6Element mounting bracket 16-1 16-2 16-3 472 Series FGB Replacement Procedure of Element 2 4. Method for Removal of Element Assembly 2. Overhaul 2-1. If the differential pressure rises due to clogging and reaches the threshold for element replacement (0.1 MPa), replace the element with the new one. 2-2.
Pressure Do not use the product in the vacuum state which is substantially different from the atmospheric pressure (above sea level) and in the atmosphere under being pressurized. 2. Using inside a clean room Do not use the product in a clean room, as it could contaminate the clean room. Caution 1.
Do not drop or bump. Do not drop, bump or apply excessive impacts (1000m/s or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.
Do not mount the product in locations where it is exposed to radiant heat. 5. Do not use in dusty locations or where water, oil, etc., splash on the equipment. 6.
Do not mount the product in locations where it is exposed to radiant heat. 5. Do not use in dusty locations or where water, oil, etc., splash on the equipment. 6.
Communication example Slave Address : No.1 Read 16 pieces data from register 0030h.
Do not use the AC adapter for the DC power supply of a different product.
2.36 1 15/16 9/32 2 1/4 4 3/4 9/16 3/8 5/8 1 1/4 7/16-20 1 1/8 1 1/8 5/16-24 5/16-18 200 (2) 3/4 2.6 3/8 2 1/2 0.3 1.26 1.06 1 1.71 5/8 3 5/8 2.4 1 15/16 7/16 2 1/4 4 3/4 9/16 3/8 7/8 1 1/2 7/16-20 1 1/8 1 1/8 5/16-24 3 3/8-16 1 1/4 250 (2.5) 3/4 3.1 3/8 0 1.3 1.06 1 1.75 5/8 3 3/4 2.48 1 15/16 19/32 2 3/8 4 7/8 9/16 3/8 1 7/8 325 (3.25) 1 1/8 3.9 1 1/2 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1.18
Do not wire with power lines or high voltage lines. Wire separately from power lines or high voltage lines, avoiding parallel wiring or wiring in the same conduit with these lines. Control circuits, including switches, may malfunction due to noise from these other lines. 5. Do not allow short circuiting of loads.
Do not use in an area where a magnetic field is generated. Trimmer auto switches will malfunction or magnets inside actuators will become demagnetized. 2. Do not use in an environment where the trimmer auto switch will be continually exposed to water.
to 40 16 to 40 10, 16, 20 16 to 40 16, 25, 40 16, 25, 40 16, 25 16 to 50 16, 25, 40 6 to 25 10 to 25 25 12 to 40 20 to 32 10, 15, 25 12 to 25 Vol. no.
Our pressure switches do not have an explosion proof rating. Never use in the presence of an explosive gas as this may cause a serious explosion. 3. Do not use in an environment where static electricity can cause problems, otherwise system failure or malfunction may result. 1. Do not drop, bump, or apply excessive impacts (980 m/s2) while handling.
8, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 20 95 100 105 110 D-Y7BA n (n = 2, 4, 6, 8) Note 1) 20 + 45 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 95 + 45 (n 4) 2 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note
90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 15 + 40 n = 2, 4, 6, 8 n n = 4, 8, 12, 16 2 (Different sides, Same side), 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 (Different sides, Same side), 1 20
90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 15 + 40 n = 2, 4, 6, 8 n n = 4, 8, 12, 16 2 (Different sides, Same side), 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 (Different sides, Same side), 1 20
16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 Refer to "Dimensions" of MXS 16 on p.3.11-19 for one with shock absorber as symmetric.
Do not grip the piping port on the back side or the handles of the panel. 3. Do not pass over bumps etc. with the casters.
Metal stopper screw L Shock absorber 8-9-16
Applicable filter model Set description Spare element O-ring for cover I-68S-A I-62S-A I-63S-A Element size (mm) 6 x 4 x L25 12 x 8 x L20 16 x 12 x L25 ZFC05 ZFC10 ZFC20 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. Note) Spare elements and O-rings for the cover (Applicable filter: ZFC10, 20) are sold in sets of 10 pieces each. *Do not wipe with alcohol, etc.