ZX

(PE port) 70 11.5 17.5 17 38 35.4 28 25 5.8 5.4 8 26 Circuit diagram 2-3 1 47 5 3 1 M5 (or M6) (A port) Air supply release port 1 M5 (or M6) (PV port) Air supply pressure port (Mounting hole) 79.1 Normally open 60.1 23 7 1 20 21.6 10 8 Manual override (Push and turn the locking type override) 2-3.6 Bracket C Standard accessory (Mounting hole) Supply valve M5 (or M6) (D port) Vacuum release

Environment

radius [mm] (Reference values) 20 20 17 17 Weight (g) Note 1) Refer to Best Pneumatics No. 2-1 for solid state auto switch common specifications.

Series KC Self-seal Fittings

M5 Part No.

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

240

8 4 x M5 x 0.8 Depth 11 2 x M5 x 0.8 Cylinder port MXJ 4 x M5 x 0.8 Depth 8 6.5 34 6 MXP 24.5 34 63.5 64.5 MXY MTS 32 7 32 7 34 6 6 NS 52.5 + Stroke 68 + Stroke 32 20 11 15.5 20 15 10 + Stroke 15 4 x M5 x 0.8 Depth 8 20 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

CE

Width across flats 8 5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12 Stroke 4-4.5 (Positioning pin hole) 40 5.5 13 25 6 RE A B +0.05 +0.02 4 REC CX 66 54 CY MQQ

Stroke Reading Cylinder and Counter

Without connector + 0.05 + 0.02 4 depth 4 (Positioning pin hole) ML2B 4 45 4 x M5 x 0.8 Thread depth 10 6 Metal connector M14 x 1 4 x M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 5 Width across flats 8 70 0.5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 27 40 17 5 67.5 14.5 4 x M4 x 0.7 2 x M5 x 0.8 Thread depth 7.5 71.5 (Port size) 103

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5 14 17 20 22.5 28 33 42 48 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50 12-CY3R63 3.5 4.5 6 7 6.5 8.5 11 15 16 P (Piping port) Model Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8

CE

Local Area: (800) 258-9200-www.stevenengineering.com 6 Metal connector M14 x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 12 High Precision

ASD

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 12.9 17.5 29.4 12 25.5 28.6 25.8 28.3 9.6 10 7.8 11.7 M5 X 0.8 8 25 22.2 6 ASD230F-M5-06 11.6 13.7 20.6 32.5 13 34.6 39.6 6 14 ASD330F-01-06S 11.6 13.7 22.9 29 38.5 36.1 31.1 14.2 11.8 10.6 R(PT)1/8 12 32.1 27.1 15.8 33.9 38.9 8 ASD330F-01-08S 15.2 18.5 28.2 31 44.8 6 ASD430F-02-06S 12.8 17 25.2 53 43.5 18 8 36.7 ASD430F-02-08S

CE

+0.05 +0.02 4 45 6 Metal connector Made by TAJIMI R04-J8M7.3 M14 x 1 4-4.5 through 7.5 counter bore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 38 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7 2-M5 x 0.8 (port size) 71.5 103 + Stroke 24 127 + Stroke 2 5 High Precision Scale Cylinder Series CEP1 Foot type 4-4.5 CEP1L12

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

MY2

x 0.8 1/8 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1

Dual Speed Controller with One-touch Fitting Series ASD 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 29.4 12 17.5 12.9 25.5 28.6 25.8 10 9.6 7.8 11.7 M5 x 0.8 28.3 8 25 22.2 6 ASD230F-M5-06 11.6 32.5 13 13.7 20.6 6 34.6 ASD330F-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 11.8 14.2 10.6 R 1/8 12 32.1 27.1 15.8 8 33.9 ASD330F-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430F-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430F-02-08S 36.7 41.7

MLU

22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 11 12 22 25 25 25 25 17 17 22 30 35 35 38 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 M8 x 1.25 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M20 x 2.5 M22 x 2.5 19 26 21 34 37 44 50 56 66 M5 x 0.8 1/8 1/8 1/4 1/4 1/4 3/8 86 107 120 138 150 171 198 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 25 30 36 45 55 68 87 21 24 30 36 46

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

MQQ

M5 x 0.8 M6 x 1 45 + Stroke 9 RB 7.5 50 + Stroke 8 to 11 M3 x 0.5 65 + Stroke M4 x 0.7 7 J Anti-lateral load type: MQQL (Built-in ball bushing type) 70 + Stroke 5.5 80 + Stroke 8 13 to 17 M5 x 0.8 M6 x 1 D6.5 85 + Stroke 105 + Stroke 7 -X : Stroke 20Data 10-5-11 11 Series MQQ Dimensions Basic style (Through-hole and Both ends tapped common): MQQTB 10, 16, 20 H thread effective depth C 2-