0.

1/4 C6 (for 6) C8 (for 8) C10 (for 10) Rc 1/4 Side VQZ3l5 VQZ300 2 to 20 stations VV3QZ35-lll P.31 Front matter 2 3 Port Solenoid Valve Body Ported Series VQZ100/200/300 Single Unit [Option] Plug Lead Unit VQZ100 / How to Order Valve Series VQZ 1 1 5 5 M C6 1 PR CE compliant CE marked 1 VQZ100 body width 10 mm Nil Q Note) For CE compliant models, DC-type only.

Table of Contents

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Table of Contents

1 !

CJ2

1 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Applicable connector: 9 Triangle mark indicator position EXH outlet Flat ribbon cable connector (20P) (Conforming to MIL-C-83503) Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

SYJ VQZ300 Port size Symbol VQZ200 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc 1/4 1 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VK (A) 2 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56 (11) PE port R 3 1 P (24) 9 2-Rc(PT)1/4 P(SUP) port 2-Rc(PT)1/4 R(EXH) port 21

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

2-Color Display Digital Flow Switch Series PFM

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

Non-contact Gripper

XT661-2A: F = f x (1/t) = 0.8 x (1/2) = 0.4 N XT661-4A: F = f x (1/t) = 3.8 x (1/2) = 1.9 N XT661-6A: F = f x (1/t) = 5.9 x (1/2) = 2.95 N XT661-8A: F = f x (1/t) = 7.5 x (1/2) = 3.75 N XT661-10A: F = f x (1/t) = 14.4 x (1/2) = 7.2 N 9700 g 9700 x 9.8/1000 = 95.06 N XT661-10A: Temporary lifting force 11.2 N < Workpiece mass 9700 g (95.06 N) 3) Confirm the relationship temporary lifting force

VZS

0 Tie-rod y, O-ring e, r, Seal A q Plug-in type With D-sub connector: Type 51F VVZS3000-1A-3-Port size (1) (-1) (2) Note 1) Bore -01: Rc 1/8, -C6: Embedded type One-touch fitting for 6, -C8: Embedded type One-touch fitting for 8. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly.

MGG

1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

VQ20/30

VN VQ30 LVC LVA JIS Symbol LVH (A) 2 Characteristic Specifications LVD VQ20 VQ30 Series LVQ 1 (P) C8 C6 C10 C12 N.C.

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

Manifold Specifications

0 Tie-rod y, O-ring e, r, Seal A q Plug-in type With D-sub connector: Type 51F VVZS3000-1A-3-Port size (1) (-1) (2) Note 1) Bore -01: Rc 1/8, -C6: Embedded type One-touch fitting for 6, -C8: Embedded type One-touch fitting for 8. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly.