MXW

hexagon socket hole 2.5 J 12 6.5 MX MTS MY Width across flats 8 5H9 +0.030 depth 4.5 0 CY 6-M4 x 0.7 thread depth 6 (Helisert) 6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX 27 58 46 D-X (Y) 29 26 103 26 (Y) 20L 5H9 +0.030 depth 4.5 0 Data 10 15 15 K A 35

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

MXW Series Long Stroke Slide Table

only on B type(with shock absorber). 146 146 146 Long Stroke Slide Table MXW Series Dimensions MXW 12 Stroke: 100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

(mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70 5 111 103

EXxx-OMZ0016

(Wch: 120-127) Remote diagnostic information (Wch: 112-119) 19 Remote registration information (Wch: 8-15) Remote registration information (Wch: 1-7)*1 20 Remote registration information (Wch: 24-31) Remote registration information (Wch: 16-23) 25 Remote registration information (Wch: 104-111) Remote registration information (Wch: 96-103) 26 Remote registration information (Wch: 120-127)

MU

122 CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.

VXR21/22/23

) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60

XL

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

This is a legacy product, and replaced byVFN2120N-5DB-02N VFS2000 SOL VALVE 4/5 PORT. VALVE, NAMUR INTERFACE, S/SOL. VALVE. VFS2000 BODY PT 1/4NPT (F). 0.61729 lb. EA.

This is a legacy product, and replaced byVX3324-02N-5G1-B

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 7 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 5 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)

SI Unit: V (Mitsubishi CC-LINK System), Stations: 8 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)

Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)

This is a legacy product, and replaced byVQ4100-51-02N, VALVE, SOL, VALVE, VQ4000 VALVE, SOL 4/5-PORT, 2D, VQ4000 NO SIZE RATING, .59620 lb

This is a legacy product, and replaced byVFN2120N-5DZ-02N

This is a legacy product, and replaced byLVA20-02N-A-Z, FLUOROPOLYMER, VALVE, VALVE, FLUOROPOLYMER, .43347 lb

Series: 4 (10-SV4000), Enclosure: W10S (Tie Rod Base), SI Unit: 0 (W/out SI Unit), Valve Stations: 08 (8 Stations), P, E Port Location: B (Both Sides, 2-16 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: 02N (NPT 1/4), Mounting: D (DIN Rail Mounting w/DIN Rail)

Type: One-Touch Coupling Related Parts, Fitting Type: Other shapes, Tube Size 1(φ): -, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Shape: [Others] Nut, Applicable Product Part Number: KQ2E10-00N, KQ2E10-02N, KQ2E10-03N,KQ2LE10-00N