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Table 3-10 Setting list of the external switch Display Item Initial value (Default setting) Example Reference page Category Communication mode LOC LOC Contact input signal 1 RUN SW_A Contact input signal 1 type ALT ALT Contact input signal 1 delay timer (time delay) of reading 0 0 Contact input/output communication Contact input signal 1 OFF detection timer 0 2 5.20 Communication setting

40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.

40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.

40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.

0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3

Set temperature 40.0 oC (104.0 oF) (-)2 5.0 to 55.0 oC (41.0 to 131.0 oF) Circulating fluid Monitoring method AL03 discharge temp. 0 0 to 3 rise Monitoring start timer ---(0)3 0 to 600 minutes Range over detection timer 5 5 to 999 seconds 1: Values in F are displayed when SE12 is set to F. 2: Default value when AS03 is set OFF. 3: Default value when AS21 is set to either 2 or 3.

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

0.00 0 20 40 60 80 100 0 50 100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200

-Trunnion mount;i *Auto switch can not be Installed With Rod end thread F Flange mount 90L-0-90U3m lead wire) L Foot mount 97--D-97(0.Sm lead wire) 0---Clevis mount '" I . 97l-D-97L(3m lead wire) CleVIS or trunnion mount Nil With thread J B -Without thread Bore Size.-6-6mm 10-10mm 1 Action 15--15mm 0 Double acting Siroke(mm) 00---6 5,10,15,20 105,10,15,20,25,30 15--5,10,15.20,25.30 Series

0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 Supply pressure [MPa] Suction flow rate [L/min (AMR) ] The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow of the ejector.

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

0 u !0 !2 w y r !0 e PF2A Number Parts Material 1 New PFA Body PF3W 2 New PFA Sensor 3 Super PFA Tube LFE 4 PPS Housing A 5 PPS Housing B PF2D PF2D 6 PPS Housing C 7 POM Bushing IF 8 PPS Cap 9 FKM Gasket !1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

40.7 18 1.5 36.7 AS22 0-N02-ST NPT 1/4 17.5 NPT 1/4 AS32 0-02-ST Rc 1/4 19 22.5 R 1/4 AS32 0-F02-ST PF 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4 NPT 1/4 AS32 0-03-ST Rc 3/8 19 22.5 R 3/8 AS32 0-F03-ST PF 3/8 24.3 9.5 30 53.7 20.8 1.5 47.7 AS32 0-N03-ST NPT 3/8 NPT 3/8 AS42 0-04-ST Rc 1/2 24 27.5 R 1/2 AS42 0-F04-ST PF 1/2 28.5 12 38.5 63.8 26.7 1.5 55.8 AS42 0-N04-ST NPT 1

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

0 u !0 !2 w y r !0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

cfm 0.874.2 cfm 0.218.6 cfm 3 0999,999,999 ft 0.1 cfm 3 1 ft 3/pulse 1 ft 3/pulse 0.1 ft -0.918.6 cfm -1.837.1 cfm -3.674.2 cfm (-0.20.2 [ 0]) (-0.40.4 [ 0]) (-0.80.8 [ 0]) 3 0999,999,999 ft 0.1 cfm 3 1 ft -28No.PF-OMS0001CN-A [F 1] OUT1 OUT1 ( )OUT2 H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) 0 ON 0 OFF () 0 ON 0 OFF () -29No.PF-OMS0001CN-A ( )OUT2 3 3 3