High Purity Chemical Valve

Symbol 03 04 05 06 07 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Body class Note) Options can not be combined each other. 3, 1/8" Double acting 4 3/16" Material 2 Body type 6 1/4" Actuator section Applicable option Diaphragm PTFE Symbol Note Body A Stacking type for manifold End plate PPS 1 4 6 1/4" Nil PFA Hydrofluoric acid compatible PTFE F PVDF PFA 3 8 10 3/8" Ammonium hydroxide

4/5 Port Solenoid Valve

Type 32P How to Order 10--SS5YJ3--32P-07 -C4 Applicable connector assembly Refer to page 505.

Series KV2 Fittings

-33S KV2Y03-34S KV2Y03-35S KV2Y07-11-35S KV2Y07-34S KV2Y07-35S KV2Y07-36S KV2Y11-07-35S KV2Y11-07-36S KV2Y11-35S KV2Y11-36S KV2Y11-37S KV2Y13-07-37S KV2Y13-11-36S KV2Y13-11-37S KV2Y13-35S KV2Y13-36S KV2Y13-37S KV2Y15-37S 14.29 14.29 14.29 14.29 19.00 14.29 14.29 17.46 19.00 19.00 19.00 19.00 22.23 23.80 23.80 22.23 19.00 19.00 22.23 23.80 13.2 13.2 13.2 13.2 17.9 13.2 13.2 13.2 17.9 17.9

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

15.6 23.1 27 24 35 ZFC201-07 1/4" ZFC201-09 5/16" 1113 Series ZFC Element Replacement Element replacement procedure 4.

Table of Contents

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

3/16" 17 (17.5) 1/4 AS221F-02-07 AS321F-02-06 18.5 6 12.8 27.8 34.5 35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60 13.2 1/4" 19

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

17 (17.5) AS221F-02-08 AS221F-02-07 8 1/4" 36.4 27.2 15.2 18.5 25.2 18.5 34.5 34.9 34.4 29.4 39.9 34 34 13.2 18.5 (17.5) AS221F-02-10 AS221F-02-09 10 5/16" 18.3 44.5 35.3 18.5 21 27.2 21 36.4 18.2 36 36 15.2 1/4 1/4 AS321F-02-06 AS221F-02-11 6 3/8" 12.8 17 35.3 21 18.8 44.5 27.8 36 60 18.5 39.3 AS321F-02-08 AS321F-02-07 8 1/4" 15.2 18.5 27.8 17 41 29.5 39.3 63 13.2 60 48.3 43.3 42.8 37.8

Prevents Micro-Bubbles

LQ 2 U 03 PAX PB Tubing size Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Body class Applicable fitting Tubing O.D. 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Type of fitting Symbol Nil 1 Applicable fitting LQ2 LQ1 2 Body class Symbol 2 3 4 5 6 Applicable fitting Body class 2 3 4 5 6 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Dimensions Applicable fitting size d 4 Model A L D 10-KQP-04 16 32 6 6 10-KQP-06 18 35 8 8 10-KQP-08 20.5 39 10 10 10-KQP-10 22 43 12 Blanking plate assembly : Thread type Nil Rc G F 1 8" 10-KQP-01 16 31.5 5 N NPT 5 32" 10-KQP-03 16 32 6 NPTF T 1 4" 10-KQP-07 18 35 8.5 5 16" 10-KQP-09 20.5 39 10 Caution Mounting screw tightening torque Series Assembly part no.

KJ

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

PFxx-OMJ0005CN

7No.PF-OMJ0005CN-I * () () CE 0~50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I 7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01

Pressure Sensor for General Fluids

A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 Adapter with throttle ZS-31-X Model No.

Pressure Sensor

M3 M5 01 N01 R04 R06 IM5 IM5H M5 female M5 female Port size M3x0.5 M5x0.8 R1/8 NPT1/8 M5x0.8 4 6 thread, thread, through M5x0.8 reducer reducer through type (with type mounting hole) Case Resin case: PBT Fitting: C3604BD PBT Resin case: PBT Resin case: PBT Fitting: SUS303 Fitting: A6063S-T5 Material Pressure sensing section Pressure sensor: Silicon, O-ring: NBR Oil resistance vinyl cabtyre

Digital Pressure Switch

M5 M5R 01 N01 Port size M50.8 M50.8 R1/8 NPT1/8 M5(0.8) M5(0.8) Wetted parts Pressure sensing part Silicone Material of Piping port C3602 (Electro less nickel plating) O-ring: HNBR With lead wire and connector attached (5-core, 2 m) 55 g 63 g Weight Without lead wire and connector 15 g 23 g Analogue output Voltage output Range Rated pressure range A B C Vacuum 0.0 to -101.0 kPa 0 -101 kPa

ARX Series

B G P BG GP 1 Specialty Regulators ARX Series Regulator for 290 psi (2 MPa) ARX20, 21 Flow Characteristics ARX20-N02 130.5 ARX20-N01 Conditions: Supply pressure 290 psig 130.5 116 116 101.5 101.5 Secondary pressure (psig) Secondary pressure (psig) 87 87 72.5 72.5 58 58 43.5 43.5 30 30 15 15 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3