Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

200mm/s 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Female threads Male threads Rod end threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

Serial Transmission System Series EX250 Series EX500

Note) For rubber seal type only. 3 position closed center A B 3 EAPEB 3 position exhaust center A B 4 P EA EB 3 position pressure center A B 5 EB P EA Kit type S S Kit (Decentralized wiring type serial kit) Kit (I/O serial kit) IP67 protection Serial unit: EX500 Serial unit: EX250 Note) A separate gateway unit and communication cable are required.

Compact Cylinder

F Q H thread effective depth C 4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G

XM, XY

M) When the pilot pressure is applied to the pilot port M, the valve M is removed from the body seat portion, and the valve fully opens. v Closing of the initial exhaust valve, the main exhaust valve By removing the pilot pressure from the pilot port S and pilot port M, both S and M valves return to their previous positions and they are sealed.

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108

Compact Cylinder with Air Cushion Series RQ

0.093 9 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Simple Joint/32 to 50 A type mounting bracket 2-D T2 M W V U T1 Joint and mounting bracket (A type, B type) part numbers F B E YA 03 Applicable air cylinder bore size mm 03 05 32, 40 50 Bore size (mm) B D E F M T1 T2 Part no.

MHF2

dimension table Unit: mm A B Model A C D B 25 MHF2-8DR 11 M3 x 0.5 37 5.5 MHF2-8D1R 61 MHF2-8D2R C 38 MHF2-12DR 14.8 M5 x 0.8 54 7 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 19 M5 x 0.8 76 9 MHF2-16D1R (Finger closing port) (Finger opening port) 124 MHF2-16D2R 66 MHF2-20DR For dimensions not given above, please refer to the table of dimensions on pages 9 through 20. 94 M5 x 0.8 23 10 MHF2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

CG1

16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15

Wedge Cam Operation Provides

MHW2 Groove position of auto switch A Model MHK2-12l MHK2-16l A 10.4 12.8 B 1.8 1.6 MRHQ B Auto switch Standard switch grooves Dimensions A and B other models are same as standard switch grooves. 2.4-17

Series VCL

B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

M, both valves return to their sealed position. 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.4 4.0 4.5 5.0 5.5 6.0 Adjustment nut rotations n 9 Series XMD, XYD Dimensions XMD/Angle type D C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98

F/ISE

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

Angle Seat Valve /

Table (1) Indication of Flow Rate Characteristics Corresponding equipment Indication by international standard Other indications Compliant standards C, b ISO 6358: 1989 JIS B 8390: 2000 Pneumatic equipment S JIS B 8390: 2000 Equipment: JIS B 8373, 8374, 8375, 8379, 8381 Cv ANSI/(NFPA)T3.21.3: 1990 Av IEC60534-2-3: 1997 JIS B 2005: 1995 Equipment: JIS B 8471, 8472, 8473 Cv Process fluid

MGC

MXP MG : Kinetic energy (J) : Weight of load (kg)+Weight of moving section (kg) : Piston speed (m/s) Ek = n2 M 2 EK M n MGP MGQ MGG OUT IN Theoretical Force Unit: N MGC Operating pressure (MPa) Bore size (mm) Piston rod dia.

Transfer

Vertical collision (Upward) Vertical collision (Downward) Horizontal collision ML2B25 Horizontal collision: P = 0.5 MPa CEP1 2000 1500 m m s s Stroke adjusting unit Type of impact Piston speed (mm/s) CE1 s 1000 Air cushion m 500 400 300 CE2 1 m2 2 Kinetic energy E1 ML2B ML2B Use this unit to decelerate the cylinder when weight and speed are

17

L1 ME : Load mass (kg) : Load (N) : Load equivalent to impact (at the time of impact with stopper) (N) : Average speed (mm/s) : Static moment (Nm) : Collision speed (mm/s) : Distance to the load center of gravity (m) : Dynamic moment (Nm) : Bumper coefficient With air cushion = 1/100 With shock absorber = 1/100 : Gravitational acceleration (9.8 m/s2) m F FE m FE a M L1 ME g Note 4) = 1.4a