Electro-Pneumatic Regulator IT1000/2000/4000

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62 73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102

D. P. Lube ALD600/900 Series

The condition of the generation of micromist can be checked from the oil filler port. 2 2 Fluid Air 1.5 MPa Proof pressure Operating pressure range 0.15 to 1.0 MPa 0.1 to 1.0 MPa 0.03 to 0.1 MPa 0.05 MPa 102 L/min (ANR) Operating pressure differential range Recommended press. differential Note 3) Press. differential setting min. flow 2000 5000 2000 5000 Bowl capacity between levels (cm 3)

AS-FPQ/AS-FPG

Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page

AS-FPQ/AS-FPG

Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stainless steel linear guide (specially treated) 102 CX The specially treated linear guide achieves low particulate generation, high linearity and high precision.

Series: 3 (VFA3000), Stations: 10

Series: 5 (VFA5000), Stations: 10

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Manifold Type: 40 (Bottom Ported Common EXH), Stations: 10 Stations, Passage: 2 (Type 40), Port Size: 02 (1/4)

Piping: Base Mounted: Bottom Ported, Stations & Port Location: 10 Stations (Type 40), Port Size: Base Mounted M5X0.8, Thread: -

Piping: Base Mounted: Bottom Ported, Stations & Port Location: 10 Stations (Type 40), A, B Port: Base Mounted M5X0.8

Piping: Base Mounted, Stations & Port Location: 10 Stations (Type 40), Port Size: NPTF1/8

Series: VFA3000, Stations: 10, Thread: -

Series: VFA5000, Stations: 10, Thread: -

Manifold Type: Bottom Ported Common EXH, Stations: 10 Stations, Passage: Type 40, Port Size: 1/4, Thread Type: -

ZP

How to Order B01 H N 40 25 ZPX A18 J Mounting thread Pad diameter (mm) A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Pad type Buffer stroke (Rotating) H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 N S NBR Silicon rubber 100 Spring Force U Urethane rubber F Fluoro rubber 40 to 80 Pad diameter 100, 125 E EPR 6.9

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

d1 = d3 for sizes 20 to 40. A parallel keyway is used on the long shaft for size 40. Minimum machining diameter for d1 is 0.1 mm.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

d1 = d3 for sizes 20 to 40. A parallel keyway is used on the long shaft for size 40. Minimum machining diameter for d1 is 0.1 mm.