H/DL/L/LL

(mm) Connection threads R Model M Effective area (mm 2) Weight (g) A L1 L2 VMG 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DY04-01 15 6.9 32 DY04-02 17 19 2-applicable tubing 4 10 23.5 36.5 10 40 DY06-01 36 17 10 36.5 23.5 DY06-02 16 6 19 42 14 16 12 DY06-03 22 66 26.5 42.2 38.5 39.5 42.2 43.5 42.2 47.3 47.5 47.2 47.3 119 Reference dimensions after R thread installation.

VZ5000

A side coil Housing side Stations D side B side coil Black White 10 station (20 stations) A side coil Red Red 3-3-79 Series VZ5000 Type 40 Manifold: Bottom Ported VV5Z5-40Station 2-01 Grommet (G), (H) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) PE port (Pilot EXH) 2n-Rc 1/8 (4(A), 2(B) port) (Pitch) (mm) Stations 2 3 66

Cylinder with Lock Series CLS

Auto switch (mm) Auto switch model D-A90 D-A93 D-M9N D-M9P D-M9B SMC CLS125 MODEL b a a b a b Bore size CLJ2 FREE LOCK CHECK 125 140 160 180 200 250 62 42 58 46 70.5 50.5 66.5 54.5 CLM2 Cylinder With$ Locking Mechanism 70.5 50.5 66.5 54.5 80.5 60.5 76.5 64.5 CLG1 86 66 82 70 102 82 98 86 CL1 Be sure to confirm operation after mounting.

Lubricator Series AL10 to 60

bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153 187 187 261 279 With barb fitting B 161 195 195 269 287 Metal bowl with drain cock B 85 124 166 200 200 274 292 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 14-2-64 Lubricator Series AL10 to 60 Dimensions Option: 1000 cm3 tank 106 90 106 E Port size Bracket (Option) 70 66 3.2 13 F.R.L. 11 C P AV IN OUT H AU

Digital Flow Switch (Integrated display type)

(page 66) Button The flow adjustment valve fails to adjust the flow 2 Flow adjustme nt valve Loosen the lock ring, and then adjust the flow adjustment valve.

Series VS

26 34 26 37 64.5 31.5 58.5 67.5 97.5 58.5 20.5 3 41 52 41 52 92 36 69 82.5 121 74 28 4 234.5 142.5 13 77.5 79.5 92 108 123.5 CC 188.5 199 244 SIZE 3 SIZE 2 57.5 1.5 U V 14 25 43 W X 2 42 Y Z 133 AA BB SIZE 1 1 73 56 35 53 2 20 150.5 4 68.5 71 30 45 2 20 175.5 n= NUMBER OF STATIONS (MIN. 2,MAX.10) LENGTH FORMULA L1= 43n + 72 L2= 43n + 84 LENGTH FORMULA L1= 56n + 90 L2= 71n + 90 L1= 71n + 66

Refrigerated Air Dryers Series IDF/IDU

Compressed air inlet Compressed air outlet Evaporation thermometer Cooler re-heater (Heat exchanger) Auto drain Ball valve Drain outlet Volume control valve Capillary tube Accumulator (IDFA22E, 37E, 55E only) Pressure switch Condenser Fan motor Compressor for refrigeration High pressure switch (IDFA55E, 75E only) 66 Refrigerated Air Dryer Series IDFAE Dimensions IDFA22E, IDFA37E D G A E B

CG5-S

15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66

Air Cylinder Series CS1

M56 x 2 53 50 5 6 144 132 5 x 65 160 75.5 MB +0.12 0 0.1 0.3 0.100 0.174 63 80 9 71 M64 x 2 66 63 5 6 178 166 5 x 80 175 105 84.5 IYincludes a pin and 2 cotter pins.

