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Manifolds . . . . . . 9 Ebows & L-Tees . . . . . . . . . . . . . . . . . . . 9 Reducing L-Tees . . . . . . . . . . . . . . . . . . 9 Tees and Reducing Tees . . . . . . . . . . . 10 Combo Tees (3 branches) . . . . . . . . . . 10 V-Tees . . . . . . . . . . . . . . . . . . . . . . . . . 10 Male Nipples with tube branches . . . . . 10 1/8 NPT Male manifolds . . . . . . . . . . . . . . 19 1/8

Plate Cylinder

(mm) Dd9 m L d t l Part no.

VS7-6

America C8 Note 1) C10 Note 1) Note 1) Side ported only 1.19-33 VS7-8 Manifold Exploded View VS7-8 D side end plate assembly Manifold block assembly U side end plate assembly < End plate assembly > AXT512 A AXT512 1A E E End plate position P, R port size Cylinder port position Wiring specification L side R side L R 1/2 3/4 12 One-touch fitting 04 06 C12 L side R

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

SMC Pneumatic Clean Series

40 150 A H7B 21 C D M 2 L 40 150 A H7B Number of auto switches Mounting style Basic style Axial foot style Rod side flange style Head side flange style Boss-cut basic style Boss-cut rod side flange style B L F G BZ FZ 2 pcs. 1 pc.

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

CV/MVGQ

Without auto switch L 16 60 5 L CVJ5 L 5 L J79W 16 60 CDVJ5 With auto switch Number of auto switches Rod extended/retracted when energized Built-in magnet 2 pcs. 1 pc. n pcs.

C85

Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 Data Lateral load applied to the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40)

C85

Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 Data Lateral load applied to the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40)

Plate Cylinder with Lock Series MLU

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

IZx-OMV0005

The ionizer, L-bracket or DIN rail bracket should be ordered separately.

REC

Stroke (cm) Mounting style Applicable max. stroke according to buckling strength 1000 900 800 700 600 500 400 REC40 Operating pressure (MPa) RE A B REC32 Mounting bracket symbol and figure Symbol REC REC25 REC 300 Load weight M (N) 25 32 40 20 REC20 200 Rod side flange style: F Head side flange style: G CX 39 50 56 61 0.3 Foot style : L L 100 30 38 43 47 0.5 W W W CY F 50 24 31 36 39 0.7

C76

: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange

SMC Pneumatic Clean Series

16 60 H7B 21 C D J 2 W L 16 60 H7B Number of auto switches 2 pcs. 1 pc. n pcs.

CV/MVGQ

L 16 60 S 5 L CVJ3 Without auto switch L S 5 L J79W 16 60 CDVJ3 With auto switch Number of auto switches Action S T Single acting, Spring return Single acting, Spring extend Built-in magnet 2 pcs. 1 pc. n pcs.

C76

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D

SMC Pneumatic Clean Series

Bore size (mm) Nil Built-in magnet Port thread type No Rc NPT G Nil TN TF D With auto switch (Built-in magnet) 10 C D G 1 W L N 25 100 H7B 21 C D G 1 W L N 25 100 H7B Cylinder stroke (mm) Copper, fluorine and silicon-free + Low particle generation Reed switch Type of auto switch C73, B54 Mounting style 21 22 Relief type Vacuum suction type Basic style Axial foot style Rod side flange style

Digital Flow Switch (Remote type sensor unit)

. -20No.PF-OMJ0016-J Specification Specifications Model PFM510 PFM525 PFM550 PFM511 Applicable fluid Dry air, N2, Ar, CO2 (air quality class to ISO8573-1 1.1.2 to 1.6.2) Dry air, N2, Ar 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min Rated flow range CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Accuracy 3%F.S. max. Repeatability 1%F.S. max.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5