Stations: 10 Stations, Piping: P Common, R Individual, A Side, Thread: NPT, Option: -, CE/UKCA Compliant: -

Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 10 Stations, Passage: P: Common, EA,EB: Individual, Port A,B: Side, Port Size: 1/4, Thread: NPT, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Stations: 10 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 10 Stations, Passage: 3 (P: Common, EA,EB: Individual, Port A,B: Side), Port Size: 02 (1/4), Thread: N (NPT)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

Peltier-type Chiller Thermo-con/ Compact Type

Cooling capacity = Considering a safety factor of 20%, 93.3 W x 1.2 = 112 W Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density : 1 x 10 3

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Static moment M2 = m g (L1 + B) 103 m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.

1

Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

SMC Pneumatic Clean Series

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

SMC Pneumatic Clean Series

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

Digital Flow Switch For Air/Water Series PF2A/PF2W

Output mode Hysteresis mode ft3, ft3 x 103, ft3 x 106 CFM ON OUT2 is also the same.

CUJ

The range in the chart below that is delineated by bold solid lines indicates the relation between load weights and maximum driving speeds. 6 8 10 4 Bore size (mm) 0.05 to 0.5 Piston speed (m/s) 3.8 x 103 6.25 x 103 9.35 x 103 12.5 x 103 Allowable kinetic energy (J) 10 6 8 10 Load weight (kg) 1 4 0.1 0.01 0.1 1.0 0.01 Maximum speed V (m/s) 7-2-14 14 Series CUJ Specific Product Precautions

JXCx-OMT0001CN

. / . 100 16.2 . 101 16.3 . 102 16.4 . 102 16.5 . 103 16.6 . 103 16.7. . 103 17. . 104 17.1 . 104 17.2 . 107 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 -4No.JXC-OMT0001CN-C JXC93 Series 1. 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 6 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 16 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 42 (Individual Exhaust), Pilot Type: R (External Pilot), Stations: 3 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 9 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 14 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)