Smooth Cylinder/Low Speed Cylinder

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (L/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (L/min (ANR)) 260 390

VS 8-2/VS 8-4

N 1 1 N 5 W1 Size 01 02 Size 26 mm Size 18 mm CE compliant Nil Q CE compliant Stations 1 1 station Option Nil None 16 16 stations Special wiring specifications (Except double wiring) K Cylinder port size Direct exhaust with built-in silencer S Symbol 01 02 03 01B 02B Port size Side ported 1/8" Side ported 1/4" Side ported 3/8" Bottom ported 1/8" Bottom ported 1/4" Size 26 mm Size 18 mm

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Refer to page 4-14-3 for silencer for single valve unit. 4-14-17 18 Series VQZ Option Body Ported External Pilot Specifications Inch-size One-touch Fittings and Option Threads External pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.15 MPa or when valve is used

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 510.5 EXH port silencer Silencer is installd in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 2.10-17 Series VQZ Body Ported Option Inch Size One-touch Fittings and Optional Thread

Body Ported Type Vacuum Ejector ZH Series

One-touch One-touch 08 02 10 One-touch Screw-in One-touch 01 02 02 Screw-in Screw-in Screw-in ZH13DA09 11 11 One-touch One-touch One-touch 09 N02 11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch

Series VQ Base Mounted Metal Seal/Rubber Seal

Stations Cylinder ports 1 station 01 Port size Symbol 16 stations (1) 16 C3 C4 C6 M5 CM One-touch fitting for 3.2 Note1) Refer to p.1.10-198 for details.

20

Nozzle size Coil tube Fitting Blow gun Recommended system Distance S coupler TCU0604l-1-20-X6 KQ2H06-02S Up to 20 mm VMG1ll-02-01 KK4P-06H 1 TCU0604l-1-20-X6 KQ2H06-02S Up to 40 mm VMG1ll-02-02 KK4P-06H 1.5 TCU0805l-1-20-X6 KQ2H08-02S Up to 60 mm VMG1ll-02-03 KK4P-08H 2 TCU1065l-1-20-X6 KQ2H10-02S Over 60 mm VMG1ll-02-04 KK4P-10H 2.5 l: B (Black), W (White), R (Red), BU (Blue), Y (Y ellow

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

How to Order AMJ Metric size Applicable tubing size Metric size (Release button: Light gray) AMV Symbol Bore size Applicable model AEP B ZFC 0 02 05 Metric size ZFC05 ZFC10 ZFC20 02 23 04 06 08 2 3.2 4 6 8 HEP Made to Order B Inch size ZFC 1 05 01 Related X17 Metal case Equipment Refer to page 1115 for details.

LEC-OM071xx

Stop Method Mode After StopParameter When Enabled Classification ping n.00 [Factory setting] DB Coast n.01 Pn001 After restart Setup n.02 Coast Zero clamp n.1 Deceleration to a stop n.2 Coast A servomotor under torque control cannot be decelerated to a stop. The servomotor is stopped with the dynamic braking (DB) or coasts to a stop according to the setting of Pn001.0.

REC

(Refer to p.4.9-5) Caution Model Recommended SMC speed controller Caution Model Elbow Straight In-line REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC32 AS3201F-01-08-X214 AS3001F-08-X214 AS3201F-01-08-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 4.9-3 Be sure to read before handling.

AS

With One-touch fitting Port size M3 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Thread type M5 Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT AS U10/32 01 02 03 04 Nil ASP N ASN Needle Valve/Flow Characteristics AQ AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01

AS

VCHC AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 ASS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of

FILTER REGULATOR

G46-10-01 Rc G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G36-10-01 G46-10-01 G G36-4-01 G46-4-01 1 0.2MPa setting G36-10-01-L G46-10-01-L Rc G36-4-01-L G46-4-01-L 1 0.2MPa setting

FILTER REGULATOR

G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G G36-10-01 G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting Rc G36-10-01-L G46-10-01-L G36-4-01-L G46-4-01-L 1 0.2MPa setting

Fieldbus System

1 A, B port size q Series 3 SY3000 5 SY5000 7 SY7000 Nil Standard (0.7 MPa) B Quick response type (0.7 MPa) K* High pressure type (1.0 MPa) Thread piping Symbol Port size Applicable series M5 M5 x 0.8 SY3000 01 1/8 SY5000 02 1/4 SY7000 * Only metal seal type is available for high pressure type.

CLA

Cylmoer IS unlocked allln"le of shipment See page 9 lor notes and Instruc~ons 01 engagHlg lOCk unit.

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

VDW Series

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5