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SUP/EXH block assembly mounting position Mounting position Symbol Stations SUP/EXH block assembly specifications D U D side U side 2 to 10 stations 2 to 10 stations Specifications Internal pilot specifications External pilot specifications Internal pilot/Built-in silencer External pilot/Built-in silencer Symbol Nil R S RS B 2 to 16 stations Both sides M Special specifications For special

One-touch Fittings

Revision History Correction of errors in dimensions Pages 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 18, 19, 20, 22, 24, 25, 26, 27, 28, 29, 38, 39, 41, 49, 52, 53, 60, 68, 70 Addition of proof pressure conditions Change of tightening conditions (Torque, Number of rotations) Addition of color cap Addition of made to order (White vaseline, Black body) Addition of Clean Series RS Number

Thermo-chiller Series HRZ Fluorinated Fluid Type

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc.

Series LECSB/LECSC/LECSS Absolute Type Series LECSA (Pulse Input Type/Positioning Type) Incremental Type AC Servo Motor Driver (Pulse Input Type) (CC-Link Direct Input Type) (SSCNET III Type)

signal connector Encoder connector USB communication connector Main circuit power supply connector Control circuit power supply connector CN1 CN3 CN2 6 5 5.5 LECSBm 40 135 (For LECSBm-S5, S7) 170 (For LECSBm-S8) 6 Mounting hole (Bearing surface thickness 4) 6 156 6 6 CN6 CN5 CNP1 Connector name Description CN1 CN2 CN3 CN4 CN5 CN6 CNP1 CNP2 CNP3 CN3 I/O signal connector Encoder connector RS

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Compatible Driver -@ type -# type Driver type Series LECYM LECYU Applicable network MECHATROLINK2 MECHATROLINK-3 Control encoder Absolute 20-bit encoder Communication device USB communication, RS-422 communication Power supply voltage [V] 200 to 230 VAC (50/60 Hz) Reference page Page 766 672

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Required flow rate Note 8) 2.6 gpm (10 L/min) 5.3 gpm (20 L/min) 6.6 gpm (25 L/min) 10.6 gpm (40 L/min) Inlet pressure range 44 to 102 psi (0.3 to 0.7 MPa) Port size Rc3/4 Wetted parts material Copper brazing (Heat exchanger), Stainless steel, EPDM, Silicone, Bronze, Brass Power supply 3-phase 200/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS

MIW/MIS

Double acting Solid state auto switch (3-wire, 2-wire) +1 0 Stroke tolerance mm Option Finger options MI8: Arrangement range 4 mm MI12: Arrangement range 6 mm MI20: Arrangement range 12 mm MI25: Arrangement range 15 mm MI32: Arrangement range 20 mm Standard, Tapped on upper and lower faces, Tapped on all faces (5 surfaces including end surface) RSQ Stroke adjuster (Rear end stroke only) RSG RS

Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type

How to Order Valve Manifold Assembly Internal pilot Internal pilot / Built-in silencer External pilot External pilot / Built-in silencer Nil S R RS Ordering example (SS5J3-60PD2-l) Double solenoid, individual wiring/lead wire length 300 mm (24 VDC) There is no need to enter anything when the SUP/EXH block mounting position M is selected.

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

10%6046Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)275UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)