flats KA CD hole H10 Shaft d9 With rod boot CJ1 CJP S

LEC-OM07605CN

DICOM 10 B () 7 LB 17 LBR (5) 8 LZ Z () USB 18 LZR 1 1 LG MR Configurator2 LEC-MR-J3USB COM () CN5 + 1 4 1 MO1 LG 14 MO2 2 SD 2m (6) LE-CSS(7) SSCNET () CN1A CN1B CN1A (1) CN1B 8 (7) CN1A (6) LE-CSCNET (9) () CN1B 3 8 3. 3.3 3.3.1 9 () L1, L2L3AC200V240VL1L3 L2 LECSS2-T5 LECSS2-T9 L1L2L3 AC200V240V 50Hz/60Hz L1L2L3 AC200V240V 50Hz/60Hz L1L3 P3P4 P3P4() P+D() P+DP+C P+CD

Direct Solenoid

Y Y lii : Yl tloie lr is ncessry io us sa6rGr * AXr 33t12 on lh6 rop and bodo.n suftco to properly sar. (1) Cidbel).w*h,tqubb cd m h.iore (3' Comn dhardnqha pdr xot : N\is ,ula d.or t u..d h slu'r.ton !,xh ts .Lub .ts|l.L. (SPR0102) l"r t @l Slop vslve AxY 395 (Sullix Addor SV.'

Series AP500

Vespel is a registered trademark of DuPont. 19 Intermediate flow (Tied-diaphragm) Two Stage Regulator for Ultra High Purity Series AP2700 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 150 slpm (NF3) to 900 slpm (H2) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Minimizes supply pressure effect by

KR

Bulkhead Connector: KGE Effective area (1) (mm 2) H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Digital Flow Switch

Hysteresis [ H2] and [the current set value] are displayed in turn. Press the or button to change the value. Press the button to set. [F 2] Setting of OUT2 completed.

V

Interface plate for ZSM Ejector P31806-01 (blank) P31806-02 (use with switch) CD-P11 Contact protection box 0 NZM Ejector Mounting 1 1 8 PT T1 1/8 NPTF S W I T C H T Y P E 15L Solid state (NPN) 21L Contact reed CONTACT PROTECTION BOX/INTERNAL CIRCUIT Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 !

VQ5000

Combination of [CD U] and [SD U] is not possible. Specify the wiring specifications on the manifold specification sheet. Note 1) Add 1 station for terminal block box. The maximum number of stations can be expanded with optional special wiring specifications. Refer to page 2-6-15 for details.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Light turns on when power is input POWER POWER POWER Transmission indicator Normal: Blinks, Abnormal: Blinks slowly SEND Transmission indicator Normal: Blinks, Abnormal: Turns off or on Transmission indicator Normal: Blinks, Abnormal: Turns off or on SEND SEND Simple wiring standard system S-LINK system Simple wiring H system Send unit: SD-120 S-LINK controller: SL-CU1 Send unit: SD-H2

Digital Flow Switch

Hysteresis [ H2] and [the current set value] are displayed in turn. Press the or button to change the set value. Press the button to set. [F 2] Setting of OUT2 completed. Return to function selection mode. : The set value and hysteresis settings limit each other. : The display colour is defined by OUT1 and cannot be changed with any OUT2 settings. -41No.PF-OMO0005-F c.

Digital Flow Switch (Remote type monitor unit)

Input of set values P2dH P2AH n2AH P2AL n2AL Setting of P2L/n2L P2H/n2H Setting of tnL/tPL Setting of P_2/n_2 Setting of tn/tP n2dH P2dL n2dL tnH/tPH H_2 H_t H2 Ht (Page 37) (Page 39) (Page 37) (Page 39) (Page 38) 4. Completed [F 2] Setting of OUT2 is completed. -35No.PF-OMN0012-H 1.

Digital Flow Switch

Hysteresis [H2] is displayed on the main display. [The current set value] flashes on the sub display. Press the or button to change the value. Press the button to set. [F 2] Setting of OUT2 completed.