VHK

Bracket mounting dimensions B S (Width across flats) O. D.

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: V8 (400W Output, Absolute Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable, Flexible

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: V8 (400W Output, Absolute Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable, Flexible

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

1

20-CM2 Standard type 20-CM2A Standard with air cushion type 20-CM2W Double rod type 20-CM2K Non-rotating rod type 20-CM2R Direct mount type 20-CBM2 End lock type Air cylinder Series M(D)B 20-M(D)B Standard type 20-M(D)BW Double rod type End lock type 20-M(D)BB 6-18-2 3 Copper-free Air Cylinders Air Cylinders Bore size (mm) Series Application 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125

FILTER REGULATOR

How to order Accessories NIL: None Port size Note B: With Bracket (130184) G: With Pressure gauge 02 : Rc1/4 IW212:G51-2-02 IW213:G51-4-02 IW215:G51-7-02 NoteOnly one size Setting pressure 2: 0.02~0.2MPa 3: 0.02~0.3MPa 5: 0.02~0.5MPa -6- 4.

High Vacuum L Type Valve

Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) Working principle Port 1(P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0016 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B

Length: 3 (3m), Driver Type: M2 (LECYM2-V, 200~230V, Absolute, MECHATROLINK-II)

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: V7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 200mm, Motor Option: B (w/Lock), Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: S (Standard Cable), Cable Length: 3 (3m), Controller Type: M2 (LECYM2-V, 200V to 230V)

Size: 25, Motor Mounting: Top Mounting Type, Motor Type: V6 [AC Servo Motor, (Absolute Encoder), Output 100W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 150mm, Motor Option: B (w/Lock), Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: R (Robot Cable, Flexible Cable), Cable Length: 5 (5m), Controller Type: M2 (LECYM2-V, 200V to 230V), I/O Connector

Driver Type: M2 [LECYM2/MECHATROLINK-ll, Absolute Encoder), 200V to 230V], I/O Connector: H (w/Connector)

(5m), Driver Type: M2 (LECYM2-V, 200~230V, Absolute, MECHATROLINK-II), I/O Cable Length: 1 (1.5m)

: S (Standard Cable), Cable Length: 3 (3m), Driver Type: M2 (LECYM2-V, 200~230V, Absolute, MECHATROLINK-II), I/O Cable Length: 1 (1.5m)

Length: 3 (3m), Driver Type: M2 (LECYM2-V, 200~230V, Absolute, MECHATROLINK-II), I/O Cable Length: 1 (1.5m)

: 3 (3m), Driver Type: M2 (LECYM2-V, 200~230V, Absolute, MECHATROLINK-II)

Quick Exhaust Valve Series AQ

(b) When the differential pressure between the IN and OUT sides is smaller than the minimum operating pressure. (c) When the effective area of the IN side piping of AQ, or the solenoid valve, is smaller than AQ. Component Parts Material/Model No.

Water-cooledThermo-chiller

Thermo-chiller with exhaust from the side: Body space: W15.7in (400 mm) x D 33.3 in (845 mm) Ventilation space: 3.9 in (100 mm) 15.0 (380) HRW008-H : Body space: W15.0 in (380 mm) x D 26.2 in (665 mm) Ventilation space: 0 15.7 (400) 3.9 (100) 33.3 (845) 26.2 (665) 10.0 ft2 (0.93 m2) 5.5 ft2 (0.51m2) 98 High Performance Easy Maintenance Temperature stability: 0.54F (when a load is stable)

Length: 3 (3m), Driver Type: M2 (LECYM2-V, 200~230V, Absolute, MECHATROLINK-II), I/O Cable Length: H (w/Cable, Connector Only)

High Vacuum L Type Valve

Valve Screw Tightening size size torque XLFV-16 M2 0.2 -25 -40 -50 M3 0.8 -63 -80 17 XL-OMV0019 Revision history 1st printing: VZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

Series: LEFB (Belt Drive), Size: 40, Motor Mounting Position: Top Mounting Type, AC Servo Motor: V8 (400W Output, Absolute Encoder), Lead: S, Stroke: 2000mm, Motor Option: B (Lock), Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: R (Robotic Flexible Cable), Cable Length: 5 (5m), Driver: M2 (LECYM2-V, 200~230V, Absolute, MECHATROLINK-II)