0.55

Series Port size 3 5 F N T VF3000 1/8 G VF5000 1/4 NPT NPTF 43 Series VF3000/5000 Pilot Operated 5 Port Solenoid Valve Base Mounted/Manifold Dimensions: Series VF3000 (mm) Type 40/VV5F3-40-;;2-02;: Common exhaust Grommet (G) (H) Grommet (G) (H) DC without light/ surge voltage suppressor L1 L2 6 19 (Distance between ports) 13 0.5 52.5 36.5 75 33 165.9 168.3 R P R R P R 23 23 149.9 152.3 66

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQZ3 5 (R)-G10 1 3 4 5 02 03 13.5 9 SJ 5 56 2 x 4.5 (For mounting) SY Manual override 5 SV A 4 B 2 45 B A SYJ R2 3 P 1 R1 5 SZ 69.4 16.9 39.1 VP4 Approx. 300 (Lead wire length) 130.7 S0700 + + VQ 57 41.6 26.5 2 x PE port VQ4 20.5 20.5 14 X 12 Y 13.5 11.5 M5 x 0.8 (External pilot port) VQ5 1/4, 3/8 [1(P), 5(R1), 3(R2) port] 21 (18) 21 (18) M5 x 0.8 (Not used) 33 VQC 66

AC Servo Motor Driver (Pulse input type)

Operating method of each mode . 63 7.1 Position control mode . 63 7.1.1 Operation instruction .63 7.2 Speed control mode . 64 7.2.1 Operation instruction .64 7.3 Torque control mode . 66 7.3.1 Operation instruction .66 8.

AC Servo Motor Driver (CC-Link Type ）

Configure a sequence that changes the operation mode earlier, considering the delay time of CC-Link communication. 15 66 15.

AC Servo Motor Driver (CC-Link Type ）

Configure a sequence that changes the operation mode earlier, considering the delay time of CC-Link communication. 15 66 15.

AC Servo Motor Driver (CC-Link Type)

(See LECSC2-T Operation Manual (Simplified Edition), section 5.7.1 for update project.) -66- 5.9.2 To Load saved Project From the Project menu in the setup software, select Open. Please select the "drive path name project name" that you want to read parameters are stored. Please select the file you wish to import project [.mrc2]. Click Open.

ZQ-OM01301

ZQ-OM01301-A Maximum vacuum release flow rate Vacuum release flow rates in product specifications and according to the V port size [L/min (ANR) ] Supply pressure error V Port [MPa] ZQ05A ZQ07A ZQ10A ZQ000A Size Common Individual Common Individual Common Individual Common Individual PD PD PD PD PD PD PD PD 3.2 0.1 16 14 11 23 0.2 26 23 19 38 0.3 39 31 35 28 29 22 52 43 45 39 47 41 38 35 66

ATX-OM-F003E

140 139 6.0 18 1 1/2 3/4 1 380 431 HAW55-20 1612 1038 366 150 1203 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW75-20 2112 1538 366 150 1703 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW110-30 1724 950 500 72 1210 365 267 303 356 200 Note 1 70 Note 1 195 8.0 18 3 1 1 1/4 395 459 Note 1) HAW110-30 is 220 HAW Series 6 4 1) Outer dimensions

PSxx-OMU0008CN

) [FAL] 3[nG] -52No.PS-OMU0008CN-D /(66 ) 1 () 1 [F81] , 30 -53No.PS-OMU0008CN-D [F82] [F10][dUAL][LinE] <> [F82] () ( ,) AbY(Z)019 (1 3 ) /() 1 () [F82] (3) QXZ((/)(*) () (1) AZ3 <3 > () -54No.PS-OMU0008CN-D [F90] <> [F90] [on]() [oFF]() [oFF]() 2 [F90] 56 -55No.PS-OMU0008CN-D 1 2 OUT1 3 OUT2 4 5 6 FUNC 7 8 9 10 11 12 2 -56No.PS-OMU0008CN-D [F96]

PSxx-OMV0003CN

"x" 16 (22) 0 R HW-Vx.y x y 0x0016 (23) 0 R FW-Vx.y x y 0x0017 0x0024 (36) 0 R (66 ) (37) 0 R (66 ) 0x0025 0x0028 (40) 0 R 1RW (2) ISDU 0x002 SystemCommand() IO-Link (ParamDownloadStore) 8 bit UInteger 128 Device Reset 129 Application Reset / 130 Restore Factory Settings 160 Zero Clear -65No.PS-OMV0003CN-G (12) 16 bit Record 0 DS () 2 DS 8 DS 10 DS [] () () [(DS )] Data storage

Modular Type Air Filter Series AF

66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specification Model With barb fitting B 137 173 177 253 266 With drain guide B 136 172 176 252 265 Metal bowl B 66 97 142 178 182 258 271 Metal bowl with level gauge B 162 198 202 278 291 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 27 Air Filter