EX250-SDN1(-X102)_eng

SW1-1 SW1-2 SW1-3 SW1-4 SW1-5 SW1-6 MAC ID 21 (2) 22 (4) 23 (8) 24 (16) 25 (32) 20 (1) Caution 0 1 2 0 0 0 0 0 0 Communication connector Outline Dimensions 0 1 1 0 0 0 0 0 0 0 0 0 M12 5-pin plug A-code After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

66 141 101 OUT 60 201 6 16 121 86 IN 51 172 220 157 OUT 94 314 8 20 185 132 IN 79 264 Weight (g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 134 216 343 610 120 195 316 562 107 174 288 514 93 153 260 466 88 146 250 448 80 133 232 417 75 125 222 400 66 112 204 369 61 104 194 352 MXH6 MXH10 MXH16 MXH20 20

Turntable Cylinder Series MGT

25 30 36 109.5 121 130 147 13 5 33.5 31 216 251 165.5 192 186 218 5 Series MGT Auto Switch Specifications Applicable Auto Switch Models Applicable auto switches Electrical entry/Function D-Z7Z8 type Grommet Reed switches D-A9 type Grommet D-Y5Y6Y7P(V) type Grommet Grommet D-Y7 W(V) type Solid state switches (2 color indicator type, with diagnostic output) D-F9 type Grommet Grommet D-F9

High Vacuum L Type Valve

48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0003 6.

53

(including 4 M10 bolts) Note 10) Weight (dry state) kg Approx. 121 Note 1) Use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature and/or circulating fluid temperature is 10C or less. Note 2) Use fluid in condition below as the circulating fluid.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

81.5 93.5 CB 2 2 2 3 3 3 5 5 5 H 19 26 32 39 44 55 67 85 97 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50 12-CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121

CV/MVGQ

CV Standard Stroke MVGQ Bore size (mm) Standard stroke CC 10 15, 30, 45, 60 16 15, 30, 45, 60 RB Made to Order Specifications (For details, refer to page 10-21-1.)

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

A E DB Bore size (mm) Bore size (mm) AA E BD 75st, 100st Larger than 100st 37 57 63.5 64 75st, 100st Larger than 100st 50st 25st 50st 25st 50st 75st, 100st 25.50st Larger than 50st 25.50st Larger than 50st 25st Larger than 100st 114 134 160 180 25.50st Larger than 50st 147 168 188 93 63 80 100 63 80 100 41 45.5 46 118 142 162 106.5 115 137 172 198 233 20 25 30 16 160.5 171 208 29.5 18.5 21

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Table (1) Dd 5 5 10 15 L 21 25 35 47 Bore size (mm) MXH6 MXH10 MXH16 MXH20 -X IN port IN port (On both sides) 20Data Operating Precautions Stroke Direction Backlash Caution Caution 1.

5 Port Air Operated Valve Series VFA3000 1

VV5FA5 Specify the same manifold part number as VV5F5. To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number. VV5FA5-20-051 1 pc. VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

VFA3000

The remainder of the manifold part number is the same as an VV5F5. Specify the part number for the valve(s), blank plate assembly and manifold base. VV5FA5-20-051 .1 pc. VFA5120-03 .2 pcs. VFA5220-03 .2 pcs. DXT156-19-1A .1 pc.

VFA3000

VFRA VV5FA5 Specify the same manifold part number as VV5F5. To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number. VV5FA5-20-051 1 pc. VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

Passage: 21 (Top Ported Common EXH), Stations: 5 Stations Top Ported/Valve

Passage: 21 (Top Ported Common EXH), Stations: 7 Stations Top Ported/Valve

Passage: 21 (Top Ported Common EXH), Stations: 10 Stations Top Ported/Valve

Passage: 21 (Top Ported Common EXH), Stations: 15 Stations Top Ported/Valve

Passage: 21 (Top Ported Common EXH), Stations: 6 Stations Top Ported/Valve

Passage: 21 (Top Ported Common EXH), Stations: 8 Stations Top Ported/Valve

Passage: 21 (Top Ported Common EXH), Stations: 9 Stations Top Ported/Valve