Power Clamp Cylinder

C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA 44 34 Arm position/Mounting hole 48 68 Arm position Mounting hole Symbol D1 6 6 6 8 8 8 D2 9 9 9 10.2 10.2 10.2 D3 14 14 14 17.5 17.5 17.5 L 7.5 7.5 7.5 10.5 10.5 10.5 A A 20 A B C D E F Center Right Left Center Right Left Center type Left type 2 x D1H7 through (9) 300.2 2 x D2 through 300.02 1050.1 For Asia For North America For Europe For

0.55

(IN OUT) 2 3 (OUT EXH) Flow characteristics Port size Valve model Grommet C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(IN), 2(OUT) 3(EXH) 3 8 1 2 3 4 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 21 0.39 5.8 28 0.36 7.6 26 0.35 7.0 VP3145 3 4 1.5 Mass (kg) Port size Effective area (mm2) Valve model Grommet 1 (IN), 2 (OUT) 3(EXH) 1 2 (IN OUT) 230 280 310 570 650 650 2 3 (OUT EXH) 280 310 330 650

Electric Actuator

7 35 114 +0.030 0 6H9 ( ) depth 7 (158) 63.5 Motor cable (6) 73 Encoder Z phase detecting position Note 2) Motor option: B/With lock L A (Table traveling distance) Note 1) 186 (B: With lock/226) 39 (64) Encoder cable (7) Stroke (66) 2o1 (4) 70 58 47 Lock cable (4.5) 6.7 35 Motor cable (6) 0 8H9 ( ) depth 6 B 30 +0.036 +0.036 0 8H9 ( ) depth 6 n x 6.8 13 140 79 200 C x 200 (=D) E 25 Note

Digital Gap Checker

Description 1 DC (+) 18 6.5 2 N.C. 24 Supply port ISA3-C: Rc1/8 ISA3-F: G1/8 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 1 3 DC () 36 4 OUT1 Unit: mm 1: Conforming to ISO1179-1 Stations 1 2 3 4 5 6 (49) 47 L1 38 76 114 152 190 228 18 2 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 ISA3-mm (DIN rail mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38

IDX-OM-W010

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

Environment

How to Order 25A-LEY 16 100 B C 1 1 6N S Series compatible with secondary batteries q w e r t y u i o !0 !1 !2 !

KJ

KK2P-23E -04E -06E KK3P-04E -06E -08E -10E KK4P-06E -08E -10E -12E KK6P-12E -16E KK2S-23E -04E -06E KK3S-04E -06E -08E -10E KK4S-06E -08E -10E -12E KK6S-12E -16E 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 15-2-76 5 S Couplers General Purpose Type Series KK Specifications K M Fluid Air/Water (Standard industrial water) KK2: 100kPa to 1.0MPa

rep-filter-e

Clamping position check pin 6. Restart and Air Discharge Latch 6-1. When restart the operation after the replacement of the element, follow the procedure of section 4 Operation. 6-2. When restart the operation, open the upper air relief port to discharge air. Clamping nut Fig. (c) V-band tightening Fig.

Industrial Filters Replacement Procedure

Clamping position check pin 6. Restart and Air Discharge Latch 6-1. When restart the operation after the replacement of the element, follow the procedure of section 4 Operation. 6-2. When restart the operation, open the upper air relief port to discharge air. Clamping nut Fig. (c) V-band tightening Fig.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

CLA

Lead wire entry Grommet [OA33(c): DINJ Grommet Grommet Grommet Response time 1.2 mS 1.2m$ 1 2 mS 1.2 mS Solid State Switch Type AUto switch model D-F59. 0-G59 D-F5P I D-GSP D-K39(C). D-J59. D-K59 D-J51 Wire type 3 W,re 3 Wire 2 Wire 2 Wire .. Output NPN PNP Application Relay, PLC Relay. PLC 24VDC Relay, AC A e~y.

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

Air Filter

C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port thread ty pe (5) Part No. thread ty pe (5) Part No. Rc Rc AD37-2-A AD37-D G G NPT AD37N-2(Z)-A NPT AD37N(-Z)-D Appearance and part No. Semi-standard: 6 Piping port thread ty pe (5) Part No.

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n i ( . n i M e l o h . a i D . t W ) f g ( . o N t r a P D L Q M 4 / 1 0 0 7 0 L R K 8 6 . 0 ) 2 . 7 1 ( 9 8 . 0 ) 5 . 2 2 ( 1 2 . 0 ) 3 . 5 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 8 / 3 0 0 1 1 L R K 9 8 . 0 ) 7 . 2 2 ( 0 1 . 1 ) 8 2 ( 6 2 . 0 ) 6 . 6 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 6 1 2 / 1 0 0 3 1 L R K 4 0 . 1 ) 5 . 6 2 ( 2 2 . 1 ) 1 3 ( 1 3 . 0 ) 8 . 7 ( 4 9 . 0 ) 4

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

VZ5000

DIN Rail Manifold Common SUP/Common EXH How to Order Type 45 (Non plug-in type) Applicable solenoid valve C D 45 05 C8 VV5Z5 G L M D VZ54Stations 4 (A), 2 (B) port size SUP/EXH block mounting position 02 2 stations Applicable blanking plate assembly VZ5000-65-2A One-touch fitting for 6 Symbol Position Applicable stations 2 to 10 stations D U C6 20 20 stations B 2 to 20 stations 2 to 10

Line filter

.: AMX-OMX0018-B PRODUCT NAME Line filter MODEL / Series / Product Number AFF20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AFF30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AFF40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

MGG

Nickel plated Nickel plated C type snap ring for hole 15 Guide Cylinder Series MGG 63 to 100/MGGF #3 !5 #9 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @1 @0 !9 !0 #2 $0 A' For ball bushing #5 @5 #0 @8 @6 !7 !0 @1 !3 #8 !2 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.