Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing PP printing RQ 8150DN Printed in Japan. D-G
Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NZ printing RQ 8150DN Printed in Japan. D-G
Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4
-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MT printing MT 16400SZ Printed in Japan.
-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MT printing MT 16400SZ Printed in Japan.
Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2023 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.
Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved All specifications in this catlog are subject to change witout notice. Printed in Japan. 1st printing February, 2001 D-SMC.L.A. P-80 (JT) This catalot is printed on recycled paper with concern for the global environment.
With air cushion With rubber bumper GA WA GA E 0 0.05 E 0 0.05 (E1) (E1) TA (F1) ZZ + Stroke S + Stroke F TA (F1) ZZ + Stroke S + Stroke F (mm) Bore size (E1) E(F1) F GA S TA WA ZZ Rc NPT G Male thread Female thread 32 17 18 2 2 18 16.5 77 (85) 17 22 119 (127) 93 (101) 40 21 25 2 2 19 19 84 (93) 18 23 136 (145) 101 (110) 50 26 30 2 2 21 21 97 (109) 20 25 157 (169) 115 (127) 63 26 32 2 2 21
Rod End Nut Material: Rolled steel -03 32-01 -03 Applicable pin O.D. 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Bore size (mm) Part No.
(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.
Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside
Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing June, 2000 D-SMC.L.A. P-80 (D)
Example) Due to lhe common supply/exhaust fealure, nole that ditlerenl pressLrre rdnge colnbinalions are nol avarhbb. lfv00-03 .1 set (Manitold part number) I loption lfa DIN raillonger lhan the specilied shlions is required, specily the applicable shlions in l'&o digils ([/a]imumlO slations) Erample) llW0O05-07 I ot-lZ;r"f"* Tos.3-r"!"
Example) Due to lhe common supply/exhaust fealure, nole that ditlerenl pressLrre rdnge colnbinalions are nol avarhbb. lfv00-03 .1 set (Manitold part number) I loption lfa DIN raillonger lhan the specilied shlions is required, specily the applicable shlions in l'&o digils ([/a]imumlO slations) Erample) llW0O05-07 I ot-lZ;r"f"* Tos.3-r"!"
ITV0090-3MS2 sets (Vacuum regulator part no. (1, 2 stations)) ITV0090-3ML1 set (Vacuum regulator part no. (3 stations)) 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features.
OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.
Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing
Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NT printing NT 6000SZ Printed in Japan.
0 MPa 20 MPa 25.0 0 MPa 25 MPa Additional range USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure Display MPa kPa Pa kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum pressure -101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound pressure 100 kPa F0.1 0.001
36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4.5-6 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)