CM2 CM2 H L 40 F A J 150 Standard DM2 C H L 40 F A J C73 150 With auto switch Rod boot Without rod boot Nylon tarpaulin Heat resistant tarpaulin Bore size 20mm 25mm 32mm 40mm Air cylinder with auto switch 20 25 32 40 Number of auto switches S n J K 2 1 n Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switches.
, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) (mm) Ah9 D E G F C B A Model MK32-F MK40-F MK -F Model MKG32 MKG40 MKG50 MKG63 RHC 0 0.052 0 0.052 0 0.062 0.1 0.15 5.5 48 65 8 0.1 34 0.15 56 21 M6 x 1.0 5.5 54 72 8 40 62 28 M6 x 1.0 MK(2) 35 50 63 0.1 0.15 6.6 67 89 9 0.1 50 0.15 76 M8 x
/2 R 1/2 K K S S Exhaust port L L E H H E U U F F G G 2 P 2 P Port size Port size DIN terminal A D Q T J R Cable 6 to 12 S I K 24.4 1/2 Exhaust port (44) U F G1/2 L H E Port size 2 P G Dimensions (mm) Model Port size P A D E F G H I J K L S VXF25A< VXF26A< 2 1/2 3 182 206 92 102 212 247 47 63 117.5 119 141 176 18.6 18.6 78.4 78.4 59.8 59.8 24 24 30 30 Grommet Grommet (with surge voltage
D-X Individual -X Technical data 853 Hygienic Design Cylinder Round Type 20, 25, 32, 40, 50, 63, 80, 100 Series HYB How to Order 20 R 50 F HYB 20 R 50 F H7BAL HYDB With auto switch Number of auto switches With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.
Table roll deflection arrow A due to static roll moment applied at arrow F when Lr=(see table) and table is retracted. Deflection on A when the load is applied at F. Deflection on A when the load is applied at F. Deflection on A when the load is applied at F.
Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.
H 6 Bottom through-hole 4.2 5H9 + 0.030 0 depth 4.5 F E 5H9 + 0.030 0 depth 4.5 (mm) Z J H G F E Model MXW12-50 205 84 35 50 88 58 MXW12-75 230 89 40 55 103 63 Note) Stopper bolt Y shown in the section above is attached only on B type (with shock absorber). 158 Series MXW Air Slide Table MXW12/Stroke: 100, 125, 150 mm Operating port 2 x M5 x 0.8 Width across hexagon socket hole 2.5 J 12
x 103 1.02 0.93 x 103 Temperature 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18
M1 = F x L F A F F A L L L Opposite port side Guide central axis (single axis type) Port side For the dual axis type, this is the cylinder's central axis.
Note 2) Dimensions E and F are 7 mm longer for the auto switches with connector (D-A7lC, A80C, J79C).
AFF Select accessories sold separately. 6 Refer to page 103.
Bellows seal C Double acting Bellows seal F Single acting (N.C.)
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit
103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit
Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.
Description AC servomotor Lead screw High rigidity direct acting guide Coupling Bearing R Bearing F Body A Table Housing A Housing B Top cover No.
Controller and Peripheral Devices / Specific Product Precautions . 100 16.1 Design and selection . 100 16.2 Handling Precautions . 101 16.3 Mounting . 102 16.4 Wiring . 102 16.5 Power supply . 103 16.6 Grounding . 103 16.7 Maintenance . 103 17. Troubleshooting . 104 17.1 Operation Errors . 104 17.2 Position / Speed problems . 107 Supplement 1.
Controller and Peripheral Devices / Specific Product Precautions 101 14.1 Design and selection . 101 14.2 Handling Precautions . 101 14.3 Mounting . 103 14.4 Wiring . 103 3 No.SFOD-OMT0010-B 14.5 Power supply . 104 14.6 Grounding . 104 14.7 Maintenance . 104 15. Troubleshooting . 105 15.1 Operation Errors . 105 15.2 Position / Speed problems . 108 Supplement 1.