42

/(sbar)] 12 12 12 VQC 4/5 1 4/2 (P A/B) b 0.33 0.33 0.33 Cv 3.4 3.4 3.4 2-position rubber seal VQ5 1 201 VQZ C [dm3/(sbar)] 16 16 16 4/2 5/3 (A/B EA/EB) b 0.33 0.33 0.33 SQ Cv 4.4 4.4 4.4 Note) For port size 1/2 VFS Manifold Options VFR Blanking plate assembly VVQ5000-10A-5 Individual SUP spacer VVQ5000-P-5-03 04 Individual EXH spacer VVQ5000-R-5-03 04 EXH block plate VVQ5000-16A-2 (1

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

type> (Lead wire length) 75.4 [82.4] Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 73.6 34.5 15.5 17.5 29.5 29.5 44.5 [1(P), 5(EA), 3(EB) port] 3/8, 1/2 96.5 L plug connector (L): M plug connector (M): DIN terminal (D, Y): 10-SY9140(R)-WO03 04 M8 connector (WO): D Y 10-SY9140(R)10-SY9140(R)-M10-SY9140(R)-L03 04 03 04 03 04

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-03 ASG521F-03 ASG620F-04 ASG621F-04 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1000 25 15 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 1500 Effective area (mm2) Effective area (mm2) 20 10, 12 10 08 1000 15 500 10 5 500 5 0 0 0 0 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) 2 Stainless Steel Speed Controller Series ASG Construction Elbow type

F

8 KQR04-08 10.4 36.5 18.5 16 5.6/5.6 5/32 6.3(1/4) KQR03-07 11 36 19 16 3 4 10 KQR04-10 12.8 39.5 18.5 16 5.6/5.6 3/16 6.3(1/4) KQR05-07 12 39 22 16.5 3.5 6 4 KQR06-04 12 37.5 21.5 17 4/4 3/16 8(5/16) KQR05-09 12 38 19.5 16.5 3.5 6 8 KQR06-08 12.8 37 18.5 17 13.1/13.1 1/4 8(5/16) KQR07-09 14 41.5 23 17 4.6 6 10 KQR06-10 12.8 39.5 18 17 13.1/13.1 1/4 9.5(3/8) KQR07-11 14 40 20 17 4.6 6 12

smcmaintenancepartslist

Contents Bore size (mm) Seal Kit List Description Material Note No. 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR Gasket A NBR Gasket B NBR Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4

reduces flow setting time

, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Metric size Inch size 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 3.2 4 6 8 10 12 With One-touch fittings Stainless steel specifications (Stainless steel 303) Use 1/8" tube. Made to Order Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 Ex.) AS1001FG-04-X12 Ex.)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

size Rc1/ 2 Manifold Options Individual SUP spacer VVQ5000-P-5Blank plate assembly VVQ5000-10A-5 Individual EXH spacer VVQ5000-R-5EXH blocking plate VVQ5000-16A-2 03 04 03 04 Throttle valve spacer VVQ5000-20A-5 SUP stop valve spacer VVQ5000-37A-5 SUP blocking plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-5 PUSH LOCK Direct exhaust with silencer

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Modular Design with Uniform Body Style

5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

button: White color) 2, 3.2, 4, 6, 8, 10, 12 Inch size (Release button: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS321F-02 AS331F-02 R1/4 AS321F-03 AS331F-03 R3/8 AS421F-04 AS431F-04 R1/2 Note 1) AS121F-M5-02 applicable cylinder bore sizes are 2.5, 4, 6.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

KR

KRY P. 4 KRV KRE P. 5 P. 3 Use to connect tubes through a panel. Spatter cover Spatter cover Plug Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. P. 5 KR P. 5 KRC1 KRP P. 5 Use to plug unused One-touch fittings.

Secondary Batteries

(P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

AS-FG/ASD-FG

Type Applicable tube outside diameter Metric size Inch size 2 3 Elbow Universal 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 Control method 0 1 Meter-out Meter-in With One-touch fittings Use a 1/8" tube.

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

VEX1

VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

ZP

4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 13.5 15.5 5 7 1.8 2.5 ZP N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 14.5 16.5 5 7 1.8 2.5 13.5 15.5 5 7 1.8 2.5 ZCU 14.5 16.5 5 7