PSxx-OMM0002CN

6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa

Electro-Pneumatic Proportional Valve Series VEF/VEP

Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(Refer to pages 15-6-3 to 15-6-5 for details.) 15-13-1

Clean Air Filter

How to order SFD 1 1 0 C08 Option Symbol Option Nil None B Bracket Port size Symbol C04 4 C06 6 C08 8 02 N02 F02 Connection size Clean One-touch fittings (KP series) Rc1/4 NPT1/4 G1/4 7 Document No.DOC1018377 4. Construction and Replacement parts SFD110-C** SFD110-*02* Component Parts No.

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

PFxx-OMO0004CN

7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

Dedicated Controller Series LC1 Uniaxial Type

(a combination of 1.2.4) Pro-No.bit1 BIT 2 Program designation < 1 > 5 Pro-No.bit2 (5) BIT 3 18 Pro-No.bit3 (18) STP-NO BIT 1 6 Stp-No.bit1 (6) BIT 2 19 Stp-No.bit2 (19) BIT 3 7 The terminal which designates the step to be executed. Used when executing steps (position movement). (a combination of 1. 2. 4. 8. 16. 32. 64.)

PSxx-OMT0005CN

-2No.PS-OMT0005CN-A / 1 1.5 *3) *3)1 1 [] -3No.PS-OMT0005CN-A () () () () -4No.PS-OMT0005CN-A () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMT0005CN-A * (Nm) R1/4 812 (50N () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMT0005CN-A * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMT0005CN-A 7 02 PSE57 / M12(3m) 5 (02MPa) L M12(3m) 6 (05MPa) N 7 (010MPa) (1~5V)

Table of Contents

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

1 !2 !3 !4 !5 !6 !7 !8 !

Auto Switch Guide

Water Resistant 2-color Indication Type P. 6-16-50 Band, Rail, Tie-rod, Direct Mounting With Timer P. 6-16-55 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 6-16-58 Rail Mounting Wide Range Detection Type P. 6-16-59 Band Mounting Made to Order Specifications P. 6-16-60 NCA D-X 20Data Technical Data 1, 2 P. 6-16-63 6-16-1 2 SMC Auto Switch

Applicable Auto Switch Model

Contact protection box OUT() Brown(Red) 12 10 8 15 16 9 12 6 6 20 25 32 40 50 63 80 100 125 140 160 Reed switch 13 CDJ2, CDVJ CDQ2 to 10 12 6 6 6 6 12 12 6 6 6 6 12 13 12 6 6 6 6 12 13 12 12 12 11 10 12 12 13 13 13 CD-P11 CD-P12 OUT( ) Blue(Black) B P CDXW 6 6 6 CDY1S CY1L RSDQ MDU CE1 MK, MK2 CXT 6 6 6 6 6 6 11 13 11 11 11 Note) qIn the case operation load is an inductive load. wIn the

PSxx-OMH0002CN

Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -6No.PS-OMH0002CN-D * () CE (FKM) * 2030 1 LCD * ()(), (ISE70 ) O -7No.PS-OMH0002CN-D ISE ISE ISE ISE ISE ISE ISE ISE 70 01 MPa 02 43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 L R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 4 2 . 1 ) 5 . 1 3 ( 3 3 6 1 . 1 ) 5 . 9 2 ( 8 3 . 1 ) 5 3 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 L R K 5 . 4 2 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 8 / 3 S 6 3 1 1 L R K 4 2 . 1 ) 5 . 1 3 ( 4 4 . 1 ) 5 . 6 3 ( 5 . 4 3 8 / 3 2 / 1 S 7 3 1 1 L R K 0 4 . 1 ) 5 . 5 3 ( 4 5 . 1 )

Air Cylinder

2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46 50 8 47 M6 x 1 6 50 Up to 300 301 to 1500

CL

1 !2 !3 !4 !5 !6 !

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

HRX-OM-Y098

to 3 .5-60 Setting of contact output signal 4 to 6 .5-60 5.4.11 How to set the IP address .5-66 5.4.12 Temperature waveform screen.5-66 Chapter 6 Alarm Notifications and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Operation of this product when an alarm occurs . 6-1 6.3 Troubleshooting . 6-2 6.3.1 Alarm contents, causes, and troubleshooting . 6-2 6.4 Other Errors . 6-5 HRL Series