, Length: 4.29 in / 109 mm, Width: 2.4 in / 61 mm, Height: 3.27 in / 83 mm, Net Weight: 2.09 lbs. / .95 Kg Series Configured Datasheet.

0.4

Front matter 1 Metal Seal/Rubber Seal 5 Port Solenoid Valve Plug -in Contents Plug Lead SQ 1000 Plug-in Unit Valve Specifications P.9 Manifold Specifications P.10 Manifold Option Parts P.42 How to Increase Manifold Stations P.56 Construction P.61 Manifold Exploded View: SQ1000 P.63 Manifold Spare Parts: SQ1000 P.64 Manifold Exploded View: SQ2000 P.65 Manifold Spare Parts: SQ2000 P.66 SQ 2000

60

Grommet Conduit DIN terminal Conduit terminal L VXK21l0 VXK22l0 VXK23l0 I J 40 43 46 I J 58.5 61.5 64 I 44 53 59.5 J 46.5 49.5 52 K (92) (95) (98) I 44.5 53.5 60 J K L 30 33 36 I J 48.5 51.5 54 I J 65.5 68.5 71 I 44 53 59.5 J 53.5 56.5 59 K I 43 52 58.5 J K VXK21l2 VXK22l2 VXK23l2 2, 3, 4.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 52 61 67.5 43 52 58.5 19.5 22.5 25.5 44.5 53.5 60 (61) (129) 48 57 63.5

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

M Body Size Model A B C D E F G H I J K L M N ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 15.5 14.4 8.5 50 15 12.5 24 17.5 26 53 22.5 48 Metric size Inch size Collar part arrow 15.2 6 8 17.5 16.6 9.5 61 16 13.5 27 19.5 28 65 24.5 52 Transparent cover 57 8 10 18 18.5 11 21.5 65 29.5 21 17 69.5 27 14.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 19.7 17.7

Free Mount Cylinder for Vacuum Series ZCUK

) 81 (91) 87 (97) 93 (103) 10 103 (128) 163 (193) 115 (145) 127 (157) 139 (169) 151 (181) 16 180 (214) 300 (340) 348 (388) 396 (436) 204 (244) 228 (267) 252 (292) 276 (316) ZC(D)UKC 20 577 (636) 655 (714) 304 (358) 499 (558) 343 (402) 382 (441) 421 (480) 460 (519) 25 514 (587) 814 (892) 934 (1012) 1054 (1132) 574 (652) 634 (712) 694 (772) 754 (832) 32 49 (54) 69 (79) 53 (63) 57 (67) 61

Cylinder with Lock/Double Acting, Single Rod Series CLS

Contents Bore size (mm) CS1N125A-PS CS1N140A-PS CS1N160A-PS 125 140 160 180 200 250 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N250A-PS ^0 61 ^2 ^3 ^4 ^5 66 ^7 68 Wiper ring Cushion seal Set of left nos. ^0, ^2, ^3, ^4, ^5, ^7 Rod seal CS1N200A-PS CS1N180A-PS 61, 66 and 68 are non-replaceable parts, so they are not included in the seal kit.

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Soft Start-up Valve AV2000/3000/4000/5000 1

PPA AV5000 AL Large effective area (mm 2) With supply/exhaust function by manual operation AV2000/ 20 (Body size: 1/4) AV3000/ 37 (Body size: 3/8) AV4000/ 61 (Body size: 1/2) AV5000/ 113 (Body size: 3/4) AV5000/ 122 (Body size: 1) Low power consumption Connectable with modular type F.R.L. combination unit Combination with F.R.L. unit F .R.L. combination Soft start-up valve AC20 AC25 AC30

Model Selection 1

Manifold 1/8, 1/4 Pilot operated Diaphragm opeation with zero differential pressure 17-3-61 VXZ22/23 N.C./N.O. 10, 15, 20, 25 Single unit 1/4 to 1 0 to 1 Pilot operated (High pressure control) 17-3-69 VXH22 N.C. Single unit 1/4 to 1/2 0.05 to 2 10 Solenoid valve 2 port Pilot operated (Quick response, Instantaneous high flow) 17-3-71 VXF21/22 N.C.

VDW

PAX PB Lined Up by Compact Design 28 2 Port 3 Port 17 20.5 28 20.5 VDW10 VDW20 VDW30 VDW200 VDW300 17-2-61 2 Series VDW Precautions Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions.

VXP21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size Mounting hole Conduit terminal: T P Port size Rc VXP2140 Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Seal Series SYJ3000 Model (1) (2)(3) Weight (g) Configuration Port size Effective area mm2(Cv) Valve model L/M plug connector Gromet Single 35 51 SYJ312l SYJ322l SYJ332l SYJ342l SYJ352l SYJ314l SYJ324l SYJ334l SYJ344l SYJ354l SYJ313l SYJ323l SYJ333l SYJ343l SYJ353l 33 2 position Double 47 0.9 (0.05) 5 port Body ported Closed center M3 X 0.5 54 50 Exhaust center 3 position Pressure center 61

VHK

15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2 16 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-08F-08F 26.2 18.7 9.7 VHKl-10F-08F 22 10 8 10 46 58.5 61

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Station Dimensions n L 11 12 13 14 15 16 17 18 19 28 20 39 31 50 42 61

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP) port 46.5 L plug connector (L) M plug connector (M) Cover dia 1.5 Cross section 0.23mm2 (Lead wire) 66(71) 300 (Lead wire) Indicator light 300 61

XL

size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K P (L) 15 G(PF)1/2 B (XSA V) Spacer (mm) ( ) are VCR type Bs B Grommet Conduit Terminal E A F C D Model Swagelok type K 81 91.5 97 97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61

Air Suction Filter With One-touch Fittings Series ZFB 1

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201

Multistage Ejector Series ZL112/212 1

End plate e Body r Vacuum sensor unit t Nozzle y Diffuser u Other than vacuum switch P397110 Detent plug i Vacuum switch specifications P397176 Lead wire cover 13-7-11 12 Series ZL Dimensions: Series ZL212 Pressure supply port Rc 1/8 Vacuum port Rc 3/4 Exhaust port 76 P Standard ZL212 40 V 54 125 Label 188 61 P Port exhaust ZL212P V Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Air Pilot Operated

Operator Buna N 10 Recssed Non-Lockihg OPeralor PB 0103 61 l Scrws' Pilot Covers (4) Hold Down Bolt (8.32 x 1 Y'!')

Vacuum

46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm. (Check leakage) 1 1 0 lP[ $enles tl|lillrout Bulhn 0imens Pad Diameters s20. s25. o32 Pad Diameters a4O' s50 Flat type Flat type Deep typeZPR25D only oeep tydizPR4oD only Flat type. Flat with rib Flat type .