Plug-in/Plug Lead: Single Unit

w q w e VQC SQ VQ0 VQ4 VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A)

Large Size Vacuum Module: Series ZR

Example) ZR1--CN(-Q) . 1 pc. ZS-10-5A-50 . 1 pc.

HRX-OM-W038

AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2. AL.01 Contact output 3 function Sets output signal function of contact output 3.

HRX-OM-O021

AL.01 Contact output 3 function ALM Contact output 3 operation B Selected for contact output 3 AL.01 5.2 Function HRS Series 5-6 HRX-OM-O021 Chapter 5 Display and setting of various functions 5.3 Main screen 5.3.1 Main screen Displays the current temperature and the set temperature of the circulating fluid.

AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Zinc alloy Body A w Brass Handle Electroless nickel plated e Brass Body B Electroless nickel plated r Brass Needle Electroless nickel plated t Brass Needle guide Electroless nickel plated y Brass Seat ring (1) Electroless nickel plated(3) u Brass(2) Lock nut i U seal NBR o O-ring NBR !0 O-ring NBR !1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

VFM300

NPTF NPT Push button (Mushroom) Push button (Extended) Push button (Flash) Twist selector (2 position) Key selector (2 position) SA Body option VA Internal pilot style 1 0 External pilot style Construction VM/VR VH Non-actuated Actuated Component Parts q Description No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

VFM300

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-48 5 Port Mechanical Valve Rubber Seal Series VFM300 How to Order S 01 02 0 VFM35 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 1 4 Roller lever 01 Black NPT N02 1 4 One way roller lever

C95Series

lOre mentioned above 8'8 1 00 same as standard port locatIon C95 Standard part number l-xC3 j B f@] Location 01 pons and cushion val\les On rod cover and head CO\lfH.

AK1000

Refer to gauge guide (P.94,95). t t r w w w q q q Sample Order Number Port t r q 4 4 4 4 4 w 4 4 4 4 4 AK1002S e 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA w w q q 1 2) Pressure gauge unit MPa or psig/bar selectable.

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Motion controller Q series Programming Manual (COMMON) (Q173D(S)CPU/Q172D(S)CPU) (IB-0300134) "4.11.1 Connect/disconnect function of SSCNET communication" MELSEC-Q QD77MS Simple Motion Module User's Manual (IB-0300185) "14.12 Connect/disconnect function of SSCNET communication" MELSEC-L LD77MH Simple Motion Module User's Manual (IB-0300172) "14.13 Connect/disconnect function of SSCNET communication

LEC-OM07605CN

. ## ## 01 1 64 64 2. *** 3.

AZ1000

Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port r q FV4 FV4 FV4 AZ1001S e w FV4 FV4 FV4 2PW 3PW 4PW 2PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

LX Series Compact Electric Actuators

Power Connector Molex lnc. part numbr 39-01-2180 (receptacle), 39-00-0039 (pins).

VQ4000

Direct exhaust with silencer box: Exhaust from both sides (F/L kits only) Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust Enclosure IP65 (Except F kit) (2) (2) 01 1 station Stations Note 1) When two or more symbols are specified, indicate them alphabetically. Example) -CDK Note 2) Combination of [C ] and [S ] is not possible.

IS1000

0 IS1000 No. q w e r t y u i o !