Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

Green F-2815-081-NORYL - $0.50 F-2815-081-B80-NORYL - $1.35 F-2815-081-B85-NORYL - $1.35 .009 Lavender F-2815-091-NORYL - $0.50 F-2815-091-B80-NORYL - $1.35 F-2815-091-B85-NORYL - $1.35 .010 Lt.

SI Unit

F_Par_CRC i-Parameters There are no i-parameters in this product 41 No.EX##-OMY0011-A Appendix C: Checklists The checklists listed in this section provide support when carrying out the following tasks on the SI unit: planning, assembly and electrical installation, commissioning, parameterization, and validation.

HRX-OM-M005

CH1-03 CH2-03 RFGT High Press FLT Stop An insufficient amount of the circulating fluid is observed in the tank. CH1-05 CH2-05 Reservoir Low Level FLT Stop Fill the circulating fluid. An insufficient amount of the circulating fluid is observed in the tank. CH1-06 CH2-06 Reservoir Low Level WRN Continued Fill the circulating fluid.

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

4/5 Port Air Operated Valve Series SYJA3000 1

-03-M5 1 pc.

SYJA300

SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set (Ex.) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set The asterisk denotes the symbol for assembly.

Vacuum

Example) Due to lhe common supply/exhaust fealure, nole that ditlerenl pressLrre rdnge colnbinalions are nol avarhbb. lfv00-03 .1 set (Manitold part number) I loption lfa DIN raillonger lhan the specilied shlions is required, specily the applicable shlions in l'&o digils ([/a]imumlO slations) Erample) llW0O05-07 I ot-lZ;r"f"* Tos.3-r"!"

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH L-PIPING ADAPTERIS10L-20-D to IS10L-60-D Model IS10L-20-D Port size A B C D 1/81/4 28 77.6 60.1 42 1/81/43/8 31 85.6 64.1 53 1/43/81/2 39 93.6 68.1 71 1/23/4 47 96.6 69.6 71 1/23/41 62 106.6 74.6 90 IS10L-30-D IS10L-40-D IS10L-50-D IS10L-60-D -20- 11-5.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

VZ5000

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.