Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02
\ ~ I _ .L ~ > / I, \ A&Pl\Ca'ole tube .D. ,p A " w MB X1 .2S I u. Wi~th across )\ Width across flats 12 o 1 r I ~ ln1r,~ ~ ,8 J --; l M .8 . Flat type Flat with rib (mm) Flat type Flat with rib (mm) M_I <M' "B c 0 E F ..,01 H:t.Ij)(1 1t1ol8_125 y Mo\lel fA "B C 0 . EL F HJ,46 x l H:Mf!
Connection threads R/NPT W M L E W H A Model E L A M LQ3H11-M LQ3H12-M LQ3H21-M LQ3H22-M LQ3H31-M LQ3H32-M LQ3H33-M LQ3H34-M LQ3H35-M LQ3H36-M LQ3H38-M LQ3H41-M LQ3H42-M LQ3H43-M LQ3H44-M LQ3H51-M LQ3H52-M LQ3H53-M LQ3H61-M LQ3H62-M LQ3H63-M 4 3 10 11 33.5 10 29.5 14 28.5 9 32.5 1/8" 39.5 37.5 38.5 36.5 1/8" 1/4" (E,E) Port size R (NPT) 6 17 16 43.5 14 20 16 42.5 10 8 10 8 10 51 48 1/8" 55
(Example) For M4: L2 = 8 mm Applicable shaft types; S, W L1 L1 = L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1 = L1 L1 = Q2 = M Q2 = M L2 = L2 = Q1 Q1 Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 (mm) (mm) (mm) Size 10, 15 Size 20, 30, 40 Size Size Size 10 15 20 30 40 10 15 20 30 40 10 15 20 30 40 Thread Thread Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3
Applicable shaft type: W CRQ2 MSQ (mm) MSZ Q2 Y L2 max Size (mm) Q1=M Q2=M CRQ2X MSQX 10 X Q1 L1 max Size M 4 7 to 8 Y-3 Y= 10 15 9 to 14 M4 X-5 M 5 8.5 to 9 Y-3.5 L2= L1= MRQ 15 20 M5 11 to 18 X-6 M 6 10 Y-4 X= 20 30 M6 13 to 20 X-7 M 8 13 Y-5 30 40 M8 16 to 22 X-8 M10 15 Y-6 Symbol: A5 Symbol: A6 The long shaft can be further shortened by machining it into a stepped round shaft.
Applicable shaft type: W MSQ MSZ (mm) CRQ2X MSQX Q2 L2 max Y Size (mm) L1 = X = Q2 = M Q1 = M 10 Y 3 M 4 X L1 max Q1 Size 7 to 8 L2 = Y = MRQ 10 15 Y 3.5 M 5 M4 7 to 14 X 3 8.5 to 9 15 20 Y 4 M 6 M5 8.5 to 18 X 3.5 10 20 30 Y 5 M 8 M6 10 to 20 X 4 13 30 40 Y 6 M10 M8 13 to 22 X 5 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.
Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.
Description Material Part no. t y u i 1429138 142964 9 x 7 x 1 M-5G1 Valve seat U seal O-ring Gasket Brass HNBR NBR PVC 15-9-29 3 Series AS Construction: AS2000/3000 Component Parts No. Description Model AS2000 AS3000 Aluminum alloy Brass Carbon steel Body Needle Zinc alloy Brass Brass q w r Lock nut Replacement Parts No.
(Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y L1 L1 = Q1 = M LL LL L2 = Q2 = M Q1 (mm) (mm) Size Size Keyway dimensions 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 2.5 4 5 4 5 6.8 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 LL 3 5 5 5 5 Key groove
n1 + 10 x n2 + 63.7 M = (L3 + 4)/12.5 + 1 Remove all numbers after the decimal.
x 1 m A
P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole DIN terminal Conduit terminal D G1/2 S Q F Cable 6 to 12 34 D Q2 F (44) 31.5 32 25 R T E C R Y E C 1.5 1.5 S2 B B1 A A Y B B1 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 A B B1 C
Nil Y M5 x 0.8 M6 x 1 (Option) Pilot valve Vacuum switch electrical entry Nil DC: 1 W (With indicator light: 1.05 W) AC Nil L Lead wire length 0.6 m Grommet type Lead wire length 3 m C Lead wire length 0.6 m CL Lead wire length 3 m Y DC: 0.45 W (With indicator light: 0.5 W) Connector type CN Without connector (Without lead wire) 24 VDC and 12 VDC are applicable to 0.45 W.
(Station 1) (Station n) (Light/Surge voltage suppressor) + + + + 67 [74] 51.6 35 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 63.5 63.5 63.5 63.5 X X X X P P P P 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 R R R R 90.2 Max. 10 91.1 Pg7 78.1 [85.1] Approx. 300 (Lead wire length) 54 71.5 M8 x 1 81.7 51.6 Approx. 300 (Lead wire length) 93 67 [74] 100.5 Refer to page
Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.
) N Z L V (Opposite side: Same) QQ TT Q T U R UU (Piping port) (Opposite side: Same) Z L I N W G NN (mm) A B C D E G H I J K L M N P NN F Model 2 x 5.5 through 2 x M4 x 0.7 thread depth 6 2 x M5 x 0.8 thread depth 7.5 2 x M5 x 0.8 thread depth 8 CXS20 64 25 62 23 11.5 50 28 6 12 12 30 10 53 2 x M5 x 0.8 2 x 9.5 counterbore depth 5.3 2 x 6.9 through CXS25 80 30 78 28 14 60 35 6 12 12 30 12
FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.
11 11 14 17 17 M10 X 1.25 M12 X 1.75 M12 X 1.75 Trunnion/CLAWT (mm) Stroke range A Bore (mm) 40 50 63 80 100 D LZ BP E BN K C KA B GC B1 GD F AL BQ GA GB J H1 GL GR W/o rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 W/ rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 96 108 115 129 140 6
V M V W W W W U,V,WCN2 3 2 3. 3.1 (L1L2L3) ALM() () U,V,WCN2 SSCNET/HAA EM2EM1 AC200V240VL1L3LECSS-S LECSS-SLECSS2-T ON(MCCB) 3 3 3
/CLAWT (mm) Stroke range A Bore (mm) 40 50 63 80 100 AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J K KA LZ W/o rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 W/ rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 113 124 15 17 17 21 21 26 27 26 30 31 54 59 67 72 76 10 13