VDW

55.8 8.5 (6.3) 8 5 22 M5, 1/8 6 36 (27.6) 1 (IN) port M5, 1/8 2 (N.C.) port 1/8, 1/4 1/8, 1/4 2 (N.C.) port 1 (IN) port 2 x M3 x 5 2 x M4 x 6 15 12.8 Bracket assembly part no.

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

KR

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

Modular F.R.L. Units

Example) AL30-03B-R-A q w e r t q Symbol Description Body size 20 30 40 Nil N F Rc NPT G w Thread type + 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 e Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket r + Nil C Bowl Polycarbonate bowl With bowl guard a Note 2) Note 2) + Without drain cock With drain cock Drain cock with barb fitting (for 6 x 4 nylon tube) b Nil 3

SMC Pneumatic Clean Series

Rod side flange style (F) / CG1F, CG1F 10112122With rubber bumper 4-FD E-0.05 0 FT F FX0.15 (mm) B FT 6 7 7 8 50 63 80 100 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 B 40 44 53 61 E 12 14 18 25 Bore size 20 25 32 40 76 92 104 128 30 32 2 2 58 70 9 11 9 9 40 3 82 11 11 50 3 100 14 14 Note) End boss is machined on the flange for E.

MQQ

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

New

Test sampleVXFA21A (Port size 3/4) VXFA22A (Port size 1) VXFA23A (Port size 1 1/2)VXFA24A (Port size 2) VXFA25A, B (Port size 2 1/2) VXFA26A, B, C, D (Port size 3) VXFA27B (Port size 3 1/2) VXFA28B (Port size 4) Test sampleVXF21A (Port size 3/4) VXF22A (Port size 1) VXF23A (Port size 1 1/2)VXF24A (Port size 2) VXF25A, B (Port size 2 1/2)VXF26A, B, C, D (Port size 3) VXF27B (Port size 3 1/

Table of Contents

Double acting 10 Single acting, Spring return 7-2-2 7-2-3 3 Mini-free Mount Cylinder Series CUJ 4, 6, 8, 10 How to Order Bore size 4 6 8 10 4 mm 6 mm 8 mm 10 mm 10 6 D CUJ B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without auto switch D 10 CDUJ B 6 F8N S With

Fieldbus system Digital unit

Input signal assignment (EX600-DX B) Connector number 0 1 2 3 Connector position Pin 2 Bit 1 Bit 3 Bit 5 Bit 7 Input signal Pin 4 Bit 0 Bit 2 Bit 4 Bit 6 Input signal assignment (EX600-DX C ) Connector number 0 1 2 3 4 5 6 7 Connector position Input signal Pin 4 Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 Input signal assignment (EX600-DX D) Connector number 0 1 2 3 4 5 6 7 Connector

pa

Order SMCs Global Service Network 17-6-1 17-6-2 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Basic Type/Direct Mount Type

6@4 @6!0i q !4 !2 r CY3R6 @3 @7 o u y t @8 !9 @2 18a CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t !9 @2 18a CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 @2 @3 @5 @8 @7 o u !7 t 18a CY3R15, 20 CY3R15 Component Parts No. Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

center (A) 4 (B) 2 (A) 4 (B) 2 In common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

HRX-OM-W058

OptionOptional Accessories . 6-1 6.1 Option B [Earth leakage breaker] . 6-1 6.1.1 Option B [Earth leakage breaker] . 6-1 6.2 Option J [Automatic fluid filling] . 6-1 6.2.1 Option J [Automatic fluid filling] . 6-1 6.3 Option L [Large capacity tank] . 6-2 6.3.1 Option L [Large capacity tank] . 6-2 6.4 Option T [High-pressure pump]. 6-3 6.4.1 Option T [High-pressure pump] . 6-3 6.5 Option V

ZX

VJ10-20-4A-6 2 pcs. Ordering example) ZX1051-K15LOECN 1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

7ND9071en

(s) 6 0.3 18 1/4 6 mm or 1/4" 1.6* 1.6* 6 mm or 1/4" 1.0* 1.0* 9 0.6 37 1/4 6 mm or 1/4" 2.0 2.0 11 1.1 67 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm

Large Size Vacuum Module: Series ZR

Bracket B part no.: P3270154#1 (Standard accessory) Spacer B part no. : P3270157#1 Nozzle dia./1.8, 2.0 mm ZR1-W 18 20 2 2 Adapter B For port exhaust Ejector indication Rc 1/4 exhaust port (EXH.) Circuit diagram 2 EXH. Silencer EXH.

LEF-OM002xx

300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500

CE

9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.