MTS

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-10-11 11 Series MTS Specifications 8 10 12 6 16 8 25 20 13 32 16 40 Bore size (mm) Spline rod size (mm) 4 20 Fluid Air Without end lock 0.1 MPa 0.15 MPa 0.12 MPa Min. operating pressure With end lock 0.15 MPa 0.17 MPa Maximum operating pressure 0.7 MPa Proof pressure 1.0 MPa Ambient and fluid temperature 10

Guide Cylinder Series MGG

12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50 M10 200 115 210 190 21 25 M10 x 1.5 depth 21 12 11 160 140 182 For

CXT

16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

MY1

160 WW 11 13 20 YW 070 088 104 Z 240 300 360 ZZ XX 38 48 54 Bore size (mm) 25 32 40 Rc1/8 Rc1/16 Rc1/8 Rc1/16 Rc1/4 25.50 29 .0 Rc1/8 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

VQ

3 SOL. 4 stations 4 SOL. 5 stations 5 SOL. 6 stations 6 SOL. 7 stations 7 SOL. 8 stations 8 SOL. 9 stations 9 A Black White SOL. 10 stations 10 w SOL. 11 stations 11 SOL. 12 stations 12 B SOL. 13 stations 13 q SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 2.9-5 3 Port Solenoid Valve Series

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

CXT

10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5 (4) 4.5 5 9 10 11 15 2 (4.5) Bore size (mm) 1.5 (1) 3.5 (1) 3 (0.5) 5.5 (3) Long Stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5 (2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5 8 8.5 3.5 1 1.5 7.5 4.5 (2) Bore size (mm) 10 (7.5) 12 (9.5) 14.5

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

IDX-OM-O004C

M 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-2 12 R 12.1 . 12-1 12.2 . 12-1 12.3 . 12-1 12.4 . 12-2 12.5 . 12-3 13 S 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 T 14.1 . 14-1 14.2 . 14-1 14.3 . 14-1 14.4 . 14-2 14.5 . 14-3 i i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1 i.2.2 i.2.3 50 i.2.4 i 3 i i.2.5 0 i.2.6 WARNING !

3 Port Air Operated Valve Series SYJA300 1

Refer to page 5-11-4.)

Slider Type/Ball Bushing Bearing

2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

100

z on page 13 for replacement parts. 16 Vacuum pressure switch Refer to x on page 13 for replacement parts. 17 Adapter assembly for bottom mounting Brass (Electroless nickel plating) Refer to 0 on page 14 for replacement parts.

3 Port Solenoid Valve Series SYJ300/500/700

port side) / SS3YJ3-S41Stations -M3 26.1 L1 + + + + + 3.5 L2 (Light/surge voltage suppressor) 11 P R P R 26.6 22 48.8 [51] Approx. 300 (Lead wire length) L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P=10.5 12.5 Approx. 300 (Lead wire length) 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8 [51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P=10.5 12.5 4.5

IDX-OM-V020

Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G