NCA1

1/8 5/16 3 1/4 1 1/2 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 4 1 1/2 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 5 1 1/2 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 1 3/4 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 BORE TD TL TM UM UW 1 1/2 1 1 2 1/2 4 1/2 2 1/2 2 1 1 3 5 3 2 1/2 1 1 3 1/2 5 1/2 3 1/2 3 1/4 1 1 4 1/2 6 1/2 4 1/2 4 1 1 5 1/4 7 1/4 5 1/4 5 1 1 6 1/4 8 1/4 6 1/4 6 1 3/8 1 3/8 7 5/8 10 3/8 7 5/8 11 Dimensional Drawings Expanded

NCA1

Rod Clevises Part No CB CD CE CH CW F L A KK ER NY-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800 1.515 1 3 1/8 1 1/2 3/4 1 1/2 1 1/2 1 5/8 1 -14 1 NY-1000 2.032 1 3/8 4 1/8 2 1 2 2 1/8 2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400 2.531 2 5 1/2 2 15/16 1 1/4 2 15/16

Table of Contents

2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Table of Contents

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

NCA1

8 3/8 1.3 1.06 2.19 5/16-24 2 1/4 1 2.48 3/4 1.75 3 1/8 3/4 2 325 (3.25") 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 3/4 1/2 1/2 1/2 7/8 0 1/2 5/8 1.57 1.18 3 3/4 1 1/4 3/8-24 3/8 2.72 2.34 1 11/64 1 1 2.76 4 1/4 400 (4") 1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 1 1 2.34 2.72 1/2 3 3.32 4 1/4 3/8-24 4 0 1/2 1/2 5/8 1.57 1.18 1 3/8 3/4 15/64 1/2 1/2 1/2 7/8 Bore size (in) SA XA ZA 150 (1.5") 6

NCA1

8 3/8 1.3 1.06 2.19 5/16-24 1/8 3 2 1/4 1 2.48 3/4 1.75 3/4 2 325 (3.25") 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 3/4 1/2 1/2 1/2 7/8 0 1/2 5/8 1.57 1.18 3 3/4 1 1/4 3/8-24 1 11/64 3/8 2.72 2.34 1 1 2.76 4 1/4 400 (4") 1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 1 1 2.34 2.72 1/2 3 3.32 4 1/4 3/8-24 4 0 1/2 1/2 5/8 1.57 1.18 3/4 1 15/64 1/2 1/2 1/2 7/8 3/8 Bore size (in) SA XA ZA 150 (1.5") 6

0.4

SV Residual pressure release valve perfect spacer VVQ4000-25A-1 Throttle valve spacer VVQ4000-20A-1 SUP stop valve spacer VVQ4000-37A-1 Interface regulator ARBQ4000-00-1 A B P SYJ SZ VP4 S0700 "!

Modular Design with Uniform Body Style

. body C A A Model P1 P2*1 A B C Applicable AC size Y24-D 1/8, 1/4 1/8 28 35 42 AC20-D Y34-D 1/8, 1/4, 3/8 1/8 31 43 53 AC30-D Y44-D 1/4, 3/8, 1/2 1/8 39 51 71 AC40-D Y54-D 1/4, 3/8, 1/2, 3/4 1/8 47 54 71 AC40-06-D Y64-D 3/8, 1/2, 3/4 1/8 62 64 90 AC50-D, AC60-D Model P1, P2*1 A B C Applicable AC size Y24-1-D 1/8, 1/4 40 35 42 AC20-D Y34-1-D 1/8, 1/4, 3/8 49 43 53 AC30-D Y44-1-D 1/4, 3/8,

High Vacuum Angle Valve

-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00-30-1H-1 XLF100-30-1 XLF100A-30-1 XLF100-30-1H XLF100A-30-1H XLFV100-30-1 XLFV100A-30-1 XLD100-30-1 XLD100-30-1H XLDV100-30-1 XLG100-30-1-1 XLG100-30-1H-1 80 XLA80-30-1 XLA80A-30-1 XLA80-30-1H XLA80A-30-1H XLAV80-30-1 XLAV80A-30-1 XLC80-30-1-1 XLC80-30-1H-1 XLCV80

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Step Motor Driver （ Pulse input type ）

100 100 100 100 Para protect 1 1 1 1 Enable SW 2 2 2 2 Unit name Part no. of each product W-AREA1 0.00 0.00 0.00 0.00 W-AREA2 0.00 0.00 0.00 0.00 ORG Correct 0.00 0.00 0.00 0.00 Sensor type 1 1 1 1 Option set1 1 1 1 1 Undefined parameter11 1 1 1 1 Undefined parameter12 1 1 1 1 The maximum speed varies depending on the stroke.

Step Motor Controller (Servo / 24 VDC)

44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57

Battery-less

1 !

MY1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 Nil W Z A L H AZ LZ HZ Nil W A L H A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH AL, AH AL, LH AH, LH A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side

Mechanically Jointed Rodless Cylinder Series MY1

1 1 6 M4 x 0.7 10 4 7 3.5 1 1 6 Note) A set of brackets with floating mechanism consists of a left bracket and a right bracket.

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

CATALOG VC10

2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8 O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 SS BR AL 1/8 NPT 7 4 2 1/8 NPT 8 5 2 1/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28

Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

Aluminum High Vacuum Angle Valve

-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00-30-1H-1 XLF100-30-1 XLF100A-30-1 XLF100-30-1H XLF100A-30-1H XLFV100-30-1 XLFV100A-30-1 XLD100-30-1 XLD100-30-1H XLDV100-30-1 XLG100-30-1-1 XLG100-30-1H-1 80 XLA80-30-1 XLA80A-30-1 XLA80-30-1H XLA80A-30-1H XLAV80-30-1 XLAV80A-30-1 XLC80-30-1-1 XLC80-30-1H-1 XLCV80